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SEMI E123-0703 © SEMI 2003 7 # Current State Trigger Ne w State Actions Comments 27 ABORTING Unsafe conditions have been resolved where possible. ABORTED The handler is waiting for alarm and ABORT conditions to be cleare…

SEMI E123-0703 © SEMI 2003 6

# Current State Trigger New State Actions Comments

10 CONTACTOR

OPEN

The handler has received a

MAKE-CONTACT

command or continuation

of RECONTACT and

handler has completed

contacting of the unit(s).

AWAITING

COMMAND

The actuator(s) is extended to the

alignment process site(s).

UnitsReady event is sent to Host

with loaded status of each site.

None

11 LOADING The handler completes

unload of last unit and

there are no more unit(s)

available for loading.

READY The handler completes sorting the

last unit(s). LastUnitCompleted

collection event reported to Host.

None

12 PROCESS The handler has received a

STOP command.

STOPPING The handler completes the current

unit in the WORKING state and

unloads it.

The handler begins its

cleanup procedure.

13 STOPPING The handler cleanup is

complete, and the handler

is free of alarms.

IDLE None None

14 PROCESS An alarm occurs. ALARM

PAUSED

PROCESS activity is suspended,

and the handler is waiting for all

alarms to be cleared.

ALARM PAUSED is a

PAUSE sub-state.

15 PROCESS The handler has received a

PAUSE command.

PAUSING The PROCESS state shall be

suspended at the completion of

the current unit. Any necessary

actions to put the handler in a safe

state are performed.

PAUSING is a PAUSE

sub-state.

16 PAUSING The handler has

completed Processing the

Current unit in the

WORKING state and

achieved a safe condition.

PAUSED The handler is waiting for a

command (RESUME, STOP, or

ABORT).

None

17 PROCESS

PAUSE

The handler has received a

RESUME command.

STATE based on

conditional table.

Return to previous state or state

per process resume conditions.

None

18 PAUSED A RESUME command

was received.

CHECKING Validation of the Process

Program Parameters.

None

19 CHECKING Error was detected in new

parameter setting being

validated in the

CHECKING state.

PAUSED None None

20 CHECKING Parameter checking

completes successfully.

STATE based on

conditional table.

Return to previous state or state

per process resume conditions.

None

21 PROCESS

PAUSE

An alarm is set by the

handler.

ALARM

PAUSED

The handler waits for all alarms

to be cleared or for a STOP or

ABORT command.

None

22 ALARM

PAUSED

All alarms are cleared. PAUSED The handler is waiting for a

command (RESUME, STOP, or

ABORT).

None

23 PAUSE The handler has received a

STOP command.

STOPPING The handler proceeds with

cleanup.

Data is preserved and is

valid.

24 STOPPING The handler has received

an ABORT command.

ABORTING Any unsafe condition is resolved,

if possible.

Data may be invalid or

unavailable.

25 PAUSE The handler has received

an ABORT command.

ABORTING Any unsafe condition is resolved,

if possible.

Data may be invalid or

unavailable.

26 PROCESS The handler has received

an ABORT command

from operator, host, or

self-generated.

ABORTING The handler is put in a “safe”

state.

Unit or lot data may be

invalid or not available.

SEMI E123-0703 © SEMI 2003 7

# Current State Trigger New State Actions Comments

27 ABORTING Unsafe conditions have

been resolved where

possible.

ABORTED The handler is waiting for alarm

and ABORT conditions to be

cleared.

The only state change

allowed is to IDLE.

28 ABORTED An operator has verified

that all alarms and abort

conditions have been

cleared.

IDLE None None

29 IDLE An alarm is set. IDLE with

ALARMS

The handler waits for all alarms

to be cleared.

None

30 IDLE with

ALARMS

All alarms have been

cleared.

IDLE None The IDLE state is free of

alarms.

6.6 Process Model Conditions Table

Table 2 Process Resume Conditions

Condition Next State

Checking determines that process program conditions were

changed.

SETTING UP

Previous State PRELOADING. PRELOADING

Previous State LOADING. LOADING

Previous State AWAITING COMMAND. AWAITING COMMAND

Previous State CONTACTOR OPEN. CONTACTOR OPEN

Previous State READY. READY

Previous State was SETTING UP. SETTING UP

7 Collection Event List

7.1 Requirements

7.1.1 ALL SEMI E30-required Events are required by the HSEM. Since a Processing State Model is required by the

HSEM, all state transitions are required Events.

