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SEMI F100-0705 © SEMI 2005 2 5 Test Setup 5.1 Standard Orifice 5.1.1 Orifice Diameter (A) On the basis of 50% of the inner diamet er of PFA tube connection. See Fi gure 1.   2.0[mm] ori f ice (  6- 4[mm] tube)   4.0…

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SEMI F100-0705 © SEMI 2005 1
SEMI F100-0705
COMPLIANCE TEST METHOD FOR MINIMUM FLOW COEFFICIENT OF
DIAPHRAGM VALVE FOR METRIC PFA TUBE
This test method was technically approved by the Global Liquid Chemicals Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on March 11, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005.
1 Purpose
1.1 This compliance test method presents that the verification of the compatibility of each diaphragm valves for
Metric PFA tube simply.
1.2 This document specifies the relative orifice that gives the minimum flow coefficient for diaphragm valve for
Metric PFA tube.
1.3 This compliance test method describes how to verify the flow coefficient of the diaphragm valve by comparing
with the relative orifice.
2 Scope
2.1 This Specification addresses a capacity of diaphragm valves used with metric PFA tubes.
2.2 These diaphragm valves are used in chemical distribution systems for semiconductor and flat panel display
manufacturing.
2.3 The valves are made from materials such as PTFE or PFA, which have high corrosion resistance and low
contamination contribution to the fluid.
2.4 The valves withstand up to 0.2 megapascals (MPa) [29 pounds per square inch (psi)] backpressure.
2.5 Fully open to fully shut switch over is the objective of the shut-off valve.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Terminology
3.1 Abbreviations and Acronyms
3.1.1 PFA — Perfluroalkoxy
3.1.2 PTFE — Polytetrafluoroethylene
3.1.3 P1 — Gauge pressure at upstream pressure tap, kPa
3.1.4 Q — Volumetric flow rate
3.2 Definitions
3.2.1 back pressure — a maximum allowable pressure applied to outlet of a diaphragm valve.
3.2.2 liquid chemicals — acid, alkali, organic solvent, and pure water used for wet stations; resists and developers
used for track system; and other chemicals used for process or maintenance (such as slurry of CMP) of equipment or
facilities.
4 Test Fluids
4.1 Incompressible (Liquid) Fluid — Water is standard liquid test fluid.
SEMI F100-0705 © SEMI 2005 2
5 Test Setup
5.1 Standard Orifice
5.1.1 Orifice Diameter (A)
On the basis of 50% of the inner diameter of PFA tube connection. See Figure 1.
2.0[mm] orifice (6-4[mm] tube)
4.0[mm] orifice (10-8[mm] tube)
5.0[mm] orifice (12-10[mm] tube)
8.0[mm] orifice (19-16[mm] tube)
11.0[mm] orifice (25-22[mm] tube)
M e tric PFA TubeB
C
D
E
S ta n d a rd O rifice
Diaphragm V alve
A
FF
Figure 1
Inside View of
Standard Orifice
5.1.2 Orifice Diameter Tolerance
Tolerance: +0.2, 0 [mm]
5.1.3 Orifice Length (B) should be less than inner tube diameter, i.e., B A.
5.1.4 Dimensions (D) should be determined in accordance with the test valve port connection, i.e., D E.
5.1.5 Dimension (F) should be equal to or less than a 90 degree angle.
5.2 Test Circuit
Va l v e
flow meter
pressure sensor
Standard Orifice
flow meter
pressure sensor
Figure 2
Test Circuit
SEMI F100-0705 © SEMI 2005 3
5.2.1 The valve and orifice tests must be applied with identical pressure sensors/flow meters.
5.2.2 Reproducibility and repeatability of measuring devices must rate 2 % or less of R.S.
5.2.3 Both the test valve and test orifice must have identical port connections.
5.3 Test Method/Procedure
5.3.1 In accordance to the test circuit of ¶5.2, flow rate is compared under the same pressure condition. Volume and
weight of accumulative flow can be compared without the use of a flow meter.
5.3.2 P1 is set 50kPa or more.
5.4 Qualification of Standard
5.4.1 The standard of diaphragm valves used with metric PFA tubes is determined by the flow rate Q1 of the tested
valve being greater than the flow rate Q2 of the standard orifice tested of ¶5.1. ( Q1 > Q2 / Q1 < Q2).
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
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respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.