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SEMI P10-0705 © SEMI 1990, 2005 32 <xs:sequence minOccurs="0" maxOccurs="unbounded"> <xs:element name="DataFracture" type="DataFractureType"/> </xs:sequence> <…

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SEMI P10-0705 © SEMI 1990, 2005 31
<xs:sequence minOccurs="0">
<xs:element name="DataManipulation"
type="DataManipulationType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataFunction"
type="DataFunctionType"/>
</xs:sequence>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartPatternData"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndPatternData"/>
</xs:complexType>
<xs:complexType name="DataManipulationType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Boolean" type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="PatternGenerationArea"
type="WindowType"/>
</xs:sequence>
<xs:element name="DataFileParameters"
type="DataFileParametersType"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="DataFileParameters"
type="DataFileParametersType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="DataFracture"
type="DataFractureType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartDataManipulation"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndDataManipulation"/>
</xs:complexType>
<xs:complexType name="DataFileParametersType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PatternFormat" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataTopCell" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataLayerId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataPatternWindow"
type="WindowType"/>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 32
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="DataFracture"
type="DataFractureType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartDataFileParameters"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndDataFileParameters"/>
</xs:complexType>
<xs:complexType name="DataFunctionType">
<xs:sequence>
<xs:element name="DataFunctionPurpose" type="xs:string"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="SoftwareName" type="xs:string"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="SoftwareRevision"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="RunsetName"
type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="RunsetRevision"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataLocation"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="ParameterFileName"
type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element
name="ParameterFileRevision" type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="InputFileName"
type="xs:string"/>
<xs:element name="InputFileFormat"
type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="TopCell"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataLocation"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
SEMI P10-0705 © SEMI 1990, 2005 33
<xs:element name="ResultFileName"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="SummaryFileName"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="LogFileName"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartDataFunction"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndDataFunction"/>
</xs:complexType>
<xs:complexType name="DataFractureType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Sizing" type="xs:double"/>
<xs:sequence minOccurs="0">
<xs:element name="SizingRule"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SizingBorderRule"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FracturingScale" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataScaleFactor" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PatternAddressSize"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DarkInternalWindow"
type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ClearInternalWindow"
type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ExternalWindow" type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0">