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SEMI S16-0600 © SEMI 2000 4 10 Equipmen t Disposal Proc e d u re 10.1 The possibility of refurbishing t he e ntire piece of equipment s hould be considered before disass e mbly and disposal is selected. 10.1.1 When refur…
SEMI S16-0600 © SEMI 20003
7 Information Provided by the Supplier
7.1 The supplier should provide the equipment owner
with operation and/or maintenance manuals or similar
documents drafted according to SEMI S13, which
include the following information on the materials used
in equipment, subassemblies and components upon the
delivery of the equipment:
NOTE 2: The supplier may gather appropriate information at
the time of design in conjunction with a disposal party.
7.1.1 Primary materials of appropriate disassemble-
able unit in consideration with reuse, refurbishing,
recycling and disposal of each component such as,
chemicals (e.g., mercury), metals (e.g., stainless steel,
steel, or copper), plastics (e.g., ABS - i.e., Acrylon-
itorile Butadiene Styrene plastics - or non-combustible
ABS), glass, or ceramics.
7.1.2 Describe opportunities for reuse, refurbishing or
material recycling of every component or recyclable
subassembly. If there are no opportunities, a waste
disposal method should be recommended based on
assumption of usage with baseline process by the
supplier. (e.g., ABS can be recycled after
decontamination as class X plastic and mercury
requires reclaim or hazardous waste disposal.)
7.1.3 Disassembly Procedure
7.1.3.1 A disassembly procedure should be
recommended by the supplier to the level required to
facilitate complete decontamination and material
separation for waste disposal.
7.1.3.2 The disassembly procedure should include
procedures to remove all hazardous energies.
7.1.3.3 The disassembly procedure should prevent the
mixture of incompatible chemicals. If it is not feasible,
administrative control procedures should be included.
7.1.3.4 If the chemicals/materials described from
Sections 7.1.3.4.1 to 7.1.3.4.4 are hazardous, the
disassembly procedure should prevent the release of
them to the environment. The chemicals include:
7.1.3.4.1 Chemicals used to maintain the equipment
(e.g., lubricant and coolant).
7.1.3.4.2 Other potentially hazardous items which are
parts of the equipment, such as capacitors, batteries,
lamps or mercury, which require special disposal
procedures.
7.1.3.4.3 Chemicals used in the baseline process of the
equipment manufacturer.
7.1.3.4.4 Anticipated byproducts of the baseline
process.
NOTE 3: Byproducts are changeable according to several
kinds of conditions such as exhaust diameter/length/volume,
chamber volume/pressure/configuration, maintenance meth-
od/cycle, and evacuation frequency.
7.1.3.4.5 The disassembly procedure should address
any hazards of ionizing radiation sources, if they are
present, and address safe removal and storage
procedures.
7.1.4 Disposal procedure should be a safer way based
on the result of risk assessment such as SEMI S10 or
EN 1050 and job hazard analysis.
8 Information Provided by t he Equipment
Owner
8.1 Prior to disposal, the equipment owner should
provide the following information to the disposal party
in order to reflect all residual waste hazards. This
information should be provided to any party handling
the waste regardless of intention to dispose or recycle
the equipment unless the component in question is fully
decontaminated.
8.1.1 Relevant information provided by the supplier
per Section 7 of this document.
8.1.2 Chemicals used in the equipment owner specific
process other than the baseline process and its
byproducts.
8.1.3 Decontamination and waste disposal method for
parts contaminated by an equipment owner specific
process other than the baseline process.
8.1.4 The minimal information of necessary personal
protective equipment (PPE) based on the equipment
usage history.
NOTE 4: PPE and necessary training are to be specified by
the employer of those personnel to be protected.
8.1.5 The details of the decontamination procedure
and any remaining chemicals and their locations after
the equipment owner has completed initial
decontamination of the equipment.
9 Selection of the Disposal Party
9.1 The disposal party must comply with
regional/national codes and regulations related to the
receipt, transfer and disposal of equipment.
NOTE 5: A specially controlled industrial waste disposal
license as well as a specially controlled waste collection and
transfer license may be typically required by the relevant
country’s government.
9.2 The incident and compliance record of the waste
disposal party should be considered at the time when a
selection of the disposal party is made.
SEMI S16-0600 © SEMI 2000 4
10 Equipment Disposal Proc edure
10.1 The possibility of refurbishing the entire piece of
equipment should be considered before disassembly
and disposal is selected.
10.1.1 When refurbishing of the entire equipment is
chosen, only the disposal parts which are not able to be
refurbished at the time should be decontaminated or
considered for disposal. This results in a significant
reduction in waste.
10.2 Equipment Decontamination and Packaging for
Transfer Equipment being transferred should
comply with SEMI S12 and all applicable hazardous
materials shipping regulations. If the equipment has to
be transported prior to decontamination, it should be
ensured, that no contaminants may be released (e.g., by
appropriate packaging).
