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SEMI F97-0305 © SEMI 2005 13 9.4.6 Alarm-Mode 9.4.6.1 Alarms are being defined on a case by case basis betw een the purchaser and the supplier of the FMCS and FPUs and the system integrator. Alarm-M ode specifies whether…
SEMI F97-0305 © SEMI 2005 12
Table 4 State Transition Table Run-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. Down
or
Stand by
or
Run
None. Dependent on type of FPU;
Normally when to Stand-by
then to Stand by and not
locked, but an automatic
function may force FPU to
Stand-by and locked;
Normally when to Run then to
Run and not locked, but an
automatic function may force
FPU to Run and locked.
2 Down Trigger to activate the
principal availability of the
FPU (e.g. operator action or
logical function).
Stand-by FPU activates its stand-
by functions including
watchdog-toggle.
Normally to Stand-by and not
locked, but an automatic
function may force FPU to
Stand-by and locked.
3 Stand-by
and
Not_Locked
Failure occurred. Down FPU deactivates its
stand-by functions.
4 Stand by
and
Not_Locked
Trigger to lock Stand by
state.
Stand-by and
Locked
FPU ignores trigger and
any request to change
state of Run-mode.
5 Stand-by
and
Locked
Trigger to perform a
scheduled down or non
critical failure.
Stand-by and
Locked
FPU ignores trigger and
any request to change
state of Run-mode.
6 Stand-by
and
Locked
Trigger to unlock. Stand by and
Not_Locked
FPU releases pending
triggers to change to
other states.
7 Stand-by
and
Locked
Critical failure occurred. Down FPU deactivates its stand
by functions.
8 Stand-by
and
Not_Locked
Trigger to activate Run (e.g.
operator action or logical
function).
Run
and
Not_Locked
FPU activates its running
functions.
9 Run
and
Not_Locked
Trigger to activate Stand-by
(e.g. operator action or
logical function).
Stand-by
and
Not_Locked
FPU deactivates its
running functions.
10 Run
and
Not_Locked
Trigger to lock Run. Run
and
Locked
FPU ignores trigger and
any request to change
state of Run-mode.
11 Run
and
Locked
Trigger to perform a
scheduled down or non
critical failure.
Run
and
Locked
FPU ignores trigger and
any request to change
state of Run-mode.
12 Run
and
Locked
Trigger to release locked
state of Run.
Run
and
Not_Locked
FPU releases pending
triggers to change to
other states.
13 Run
and
Locked
Critical failure occurred. Down FPU stops its running
functions.
14 Run
and
Not_Locked
Trigger to perform a
scheduled down or a critical
failure.
Down FPU deactivates its
running functions.
SEMI F97-0305 © SEMI 2005 13
9.4.6 Alarm-Mode
9.4.6.1 Alarms are being defined on a case by case basis between the purchaser and the supplier of the FMCS and
FPUs and the system integrator. Alarm-Mode specifies whether an alarm occurred:
No_Alarm: No alarm present.
Alarm: An alarm is present (at least one part of the FPU is in alarm condition
).
Alarm-Mode
No_Alarm Alarm
2
3
1
Figure 8
State Transition Diagram Alarm-Mode
Table 5 State Transition Table Alarm-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Alarm None.
2 No_Alarm Alarm event occurred. Alarm FPU may perform
alarm routines.
3 Alarm Alarm condition
disappeared.
No_Alarm FPU releases
alarm routines.
9.4.7 Warning-Mode
9.4.7.1 Warnings are being defined on a case by case basis between the purchaser and supplier of the FMCS and
FPUs and the system integrator. Warning-Mode specifies whether a warning occurred:
No_Warning: No warning present
Warning: Warning present.
Warning-Mode
No_Warning Warning
2
3
1
Figure 9
State Transition Diagram Warning-Mode
SEMI F97-0305 © SEMI 2005 14
Table 6 State Transition Table Warning-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Warning None.
2 No_Warning Warning event occurred. Warning FPU may perform
warning routines.
3 Warning Warning condition
disappeared.
No_Warning FPU releases
warning routines.
9.4.8 Error-Mode
9.4.8.1 Errors are being defined on a case by case basis by the purchaser and supplier of the FMCS and FPUs and
the system integrator. Error-Mode specifies whether an error occurred:
No_Error: No error present.
Error: Error present.
Error-Mode
No_Error Error
2
3
1
Figure 10
State Transition Diagram Error-Mode
Table 7 State Transition Table Error-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Error FPU may release
error routines.
2 No_Error Error occurred. Error FPU may perform
error routines.
3 Error Error condition
disappeared.
No_Error FPU may release
error routines.
9.4.9 Maintenance-Mode
9.4.9.1 Maintenance-Mode specifies whether maintenance is required or no maintenance is required:
No_Maintenance: No maintenance required.
Maintenance: Maintenance is required (at least one part of the FPU requires maintenance at the site of the
FPU).