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SEMI E94-0705 © SEMI 2000, 2005 9 9 Control Job State Model – Behav ior 9.1 The fol lowing st ate chart defines t he behavior of the C ontrolJob. CONTROLJOB QUEUED SELEC T ED WA I T IN GF OR START ACTIVE EXECUTING PAUSED…

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SEMI E94-0705 © SEMI 2000, 2005 8
Data Identifier Description Form
SubstrateLocation A substrate position at a source and a destination. A carrier is an example of a multi-
location destination. For a wafer carrier the SubstrateLocation is a slot number.
Numeric
8.4.3 ControlRule
8.4.3.1 For equipment that supports this attribute (field), the host sets this in order to achieve better host processing
control capabilities. For example, the host may have previously measured characteristics of the material to be
processed. A standard recipe is used based on the product and process step, but based on the measured
characteristics, the application of the recipe is biased by the specified rule and the value that is passed to the rule
(RuleValue). However, use of ControlRule should not be considered to be limited to only this type of application.
8.4.4 DataCollectionPlan
8.4.4.1 The DataCollectionPlan is a name given by the host to associate data collection activities to a specific
control job. In general, it provides a way for the equip-ment to then inform and coordinate with the host to receive
data collection requests. A DataCollectionPlan is generic and will be applied to many control jobs. The variable
itself, DataCollectionPlan, will hold no significance for the equipment. It is simply a label the equipment reports
back when requested by the host. Normally, the host upon receiving the ControlJob START event would include
DataCollectionPlan as a data variable to be reported. The host then knows that the time is appropriate to set up
various trace reports and event reports on the equipment. Potentially, all jobs that specify the same product type and
process capability could specify the same DataCollectionPlan.
8.4.5 OutputRule
8.4.5.1 This attribute can only be supported by equipment that has some means to determine the status of material
that it has processed. For equipment with that ability, the rule will usually take the form of a list of name value
pairs. The names will be material status and the values will be measurement thresholds that correspond to the status
category (such as, Good, Reject, Rework, etc.). Substrate (material) status changes should be recorded in substrate
histories created by the equipment.
8.4.5.2 Equipment which also supports the MtrlOutbyStatus shall use the status determined by the OutputRule to
place substrates at the Destination associated with MaterialStatus.
8.4.6 PauseEvent
8.4.6.1 For equipment which can support it, this attribute contains a list of equipment events, specified by the host,
at which the host expects the equipment to PAUSE the ControlJob. Equipment suppliers shall document any events
that can be used for the pausing of control jobs. Pausing a control job causes it to stop initiating process jobs. The
host might use this to stop processing after one or more process jobs has started in order to await results before
processing the rest of the material in the control job.
8.4.7 ProcessOrderMgmt
8.4.7.1 This is an enumerated attribute that defines the order in which processing will occur. This standard defines
three enumerations. For some equipment other enumerations may be possible. If they are the supplier shall
document them.
8.4.7.2 LIST
8.4.7.2.1 When ProcessOrderMgmt is set to this value, process jobs shall be initiated in the order of the list in
ProcessingCtrlSpec.
8.4.7.3 ARRIVAL
8.4.7.3.1 When ProcessOrderMgmt is set to this value, process jobs shall be initiated as the material for the job
arrives. Any jobs that do not require material will be initiated first.
8.4.7.4
OPTIMIZE
8.4.7.4.1 When ProcessOrderMgmt is set to this value, process jobs shall be initiated in an order to be determined
by internal equipment algorithms, that optimize the throughput of material in the equipment.
SEMI E94-0705 © SEMI 2000, 2005 9
9 Control Job State Model – Behavior
9.1 The following state chart defines the behavior of the ControlJob.
CONTROLJOB
QUEUED
SELECTED
WAITINGFOR
START
ACTIVE
EXECUTING
PAUSED
COMPLETED
C
6
5
8
9
10
11 12
13
7
1
2
4
3
Figure 2
Control Job State Model
9.2 State Definitions
9.2.1 QUEUED — A ControlJob is queued after its creation or de-selection. A newly created ControlJob is placed
at the tail of the queue.
9.2.2 SELECTED — In this state, the ControlJob does not initiate process jobs specified in it and therefore pre-
defined (based on recipe variable parameters) process conditions can be modified. The processing resource is
reserved (not available for any other jobs) by the ControlJob in the SELECTED state. If materials, required by the
SEMI E94-0705 © SEMI 2000, 2005 10
ControlJob, for processing have not arrived at the equipment, the ControlJob will stay in this state until materials
arrive. If the ControlJob or the first process job in the ControlJob does not require material, this state is exited
immediately. A SELECTED ControlJob can be de-selected if specified materials have not arrived.
9.2.3 WAITING FOR START — The ControlJob is waiting to receive a start command manually or remotely from
the host. The ControlJob transitions to this state only if the StartMethod is set to FALSE (UserStart) and materials
have arrived.
9.2.4 EXECUTING — In this state, each process job in the ProcessingCtrlSpec is initiated in order, based on the
value of the ControlJob’s ProcessOrderMgmt attribute as required resources become available and material for the
job has been verified. Process jobs that have been initiated but that are WAITINGFORSTART or PAUSED shall
block the availability of the resources that they require (see SEMI E40).
NOTE 1: Process jobs that have blocked available resources shall cause the ControlJob to stop initiating subsequent process jobs
that use those resources.
9.2.5 PAUSED — When the ControlJob is paused it shall not commence the initiation of any more Process jobs. In
this state, Process jobs that have not entered the “PROCESSING” state can be modified. Various attributes of the
ControlJob can also be modified. This is equipment specific and shall be documented by the equipment supplier.
9.2.6 COMPLETED — A control job enters this state once all of its process jobs have been completed, stopped or
aborted.
Table 3 ControlJob State Transition Table
Num Previous State Trigger New State Actions Comments
1 (No state) Receive “Create” command
from host or operator through
operator console.
QUEUED Create ControlJob
and put it at the tail
of a control job
queue.
If job queue is full, “Create”
request is rejected.
2 QUEUED Receive “Cancel”, “Abort”, or
“Stop” command from host or
operator through operator
console.
(No state) De-queue and
terminate the job.
Send a “ControlJob
Canceled” event to
the host.
If other control jobs are
waiting behind the canceled
job in the queue, they are
shifted forward to fill in the
gap after the de-queuing of
the canceled control job.
3 QUEUED The processing resource has
capacity to begin work on the
next ControlJob.
SELECTED Select and de-queue
the job at the head of
the queue. Send a
“Selected” event to
the host.
Materials are not necessarily
at the equipment.
4 SELECTED Receive “De-select” command
from host or operator through
operator console and materials
for the control job have not
arrived yet.
QUEUED De-selected job
moves to the head of
the job queue and the
job that was at the
head becomes the
SELECTED job.
The command shall be
rejected if the resources for
the job at the head of queue
are not available. See the
Queue Model.
5 SELECTED Material for the first process job
arrives or in the case where the
first (or only) process job does
not require material, this
transition shall be taken as soon
as the processing resource for
that process job becomes
available.
“StartMethod” attribute in the
ControlJob is set for Auto.
EXECUTING Send “Execution
began” event to the
host.
Process jobs associated with
a carrier will not initiate until
the identifier and substrate
slot map for the carrier have
been verified. Process jobs
that don’t use material can be
initiated immediately.
6 SELECTED Same as for transition 5 except
that the “StartMethod” attribute
in the control job is set for user
start.
WAITING
FORSTART
Send a “JobWaiting
for Start” event to
host and/or operator.