semi合集-English.pdf - 第1834页

SEMI E42-0704 © SEMI 1995, 2004 103 NOTE: Operat ions and ser v ices are perf ormed by the recipe manager . Table 15.3 desc ribes the requ i rements for c ompliance to th e recipe namespace . Table 15.3 Section Reference…

SEMI E42-0704 © SEMI 1995, 2004 102

Table 15.1 describes the requirements for compliance to the managed recipe.

Table 15.1 Section References for Managed Recipe Capabilities

Capability Reference Fundamental

Recipe identifier (class, name, version) 3.2.3 Y

/PROCESS/ recipe class 3.2.3.2 Y

Mandatory and required generic attributes 3.2.5, 3.4.1, 3.4.2 Y

Mandatory and required agent-specific dataset attributes 3.4.2.2 Y

Recipe State Model 8.3, Table 8.1 Y

/PROCESS/ recipe subclass(es) 3.2.3.2 N

Non-process recipe class(es) 3.2.3.2 N

Multi-part recipe (ExtRef, LinkList) 3.2.3.1, 3.4.2.1 N

Variable parameters (Parameters, LinkParam) 3.2.4.2, 3.4.2.1 N

Approval level (ApprovalLevel) 3.4.2.1, 3.4.2.1 N

Certification Certified 3.4.2.1 N

Source Form recipe body 3.2.2.1.1 N

Object Form recipe body 3.2.2.1.2 N

* At least one of the two forms is required.

15.3 Managed Recipe Compliance Table — Table 15.2 provides a statement of compliance for the managed recipe.

Table 15.2 Recipe Namespace Management Compliance Table

Manual Recipe Compliance Table

Fundamental RMS Requirements Implemented RMS Compliant

Recipe identifier (class, name, version) ❒ Yes ❒ No

/PROCESS/ recipe class ❒ Yes ❒ No

Mandatory and required generic attributes ❒ Yes ❒ No

Mandatory and required agent-specific dataset

attributes

❒ Yes ❒ No

Recipe State Model ❒ Yes ❒ No

❒ Yes

❒ No

Additional Capabilities Implemented RMS Compliant

/PROCESS/ recipe subclass(es) ❒ Yes ❒ No ❒ Yes ❒ No

Non-process recipe class(es) ❒ Yes ❒ No ❒ Yes ❒ No

Multi-part recipe (ExtRef, LinkList) ❒ Yes ❒ No ❒ Yes ❒ No

Variable parameters (Parameters, LinkParam) ❒ Yes ❒ No ❒ Yes ❒ No

Approval level (ApprovalLevel) ❒ Yes ❒ No ❒ Yes ❒ No

Agent-specific dataset mandatory and required

attributes

❒ Yes ❒ No ❒ Yes ❒ No

Certification Certified ❒ Yes ❒ No ❒ Yes ❒ No

Source Form recipe body ❒ Yes ❒ No ❒ Yes ❒ No

Object Form recipe body ❒ Yes ❒ No ❒ Yes ❒ No

Do not mark YES unless all fundamental RMS requirements are implemented.

Additional capabilities may not be marked RMS compliant unless all fundamental RMS requirements are implemented.

15.4 Recipe Namespace Management — Recipe Namespace Management requires compliance to specifications for

the managed recipe, the recipe namespace, and the recipe namespace manager.

15.4.1 Recipe Namespace — This section defines RMS compliance for the recipe namespace object. A recipe

namespace exhibits RMS compliance through its attributes and access to managed recipes.

SEMI E42-0704 © SEMI 1995, 2004 103

NOTE: Operations and services are performed by the recipe manager.

Table 15.3 describes the requirements for compliance to the recipe namespace.

