semi合集-English.pdf - 第1308页

SEMI E5-1104 © SEMI 1982, 2004 250 Stream,Function Name (Mnemonic) Direction S18,F16 Read 2D Code Condition Data (R2DCCD) S,H<-E Description This message is used to return request ed information on 2D Code Condition f…

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SEMI E5-1104 © SEMI 1982, 2004 249
Stream,Function Name (Mnemonic) Direction
S18,F13 Subsystem Command Request (SCR) S,H->E,reply
Description
This message is used to request the subsystem indicated in TARGETID to perform a specific action.
Structure
L,3
1. <TARGETID>
2. <SSCMD>
3. L,n
1. <CPVAL
1
>
.
.
n. <CPVAL
n
>
Exception
If n = 0, no parameters are provided.
Stream,Function Name (Mnemonic) Direction
S18,F14 Subsystem Command Acknowledge (SCA) S,H<-E
Description
This message reports the results from the subsystem specified in TARGETID for the requested action.
Structure
L,3
1. <TARGETID>
2. <SSACK>
3. <STATUSLIST>
Exception
s = 0 if and only if TARGETID is unknown.
Stream,Function Name (Mnemonic) Direction
S18,F15 Read 2D Code Condition Request (R2DCCR) S,H->E,reply
Description
The host requests the subsystem indicated in TARGETID to read information on 2D Code Condition.
Structure
<TARGETID>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 250
Stream,Function Name (Mnemonic) Direction
S18,F16 Read 2D Code Condition Data (R2DCCD) S,H<-E
Description
This message is used to return requested information on 2D Code Condition from the subsystem indicated in TARGETID or to
acknowledge the results of the request.
Structure
L,5
1. <TARGETID>
2. <SSACK>
3. <MID>
4. <STATUSLIST>
5. <CONDITIONLIST>
Exception
If <SSACK> is failure, the length of the <CONDITIONLIST> must be zero.
11 Message Documentation
11.1 Intent — Equipment makers using SECS-II
messages must communicate the equipment-specific
details of each message to the host designer in order for
the host to properly adapt to the equipment. The details
are communicated in a document which will follow a
standard form in order to convey most clearly the
information required. The following form is presented
here to act as a guide for organizing the equipment-
specific details.
11.2 Standard Form SECS-II Document — The
standard form will contain three clearly labeled parts as
follows.
Part I — General Information
Part II — Message Summary
Part III — Message Detail
11.2.1 Part I will contain general information on the
following:
Manufacturer and product number
General description of equipment function
Intended function of interface
Software revision code
Changes from previous versions
11.2.2 Part II will contain two lists of all messages
understood and all messages sent by the equipment in
terms of their stream and function codes. The first list
will have pairs of columns: the first for the message
received and understood and the second for the message
sent in response. The second list will also have two
columns: the first for the message sent and the second
for the response understood. The message will be
identified using the format “SxxFyy,” where xx is the
stream number and yy is the function number. Each
transaction will be on a separate line. A “-” will
indicate that one of a pair is not included. All messages
not listed on the received side are implied to cause an
error message to the host. All messages not listed on
the sent side are assumed never to be sent from the
equipment. Since some messages can be sent in two
directions, the same message pair may appear in each
list with the sent and received orders interchanged. A
transaction listed in the standard as being allowed in
two directions does not have to be implemented in both
directions. This list will indicate which directions are
implemented.
11.2.3 Part III will contain the details for every
message listed in Part II. Messages that appear on both
the sent and received sides must be detailed separately.
The details shall include the following information on
the data in each message:
1. For each fixed item, all the values or strings either
understood or possible to send are listed along with
their meaning to the equipment.
2. For each variable item, the restriction on or
possible range of value or length of string.
3. Any other special interpretation of the message.
11.2.4 Each message so detailed must be clearly
labeled with its stream and function code.
12 Units of Measure
12.1 Intent — Certain SECS-II transactions require
specification of units of measure for data items passed
between equipment and host. The concept of units of
measure has been included as part of the SECS-II stan-
dard to enhance the ability of the host system to prompt
its human operators for proper information when gener-
ating process programs, and also to facilitate automated
SEMI E5-1104 © SEMI 1982, 2004 251
handling of process programs by host systems and auto-
mated handling of data reported to a host by equipment.
12.2 Units Symbols — Under SECS-II, a units symbol
is a text string of unspecified length which specifies the
physical significance of a numeric value. Units of
measure symbols under SECS-II may be either a SECS-
II recognized unit identifier, a SECS-II unit identifier
with prefix and/or suffix symbols, or an arithmetic
expression of SECS-II identifiers.
12.2.1 A SECS-II units identifier is a text string which
may be the full name, an abbreviation of the full name,
or a special character which is unique for a specific unit
of weight or measure. Identifier strings may consist of
upper or lower case alphabetic characters and numerals
or special characters of the ASCII character set. The
first character of an identifier may not be a numeral.
The case of alphabetic characters is significant (e.g., G
and g, the units symbols for Gauss and gram,
respectively).
12.2.2 A unit identifier may be nationally or inter-
nationally recognized, may be unique to the
semiconductor industry, or, due to the special
requirements of SECS-II, may be unique to this stan-
dard. Section 12.4 lists all units identifiers recognized
by SECS-II. For each identifier defined in Section
12.4, six pieces of information are provided. They are:
1. Unit — Full name of the unit of measure in
question.
2. Unit Identifier — SECS-II-recognized identifier for
the unit.
3. Prefix Allowed — Specifies whether or not the unit
identifier may be combined with a prefix symbol to
generate a unit identifier which is a decimal
multiple or submultiple of the base unit. Metric (or
SI) units are usually capable of accepting a prefix
symbol while English units may not.
4. Suffix Allowed — Specifies whether or not the
unit identifier may be concatenated with a numeric
suffix which provides additional information to the
meaning of the associated unit symbol. The
numeric suffix is composed of the ASCII digits 0
through 9 and represents a decimal value. This
meaning of the numeric value is symbol-dependent
and must be specified in the description section of
the unit symbol’s definition.
5. Equivalence — In those cases where a unit can be
expressed as an arithmetic expression (of simpler
units), this column will contain the expression of
simpler units. For those units which are non-
standard to either of the standard systems of units
of measure (English or SI), this column will
contain an expression which relates the non-
standard unit to the equivalent unit of the standard
units system. In either case, the expression
provided in this column may be substituted for the
corresponding SECS-II units identifier whenever
required.
6. Description — Additional information as may be
required to uniquely define the unit of measure in
question.
12.2.3 Any SECS-II identifier which Section 12.4
indicates as being capable of taking on a prefix symbol
may be appended to one of the prefix symbols shown in
Table 23, forming a new unit which is a decimal
multiple or submultiple of the base unit. A prefix
symbol may not be used alone. It must appear
concatenated to one of the identifiers in Section 12.4.
Finally, only one prefix symbol may appear before any
identifier. A units symbol such as “mus”
(micromillisecond) is not allowed. The proper symbol
is “ns” (nanosecond).