10.3 Disassembly and Decontamination The
equipment owner or disposal party should follow all
local regulations regarding disassembly and disposal.
10.3.1 If there is an equipment owner specific process,
the specifics of that process and its hazards should be
provided to the disposal party by the equipment owner.
10.4 Material Separation Only materials that
cannot be refurbished, recycled or reused should be
categorized for other disposal methods (e.g.,
incineration and landfill) under this disposal assessment
procedure.
10.4.1 First decontaminate any contaminated material
which is capable of further decontamination.
10.4.2 Discard any materials incapable of
decontamination by appropriate contaminated waste
disposal categories or process (e.g., incineration,
hazardous landfill, etc.).
10.4.3 Further separate materials into reusable
components (e.g., pumps, motors, electronics, etc.).
10.4.3.1 This includes any components with a
potential for refurbishing.
10.4.4 Separate recyclable materials by categories
(e.g., metals, class of plastics, etc.).
10.4.5 Separate into reclamation categories (e.g.,
mercury recovery from lamps, lead recovery from
batteries, etc.).
10.5 The equipment owner should confirm that the
disposal party follows the procedures required by this
document through checking manifest and/or
implementing practical inspection periodically as well
as applicable regional codes and regulations.
10.6 Ionizing radiation sources, if present, should be
disposed of in accordance with each applicable country,
state and local regulations. All applicable licensing and
reporting requirements should be met.
11 Documentation and Reco rds
11.1 Documentation should be prepared and main-
tained by the equipment owner according to applicable
codes and regulations for the region or locality where
disposal occurs.
11.2 Documentation showing final disposition of each
class of material should be returned to the equipment
owner by the disposal party.
NOTICE: SEMI makes no warranties or representa-
tions as to the suitability of the guidelines set forth
herein for any particular application. The determination
of the suitability of the guideline is solely the
responsibility of the user. Users are cautioned to refer to
manufacturer’s instructions, product labels, product
data sheets, and other relevant literature respecting any
materials or equipment mentioned herein. These
guidelines are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this guideline may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this guideline, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this guideline. Users of this guideline
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI S17-0701 © SEMI 20011
SEMI S17-0701
SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV)
SYSTEMS
This safety guideline was technically approved by the Global Environmental Health and Safety Committee
and is the direct responsibility of the Japanese Environmental Health and Safety Committee. Current edition
approved by the Japanese Regional Standards Committee on February 1, 2001. Initially available at
www.semi.org April 2001; to be published July 2001.
NOTICE: Paragraphs entitled “NOTE:” are not an
official part of this document and are not intended to
modify or supersede the official guideline.
1 Purpose
1.1 These guidelines are intended as a set of
environmental, safety, and health considerations for
unmanned transport vehicle (UTV) systems. UTV
systems are used to automate the movement of material
within semiconductor factories. Unmanned transport
vehicle systems include both floor-traveling vehicle
systems and space-traveling vehicle systems.
2 Scope
2.1 This guideline applies to UTV systems used in
semiconductor manufacturing.
2.2 This guideline addresses both floor-traveling and
space-traveling UTV systems. Floor-traveling vehicle
systems include automatic guided vehicle (AGV)
systems and rail guided vehicle (RGV) systems. Space-
traveling vehicle systems include interbay overhead
transport vehicle systems and intrabay overhead hoist
transport vehicle (OHT) systems.
2.3 Evaluations for conformance to this document
should include all equipment that is provided by the
UTV system supplier including separate items such as
rails, control panels, power panels, and any other type
of equipment necessary for operation of the unmanned
transport vehicles.
2.4 This safety guideline does not purport to address
all of the safety issues associated with its use. It is the
responsibility of the users of this guideline to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
2.5 This document contains the following sections:
• Purpose
• Scope
• Limitations
• Referenced Standards
• Terminology
• Equipment Evaluation
• Clearances and Interfaces
• Emergency Shutdown
• Manual Operation
• Vehicle Travel
• Material Protection
• Load/Unload Operation
• Hazard Indicators
• Hazardous Materials
• Related Documents
3 Limitations
3.1 This safety guideline may have only limited
application to vehicles without on-board power (direct
or induced) such as primary-grounded linear–motor-
driven overhead transport vehicle systems used for
interbay transport. Determinations of applicability
should be made by section when evaluating such
systems.
3.2 This safety guideline does not address rail-guided
or robotic mechanisms included as part of
semiconductor processing equipment. This type of
equipment should be evaluated as part of the processing
equipment per SEMI S2.
3.3 Person Guided Vehicles (PGVs) are not unmanned
vehicles, therefore PGVs are not addressed by this
standard.
3.4 This document does not supersede international,
national or local codes, regulations and laws, which
may impose separate requirements for assessing the
safety of installations.
NOTE 1: Users should provide information to UTV suppliers
about regulations for the location of use.