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SEMI C3.55-02 00 © SEMI 2000 6 NOTICE: These standards do n ot purport to address safety issu e s, if any, associated with their use. It is the responsibility of the user o f these standards to establish appro priate saf…

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SEMI C3.55-0200 © SEMI 20005
questionable connections or leaks, report this to the supervisor
immediately and do not proceed with the analysis.
NOTE 2: Introduce the calibration standard as many times as
necessary to achieve the desired precision. Detection limit
calculated on these calibrations should achieve at least that
listed for this procedure.
Figure 1
Chloride Scrubbing Apparatus
Figure 2
Moisture Analysis in Silane
SEMI C3.55-0200 © SEMI 2000 6
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI C3.24-0301 © SEMI 1984, 20011
SEMI C3.24-0301
SPECIFICATION FOR SULFUR HEXAFLUORIDE (SF
6
) IN CYLINDERS,
99.97% QUALITY
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on November 22, 2000. Initially available at www.semi.org January 2001; to be published March
2001. Originally published in 1984; previously published in 1995.
1 Description
1.1 Sulfur hexafluoride is colorless and odorless. It is
noncombustible and has a low toxicity. It is shipped as
a liquefied gas under its own vapor pressure.
2 Specifications
QUALITY: 99.97%
Impurities
Maximum Acceptable Level
(ppm) (See NOTE 1.)
Air 100
Carbon Tetrafluoride (CF
4
) 100
Hydrogen Fluoride (HF) 1
Water (H
2
O) (mol/mol) 8
TOTAL LISTED
IMPURITIES
209
NOTE 1: An analysis of significant figures has not been considered.
The number of significant figures will be based on analytical
accuracy and the precision of the provided procedure.
3 Physical Constants (for in formation only)
Metric Units US Units
Molecular weight 146.054 146.054
Boiling point at 1 atm -63.7°C -82.7°F
Density of gas at 20°C
(68°F) and 1 atm
6.162 kg/m
3
0.385 lb/ft
3
Specific gravity of gas at
21.1°C (70°F) and 1 atm
(air = 1)
5.114 5.114
Density of liquid at -50°C 1910 kg/m
3
119.2 lb/ft
3
4 Analytical Procedures (No tes 1, 2, and 3)
4.1 Air and Carbon Tetrafluoride — This procedure is
for the determination of air and carbon tetrafluoride
using a gas chromatograph with a thermal conductivity
detector.
4.1.1 Detection Limit — 1 ppm (mol/mol)
4.1.2 Instrument Parameters
4.1.2.1 Column: 2.4 m (8 ft) by 6.4 mm (1/4 in) OD,
5.1 mm (0.201 in) ID stainless steel tubing packed with
Porapak Q (80/100 mesh) or equivalent.
4.1.2.2 Carrier Flow: 30 mL/min helium.
4.1.2.3 Sample Volume: 1 mL.
4.1.2.4 Temperatures:
Detector 110°C
Column 70°C
4.1.3 Calibration Standards — 90–100 ppm
(mol/mol) carbon tetrafluoride, 90–110 ppm (mol/mol)
Air (O
2
/N
2
blend), balance helium.
4.1.4 Operating Procedure
4.1.4.1 Inject the calibration standard. Analyze the
standard using the conditions described above. Record
the retention times and peak areas.
4.1.4.2 Inject the sample to be tested in the same
manner as the calibration standard. Record the retention
times and peak areas.
4.1.4.3 Repeat 4.1.4.1.
4.1.4.4 Calculate the concentrations of air and carbon
tetrafluoride in the sample, using the formula below.
The result may not exceed the specification in Section 2
of this Standard.
Sample Peak Area
Standard Peak Area
×
Concentration
of Standard
=
Concentration
of Sample
4.2 Hydrogen Fluoride — This procedure is for the
determination of hydrogen fluoride by quantitative
collection in dilute sodium carbonate (NaHCO
3
) and
subsequent analysis by ion chromatography.
4.2.1 Detection Limit — 0.1 ppm for the method
Equipment Required:
500 mL Greenburgh impinger
50 mL Class A pipet
Type 316 stainless steel delivery system
5' Fluorocarbon tubing, 1/4 in OD by 0.03 in wall
Reagent Grade sodium bicarbonate
Deionized water