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SEMI E19.5-0996 © SEMI 1978, 2003 4 5.1.1 Port Door — Dimension Al specifies the port door radi us. The ga p between port d oor and port pl ate is not specifie d , but sh ould be kept to a m inimum di stance to restrict …
SEMI E19.5-0996 © SEMI 1978, 2003 3
The requirements and dimensions for the design of 300 mm standard mechanical interface ports and pods are given
in this section. All external dimensions of the interface between a pod and port are specified in SEMI E15.1.
5.1 Port Design Requirements — The general design of the port is shown in Figures 2 and 3. Design requirements
for the interface components are provided in Sections 5.1.1 through 5.1.6.
Figure 2
Port Dimensions
Figure 3
Port Detail
SEMI E19.5-0996 © SEMI 1978, 2003 4
5.1.1 Port Door — Dimension Al specifies the port
door radius. The gap between port door and port plate is
not specified, but should be kept to a minimum distance
to restrict particle transport.
5.1.2 Pod Guide Rails — The inside feature of the pod
guides rails of the port are specified by B1, B2, and B3.
The features provide alignment for the pod top.
5.1.3 Pod Hold-Down Latches — The available latch
area is specified by dimensions B1, B4, and B5 in
Figure 2. Latch detail dimensions are specified by D1
and D2 in Figure 3.
5.1.4 Pod Door Latch Pins — Two latch pins are
located around the port door center and are specified by
C1, C2, and C3.
5.1.5 Kinematic Pins — Three kinematic pins provide
registration of the pod door to port plate. Details and
locations of the kinematic pins are not specified in this
standard. They are being addressed in a separate
document currently under development.
5.1.6 Pod in Place Sensor — An optional sensor, for
the sensing of proper pod placement shall be located on
the port door as specified by E1 and E2. The sensor
shall have a minimum activation height of E3 and full
travel to the port plate.
5.2 Pod — The bottom surfaces of the pod body and
pod door shall conform to the specified port
dimensions. Although the pod dimensions are not
explicitly specified by this standard, the following
requirements apply. (Pod dimensions are being
addressed in a separate document currently under
development.)
5.2.1 The upper part of the pod body and the top
surface of the pod door must fit and hold in place the
wafer cassette, which will be specified in a separate
document currently under development.
5.2.2 The center of the wafers and pod door shall
coincide. The top surface of the pod door incorporates
kinematic features that position the cassette on the pod
door.
5.2.3 The bottom surface of the pod door at its
perimeter shall match the radius of the port door top
(dimension Al). The tolerances shall be chosen so that
the pod door does not extend over the port door in any
instance, even when the port door is built to its minimal
acceptable dimensions and potential variance between
kinematic pins and socket is considered. This is to
ensure an interference-free passage of the pod door
through the port opening.
5.2.4 The base of the pod body shall fit freely but with
close tolerance between the pod guide rails, which not
only hold the pod in place while the port is open, but
also provide proper alignment for closure of the pod at
the end of the open/close cycle.
6 Related Documents
The following articles describe the standard mechanical
interface concept:
6.1 “The Challenge to Control Contamination: A
Novel Technique for the IC Process,” The Journal of
Environmental Sciences, (May/June, 1984), page 23.
6.2 “SMIF, A Technology for Wafer Cassette Transfer
in VLSI Manufacturing,” Solid State Technology,
(July, 1984), page l11.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E20-0697 © SEMI 1991, 2002 1
SEMI E20-0697 (Reapproved 1102)
CLUSTER TOOL MODULE INTERFACE: ELECTRICAL POWER AND
EMERGENCY OFF STANDARD
This standard was technically approved by the Global Physical Interfaces and Carriers Committee and is the
direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition
approved by the North American Physical Interfaces and Carriers Committee on July 21, 2002. Initially
available at www.semi.org October 2002; to be published November 2002. Orignally published in 1991;
previously published June 1997.
1 Purpose
1.1 The purpose of the standard is to specify the
Emergency Off capability to the modules of a cluster
tool; to allow module Emergency Off disconnect and
reconnect in a safe manner without removing power
from the rest of the tool; and to prevent power from
being applied to a module when its Emergency Off is
non-functional.
2 Scope
2.1 The standard deals with the delivery and
emergency interruption of electrical power to the
modules of a cluster tool.
2.2 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Impact
3.1 The standard requires that power can be delivered
to an individual module only if its Emergency Off is
functional. This does not preclude removal of power
from the module by non-emergency means.
3.2 The standard specifies the Emergency Off circuit
functions that must be provided at the Emergency Off
interfaces of a cluster tool, including the plug,
momentary bypass switch and bypass jumper plug.
Pinouts for the Emergency Off plug and bypass jumper
plug are specified.
4 Referenced Standards
4.1 SEMI Standards
SEMI E21 — Cluster Tool Module Interface:
Mechanical Interface and Wafer Transport Standard
4.2 Military Standards
1
1 Available through the Naval Publications and Forms Center, 5801
Tabor Avenue, Philadelphia, PA 19120-5099, USA. Telephone:
215.697.3321
MIL-C-26500E — General Specification for
Connectors — General Purpose, Electrical, Miniature,
Circular, Environmental Resisting
5 Terminology
5.1 Definitions
5.1.1 daisy-chained — Connected so that the removal
of one component causes the interruption of the circuit
to another component.
5.1.2 emergency off (EMO) — Fail-safe control switch
or circuit which, when de-energized, will stop the
operation of associated equipment and will shut off all
potential hazards outside the main power enclosure.
5.1.3 EMO interface — The location at which a
process or cassette module EMO cable is connected
into the cluster tool circuit.
6 Requirements
6.1 Power Distribution
6.1.1 Mains — Each cluster tool (as defined in SEMI
E21) shall have its power provided by one or more
contactors enabled by the EMO. The power is to be
delivered to one or more power distribution enclosures,
where voltage transformation may take place before
distribution to the module (as defined in SEMI E21).
6.1.2 Module Power Distribution — The power
distribution to each module is provided through a
dedicated circuit breaker in the power distribution
enclosure. The rated current and voltage in each circuit
is determined by the tool configuration. A discussion of
how this standard may be implemented is given in
Related Information R1-1.
6.1.3 Operation of the EMO — Activation of the EMO
shall not cause or allow an unsafe condition to exist
(see Related Information R1-2).
6.2 EMO Circuit
6.2.1 Description — Each module attached to the
cluster tool is to have at least one EMO button
operating an EMO switch (see Related Information R1-
3). The switches are daisy chained into a circuit, or
circuits, that disconnect the main power and any backup