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SEMI E98-1102 © SEMI 2000, 2002 20 Abs t r ac t Equipment Subsystem held at Mat erial Location Mat erial provide s A bstract Equipm entMo dule Equipm ent Subsys tem Figure 10 AbstractEquipmentSubsys tem Subtypes 10.4 Abs…

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SEMI E98-1102 © SEMI 2000, 2002 19
Table 5 EquipmentIODevice Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text = “EqpIODevice”
ObjID Object identifier RO Y Text
AlgorithmID Identifier of any algorithm used
to produce the set of observable
values.
RO or RW Y Text
HardwareRevision Revision level for hardware. RO Y Text. 1–5 characters.
ModelNumber Manufacturer model number. RO Y Text. 1–20 characters.
Numberof-Observables The number of data items
provided
RO Y Integer
SoftwareRevision Revision level for s/w or
firmware
RO Y Text. 1–5 characters.
Observables
I
Information about the ith item of
observable data values.
RO Y Structure comprised of Name, Value,
Units, and Range, and Timestamp as
follows.
Name The name of the data, sensor, or
actuator.
RO Y Text
DataDimension Used for arrays to indicate the
number and length of “rows” of
data.
RO N.
Required
for arrays.
List of unsigned integers.
Datatype The form of the data. RO Y Enumerated.
DeltaValue Amount of change from the target
for reporting. Zero value
indicates it is not used.
RW N As indicated by Datatype.
InterlockStatus Status of current interlock. RO N.
Required
for
Actuator
types.
Enumerated: None, Off, On
NominalValue Target used for reporting change
of DeltaValue.
RW N Numeric text string. If empty, is not used.
ObservableType Type of Observable. RO Y Enumerated
Possible Units List of possible units RO N List of text
Range Valid interval or set of possible
discrete values.
RO Y Text
ReadRate Interval between sequential reads,
in seconds.
RO Y Floating point
ReportChange A user-settable switch to enable
or disable reporting.
RW N Boolean. Set TRUE when enabled.
ReportRate Interval between sequential
reports, in seconds.
RW N Floating point. Zero indicates no time-
based reporting.
Timestamp The date and time when the value
was last read or set.
RO Y Numeric. Specific form to be resolved.
Units Units of measurement RO or RW Y if value
is scalar.
Text. Conforms to units specified in SEMI
E5 (SECS-II) Units of Measurement
Identifiers.
Value Current value. RO Y Single item or array of numeric, or text
DeviceType Defines the type of device (e.g.,
“MFC”, “OES”, FTIR”, “CDG”,
etc.)
RO Y Text 1–8 characters
SEMI E98-1102 © SEMI 2000, 2002 20
Abstract
Equipment
Subsystem
held at
Material
Location
Material
provides
Abstract
EquipmentModule
Equipment
Subsystem
Figure 10
AbstractEquipmentSubsystem Subtypes
10.4 AbstractEquipmentSubsystem Object
10.4.1 The AbstractEquipmentSubsystem is a subtype
of AbstractEquipmentElement and inherits all of its
attributes and services. It may have associated
MaterialLocations to hold Material.
AbstractEquipmentSubsystem represents all subsystem
and subassembly components of which the equipment
is made up. The AbstractEquipmentSubsystem may or
may not be capable of holding material and may or may
not have recipe execution capability.
10.4.2 Figure 10 shows the relationships of the
EquipmentSubsystem.
10.4.3 Material Object
10.4.3.1 An AbstractEquipmentSubsystem may or may
not be able to hold material. Those that are able to hold
material owns any material that it holds at any given
point in time. They are expected to know the type of
material that they hold, whether material is present, and
the identifier of the material. In some cases, the
AbstractEquipmentSubsystem may be able to hold
multiple units of material or more than one type of
material.
10.4.3.2 There are three major subtypes of material
objects: consumables, durables, and substrates, where
the major subtypes of durables are carriers and process
durables.
10.4.3.3 Consumable materials, such as chemicals, are
used up (as opposed to worn out) during the
manufacturing process.
10.4.3.4 Durable material has a significant lifetime and
is not part of the equipment (is removable). It includes
material that some equipment may require to operate.
The subtype of durable of common interest to almost all
equipment is carrier. A carrier is a durable used to hold
substrates. Process durables are of special interest to a
limited subset of equipment. A process durable is an
identifiable durable that is specified for a certain
process step and recipe. For example, reticles are
identified by product id and the mask level where used,
and they are also identified by serial number. The
factory is very interested in the management and
tracking of process durables.
10.4.3.5 Product is typically a Substrate. In the
semiconductor industry, Substrates include Wafer, Die,
and Leadframe. Reticles are considered a Substrate by
some equipment. In the semiconductor industry,
reticles are considered as a process durable rather than a
product. Specific reticles are specified in recipes for
expose tools and modules. In other industries,
substrates include flat panel (for flat panel displays) and
discs (for hard disk drives).
10.4.3.6 Material objects are not formally defined in
OBEM. Carrier objects are defined in SEMI E87
(CMS) and substrate objects are defined in SEMI E90
(STS).
10.4.4 Material Locations
10.4.4.1 A material location is a place that is capable of
holding material.
10.4.4.2 A MaterialLocation is an abstraction used to
facilitate the tracking of material without regard to the
physical component associated with the tracking
location. For example, a substrate chuck is a subsystem
and can hold a single substrate on its surface. The
entire subsystem consists of a stage that may or may not
be able to move. It may use vacuum to hold the
substrate in place, and it may have additional
mechanisms and sensors. The MaterialLocation only
represents the surface of the chuck. For this reason, the
EquipmentSubsystem is said to provide a
MaterialLocation rather than to be made up of
MaterialLocations through aggregation.
10.4.4.3 This relationship is illustrated in Figure 11.
10.4.4.4 The MaterialLocation object is an abstract
type. Figure 11 shows the subtypes of
MaterialLocations of interest to OBEM.
SEMI E98-1102 © SEMI 2000, 2002 21
Material
Location
Consumables
Location
Substrate
Location
Carrier
Location
Process
Durable
Location
Figure 11
MaterialLocation Subtypes
10.4.4.5 MaterialLocation Object — Figure 12 shows the attributes of the MaterialLocation that are defined in
Table 6. Every subtype of MaterialLocation shall have, at a minimum, attributes showing its current state and the
ID of any material present.
LocationState
MaterialType
MaterialID
Material
Location
Figure 12
MaterialLocation Object Type
Table 6 MaterialLocation Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text=“MatlLoc”
ObjID Object identifier RO Y Text
LocationState Current state. RO Y Enumerated:
Occupied
Unoccupied
MaterialType Type of material held. RO Y Enumerated: One of, or a subtype of, the following
Consumable
Carrier
Substrate
ProcessDurable
MaterialID Identifier of any material that
occupies the location.
RO Y Text. “Unknown” if identifier is not known. Null
(empty) string if location is unoccupied.
10.4.4.6 CarrierLocation Object — The CarrierLocation attribute LocationState may allow an additional
enumeration Not Aligned, as shown in Table 7.
Table 7 CarrierLocation Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text=“CarrierLoc”
ObjID Object identifier RO Y Text
LocationState Current state. RO Y Enumerated:
Occupied
Unoccupied
Not aligned