7.1.2 This section of the HSEM lists only those collection events that are not associated with a change of state or

those requiring specific data variables or Reports defined in the HSEM.

7.2 Collection Event Tables — The first table contains required events and associated reports. The second table

contains required events and associated data variables.

Table 3 Processing State Transitions Requiring Report Levels

Transition From State To State Required variables or Report

SETUP COMPLETE (3) SETTING UP READY Setup Report

Table 4 Other Required Collection Events

Collection Event Name Description Typical Variable Data Reference / Comments

CarrierEmpty Last item from carrier was removed. MediaID Configuration specific event

(CSE). EXECUTING event.

CarrierFull Output carrier capacity is full. MediaID CSE. Valid in

EXECUTING event.

ReaderFailed Any type of failure related to reading

of units.

ReaderType, ReaderErrorType CSE. PROCESSING event

UnitCntInterval UnitCountInterval, Clock EXECUTING event.

Collection Event Name Description Typical Variable Data Reference / Comments

MediaCntInterval MediaCountInterval EXECUTING event.

SkipCntInterval SkipCountInterval CSE. EXECUTING event.

MediaChange MediaID, MediaType EXECUTING event.

SortComplete Sorting of unit(s) from last BIN-

UNITS command to sort categories has

completed.

CategoryCount EXECUTING event.

InputsEmpty No materials available on direct

inputs. There may still be unit(s) in

process buffers or under processing.

UnitCount, CategoryCount EXECUTING event.

LastUnitCompleted Handler completed unloading last unit,

i.e. no materials available in all inputs

or buffers.

UnitCount, CategoryCount EXECUTING event.

UnitsReady At load complete, this event notifies

Host that unit(s) is ready to be

processed and indicates loaded status

of process site(s).

See Units Ready Report EXECUTING event.

PreloadComplete Handler completes preloading of units

to its process buffers, e.g. unit(s) is

ready to be transferred to process

site(s) from buffers.

BufferID, BufferType CSE. PROCESSING event.

BufferEmpty One of process buffer emptied. ID of

buffer identifies which buffer.

BufferID, BufferType CSE. EXECUTING event.

8 Variable Items

8.1 The purpose of this section is to define the list of

variable items required by the HSEM. Values of these

variables are available to the host through collection

event reports and host status queries.

8.2 Requirements

8.2.1 All generic variable items defined in SEMI E30

are required by all HSEM equipment.

8.2.2 Variable items required by HSEM are

categorized as follows:

• Common Variables (CVs) — Variables common to

all handlers.

• Configuration-Specific Variables (CSVs) —

Variables associated with a specific configuration

of the above equipment class.

8.3 Data Types

8.3.1 Equipment constants have various uses in HSEM,

including the following:

• Equipment offsets that match the performance of

several pieces of equipment that would otherwise

perform differently due to inherent manufacturing

differences. Examples are home values and motion

axis scaling factors.

• Setting the configuration of the equipment to allow

for different material specifications, equipment

options, material flows, frequency of automatic

functions, etc. Examples are media and yield

check frequency.

• Managing optional machine features. Examples

are constants that indicate whether optional

features, such as automated media stackers, are

present and control the configuration and function

of these optional subsystems when they are

present.

8.3.2 Status Variables are valid at all times. A status

variable may not be changed by the host but may be

changed by the equipment or operator. The value of

status variables may be queried by the host at anytime.

8.3.3 Variables that are valid upon the occurrence of

specific collection event can be queried by the host. An

attempt to read a data variable at the wrong time shall

not generate an error, but the data reported may not

have relevant meaning.

8.3.4 Data Item Requirements for Multi-Head, Multi-

Site Equipment — The identification for multi-head and

multi-site data (data variable, status variables, events,

etc.) is addressed in this specification through the use of

status variables with list structures. In the table below,

the subheading “Process-Site Group” contains variables

that must be available for all process-sites on the

handler equipment. When multiple process-sites exist,

either a list structure or table structure may be used to

show multiple occurrences of a specific variable.