semi合集-English.pdf - 第1106页

SEMI E5-1104 © SEMI 1982, 2004 48 Name Format Description Value s Class SymptomID 5() A numeric code representing the symptom that initiat ed the user- initiated state change. A value of zero indicates “no symptom”. SV S…

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SEMI E5-1104 © SEMI 1982, 2004 47
Name Format Description Values Class
RcpChangeStatus 51 The type of change that occurred
for the recipe indicated in
RcpChangeName
0 = No change
1 = Created
2 = Updated (modified)
3 = Stored (new)
4 = Replaced
5 = Deleted
6 = Copied
7 = Renamed
8,9 Reserved
>10 Reserved
DVVAL
RcpExecName 0, 20 The identifier, or a list of
identifiers, of currently selected
recipes. A zero-length item or list
indicates no recipes are currently
selected.
SV
ReticleIDVerification 11 This equipment constant is used
to indicate whether Reticle ID
verification is required
ECV
ReticleParticleInspection 11 This equipment constant is used
to indicate whether Reticle
Particle Inspection in required.
ECV
SbyRecovery 11 A boolean value that enables
(TRUE) or disables (FALSE) the
equipment-initiated return to
STANDBY from
UNSCHEDULED DOWNTIME
ECV
SbyTime 5() Accumulation of time in
STANDBY, reported in minutes
ECV
SDTime 5() Accumulation of time in
SCHEDULED DOWNTIME,
reported in minutes
ECV
SpoolCountActual 5() Used to keep a count of the
messages actually contained in
the equipment’s spool area.
Multi-block inquire/grant
messages are not spooled and not
included in this count.
SV
SpoolCountTotal 5() Used to keep a count of the total
number of primary messages
directed to the spool, regardless of
whether placed or retained in the
spool. Multi-block inquire/grant
messages are not spooled and not
included in this count.
SV
SpoolFullTime 20 Contains the timestamp from the
time the spool last became full. If
the spool was not filled during the
last spooling period, this will
contain a time value prior to the
current SpoolStartTime. Uses the
same format as the CLOCK
variable data item.
SV
SpoolStartTime 20 Contains the timestamp from the
time spooling last became active.
Uses the same format as the
CLOCK variable data item.
SV
SEMI E5-1104 © SEMI 1982, 2004 48
Name Format Description Values Class
SymptomID 5() A numeric code representing the
symptom that initiated the user-
initiated state change. A value of
zero indicates “no symptom”.
SV
SymptomText 20 Text describing the SymptomID.
0–80 characters.
SV
TimeFormat 5()
NOTE 5: The setting of this ECV
controls whether the equipment
shall send the Data Items STIME
and TIME in 12 or 16-byte format.
0 = 12-byte format
1 = 16-byte format
>1 Reserved
ECV
TransitionType 10 Used with the Limits Monitoring
capability, it defines the direction
of the zone transition which has
occurred.
0 = Transition from lower to
upper zone.
1 = Transition from upper to
lower zone.
DVVAL
TRATID 5() Contains the TRATOMICID of
the atomic transfer referenced by
the event.
DVVAL
TRJOBIDENT 5() Contains the TRJOBID for the
transfer job referenced by the
event.
DVVAL
TRJOBNM 20 Contains the TRJOBNAME for
the transfer job referenced by the
event.
DVVAL
TRLNK 5() Contains the TRLNK value for
the atomic transfer referenced by
the event
DVVAL
UDTime 5() Accumulation of time in
UNSCHEDULED DOWNTIME,
reported in minutes
ECV
9.8 Object Dictionary — This section defines the public attributes of objects which are available through SECS-II
messages.
9.8.1 The attributes of an object are defined in a table for each object in the following form:
Table 5 Agent Attribute Definition
Attribute Name Definition Access Format Value
“ObjType” Agent object type. RO 20 “Agent”
“ObjID” The agent’s name, assigned by an authorized user. RO 20
Table 6 Agent-Specific Dataset Object Attribute Definition
Attribute Name Definition Access Format Value
“ObjType” The object type. RO 20 “MRcpASDS”
“ObjID” The object’s identifier. Contains the value in
AgentSpec Agent.
RO 20
“AgentSpec_Agent” The name of the executing agent to which the other
attributes in the dataset apply. Mandatory.
RO 20
“AgentSpec_AttrLength” The length of the agent-specific attributes, in bytes.
Mandatory.
RO 54
“AgentSpec_ChgTime” Timestamp of when an agent-specific attribute was last
changed. Mandatory.
RO 20
SEMI E5-1104 © SEMI 1982, 2004 49
Attribute Name Definition Access Format Value
“AgentSpec_Comments” Comments specific to the agent entered by the author. RW 20 Maximum length is 80
characters.
“AgentSpec_LinkParam” A list of variable parameter definitions modified from
the list in LinkParam
. Valid only for a linked main
recipe. Parameter name and form may not be
changed.
RO 00 List of structures composed
of parameter name, value,
and restrictions.
“Certified” The certification level for the specific agent, assigned
by an authorized user. Reset when AgentSpec
LinkParam is modified. Required for certification
support.
RW 52
“AgentSpec_UD_” Non-standard attribute defined by the supplier or user.
Asterisk indicates the part of the attribute name that is
provided in this definition. Must be preserved exactly
except by the defining entity.
RO 10, 11
20, 3()
4(), 5()
Text form is limited to 80
characters.
Table 7 Collection Event Object
Attribute Name Description Access Format Related Data Items Value
“ObjType” Collection Event Object type RO 20 - “COLLEVENT”
“ObjID” Collection Event Identifiers RO 20 CEID -
“Enabled” Boolean true means reporting is enabled for a
specific CEID.
RW 11 CEED -
“EventSource” Object specifier for object which generates the
event for a specific CEID.
RO 20 EVNTSRC -
“DataReportList” List of Report Identifiers linked to a specific CEID. RO 20 - (list of) RPTID
Table 8 Data Report Object
Attribute Name Description Access Format Related Data Items Value
“ObjType” Data Report Object Type RO 20 - “DATARPT”
“ObjID” Object identifier for a data report RO 20 RPTID -
“DataSource” Source for the variable data, not writable for
predefined provider reports
RO 20 DATASRC -
“AttrList” Returns the attribute (or variable) names that this
report is requesting from the Data source.
RW * - (list of) VID
Table 9 Data Source Object
Attribute Name Description Access Format Related Data Items Value
“ObjType” Data Source Object Type RO 20 - “DataSource”
“ObjID” Identifier of a specific Data Source Object RO 20 DATASRC -
“AttrList” Name of attributes for a specific Data Source
Object
RO * - (list of) VID
Table 10 Distributed Recipe Namespace Attribute Definition
Attribute Name Description Access Format Value
“ObjType” The object type. RO 20 “RNSD”
“ObjID” Text. RO 20
“LockedRecipes” A list of identifiers of all recipes with existing change
request records.
RO 20