Table 15.3 Section References for Recipe Namespace Capabilities

Capability Reference Fundamental

Fundamental compliance to managed recipe 15.2, Table 15.2 Y

Basic requirements 4.3, 4.4, 4.6, 8.2.1 Y

15.4.2 Recipe Namespace Manager — Table 15.4 describes RMS compliance for the recipe namespace manager.

Table 15.4 Section References for Recipe Namespace Manager Capabilities

Capability Reference Fundamental

Basic requirements 4.3, 4.6 (Table 4.2), 8.2.1 Y

OSS services 9.1, 9.1.1–9.1.2 Y

Create recipe (RMNCreate) 8.2.2, 8.2.2.1, 9.4.1, 12.9 Y

Update recipe (RMNUpdate) 8.2.2.2, 9.4.2, 12.10 Y

Verify recipe (RMNAction) 8.2.3.1, 9.4.7, 12.15 Y

Link recipe (RMNAction) 8.2.3.2, 12.15 Y

Get recipe descriptor (RMNGetDescriptor) 8.2.7.1, 12.17 Y

Get available space (RMNSpaceInquire) 9.3.1, 12.6 Y

Check recipe status (RMNRcpStatInquire) 9.3.2, 12.7 Y

Get best version (RMNVersionInquire) 9.3.3, 12.8 Y

Store recipe (RMNStore) 9.4.3, 12.11 Y

Download execution recipe (RMNAction) 6.3.2, 9.4.8, 12.15 Y

Retrieve recipe (RMNRetrieve) 9.4.4, 12.12 Y

Recipe Namespace Change Event 9.6 Y

Action complete notification (RMNComplete) 12.18 Y

Upload execution recipe (RMNAction) 9.4.9, 12.15 N

Unlink recipe (RMNAction) 8.2.3.3, 12.15 N

Approve recipe (RMNAction) 8.2.4.1, 12.15 N

Protect recipe (RMNAction) 8.2.5, 12.15 N

Unprotect recipe (RMNAction) 8.2.6, 12.15 N

Certify recipe (RMNAction) 8.2.4.2, 8.2.7, 12.15 N

Decertify recipe (RMNAction) 8.2.8, 12.15 N

Create namespace (RMNCreate) 9.2.1, 12.3 N

Delete namespace (RMNDeleteNS) 9.2.2, 12.4 N

Rename namespace (RMNRename) 9.2.3, 9.4.6, 12.5 N

Copy recipe (RMNCopy) 9.4.5, 12.13 N

Upload recipe (RMNAction) 9.4.9, 12.15 N

Modify recipe variable parameters (RMNVarPar) 8.2.3.4, 12.16 N

Recipe synchronization 9.5 N

SEMI E42-0704 © SEMI 1995, 2004 104

15.4.3 Recipe Namespace Management Compliance Table — Table 15.5 provides a statement of compliance for

recipe namespace management.

Table 15.5 Recipe Namespace Management Compliance Table

RMS Recipe Namespace Management Compliance Statement

Fundamental RMS Requirements Implemented RMS Compliant

Managed Recipe Object ❒ Yes ❒ No

Recipe Namespace Object ❒ Yes ❒ No

Recipe Namespace Manager Object Basic

Requirements

❒ Yes ❒ No

OSS Services ❒ Yes ❒ No

Create Recipe ❒ Yes ❒ No

Update Recipe ❒ Yes ❒ No

Verify Recipe ❒ Yes ❒ No

Link Recipe ❒ Yes ❒ No

Get Recipe Descriptor ❒ Yes ❒ No

Get Available Space ❒ Yes ❒ No

Check Recipe Status ❒ Yes ❒ No

Get Best Version ❒ Yes ❒ No

Store Recipe ❒ Yes ❒ No

Download Recipe ❒ Yes ❒ No

Retrieve Recipe ❒ Yes ❒ No

Recipe Namespace Change Event ❒ Yes ❒ No

Action Complete Notification ❒ Yes ❒ No

❒ Yes

❒ No

Additional Capabilities Implemented RMS Compliant

Upload Recipe ❒ Yes ❒ No ❒ Yes ❒ No

Unlink Recipe ❒ Yes ❒ No ❒ Yes ❒ No

Approve Recipe ❒ Yes ❒ No ❒ Yes ❒ No

Protect Recipe ❒ Yes ❒ No ❒ Yes ❒ No

Unprotect Recipe ❒ Yes ❒ No ❒ Yes ❒ No

Certify Recipe ❒ Yes ❒ No ❒ Yes ❒ No

Decertify Recipe ❒ Yes ❒ No ❒ Yes ❒ No

Delete Namespace ❒ Yes ❒ No ❒ Yes ❒ No

Rename Namespace ❒ Yes ❒ No ❒ Yes ❒ No

Copy Recipe ❒ Yes ❒ No ❒ Yes ❒ No

Upload Recipe ❒ Yes ❒ No ❒ Yes ❒ No

Modify Recipe Variable Parameters ❒ Yes ❒ No ❒ Yes ❒ No

Recipe Synchronization ❒ Yes ❒ No ❒ Yes ❒ No

Do not mark YES unless all fundamental RMS requirements are implemented.

Additional capabilities may not be marked RMS compliant unless all fundamental RMS requirements are implemented.