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SEMI T13-1104 © SEMI 2004 36 Update History Consum er Producer ( Fab, Eqp. ) Check History Back Tra ck Notify Tra ce Consum er Producer ( Fab, Eqp. ) A lert Figure R4-1 Use Case Diagram for Devic e Tracking NOTICE: SEMI …

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SEMI T13-1104 © SEMI 2004 35
RELATED INFORMATION 4
USE CASE OF DEVICE TRACKING
NOTICE: This related information is not an official part of SEMI T13 and was derived from the Japanese
Traceability Committee. This related information was approved for publication by full letter ballot on April 30,
2004.
R4-1 Use Case Diagram
R4-1.1 Use Case diagram is one of well-known means for understanding and analysis of problem domain to start
with. It is often used before modeling a system or bringing a good solution.
R4-1.2 Use Case diagram consists of Actors and Use Cases. A use case defines something expected to a system
related to an actor or between actors. All use cases build up whole system.
R4-2 Use Case Diagram of Device Tracking
R4-2.1 The following diagram shows use case for Device Tracking.
R4-2.2 Trace — Consumer asks listing all or a part of stages of Production History and Information for tracking.
Examples may be picking up five latest history items or histories for changing substrates. Product Information may
include original production country, test house identification, assembly subcontractor and so on.
R4-2.3 Back Track — Consumer traces Production History from the latest one and checks also Problem Histories of
the state. If no specific essential problems is not found on the stage, information for previous stage is provided
interactively. If something is unclear, further information or data is requested to Producer.
R4-2.4 Update History — Producer append / updates Production History describing what has done on the product
including changing location or substrate. Information attached to the history may be dependent to the stage,
equipment and/or product. Producer may also append / update Problem History describing briefly what the problem
was and how it was fixed.
R4-2.5 Check History — Consumer asks detail history of a stage. System replies all or expected categories of
Production History and Information. Because sometimes Consumer's curiosity may beyond what system knows, the
system may ask further information to responsible producer in such case.
R4-2.6 Notify — Consumer notifies phenomena on a product to system when some problem happens on the
product. The system looks for resemble phenomena registered on the system. If it identified, the system let the
consumer know all information about the phenomena and update registry. Otherwise the system registers the
phenomena and asks all producers or most possible ones to fix it. When a responsible producer responds about the
problem, the system update registry and let the consumer know.
R4-2.7 Alert — Producer issues potential problems for a product. This information is registered on system and
distributed to all possible consumers. This capability can be used even if the product is still in process on some
stage.
SEMI T13-1104 © SEMI 2004 36
Update
History
Consumer
Producer
(
Fab, Eqp.
)
Check
History
Back
Track
Notify
Trace
Consumer
Producer
(
Fab, Eqp.
)
A
lert
Figure R4-1
Use Case Diagram for Device Tracking
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
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Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
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consent of SEMI.
SEMI T13.1-1104 © SEMI 2004 1
SEMI T13.1-1104
SPECIFICATION FOR SECS PROTOCOL FOR DEVICE TRACKING
This specification was technically approved by the Global Traceability Committee and is the direct
responsibility of the Japanese Traceability Committee. Current edition approved by the Japanese Regional
Standards Committee on July 23, 2004. Initially available at www.semi.org September 2004; to be published
November 2004.
1 Purpose
1.1 The purpose of this document is to map services and data in SEMI T13 into SECS protocol.
2 Scope
2.1 This document is applied to SECS implementation of semiconductor device traceability with some
interoperability with semiconductor Manufacturing Execution System (MES).
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)
SEMI E39 — Object Service Standard: Concepts, Behavior and Services
SEMI G84 — Specification for Strip Map Protocol
SEMI T12 — Specification for Tracing Jigs and Implements
SEMI T13 — Specification for Device Tracking: Concepts, Behavior and Services
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Requirements
4.1 Service Mapping — This specification maps service instructions defined in SEMI T13 into SECS
stream/functions as follows. Supporting Class names specified in the following table are used as OBJSPEC or a part
of OBJSPEC to request services.
Table 1 Service Message Instruction Mapping
Service Message Name Supporting Class Stream, Function SECS-II Message Name
acquireDTD DieTraceMachine S14, F19/F20 Generic Service Request/Response
admit DieTraceManager S14, F19/F20 Generic Service Request/Response
catchDTD DieTracer S14, F19/F20 Generic Service Request/Response
collectDTD DieTracer S14, F19/F20 Generic Service Request/Response
devolve DieTraceManager S14, F19/F20 Generic Service Request/Response
enroll DieTracer S14, F19/F20 Generic Service Request/Response
flush DieTraceMachine S14, F19/F20 Generic Service Request/Response
logException DieTraceManager S14, F19/F20 Generic Service Request/Response
planDTD DieTracer S14, F19/F20 Generic Service Request/Response
registerTracer DieTraceMachine S14, F19/F20 Generic Service Request/Response
resign DieTraceManager S14, F19/F20 Generic Service Request/Response
setAlert DieTraceClient S14, F19/F20 Generic Service Request/Response
setForward DieTracer S14, F19/F20 Generic Service Request/Response
setPlanningItems DieTraceMachine S14, F19/F20 Generic Service Request/Response