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SEMI E85-0705 © SEMI 1999, 2005 8 Active Transport Delivers a Carrier to an Internal Stocker Position Stocke r Ove rhead Transp ort V ehicle HDP Side Vie w Option B Top Vie w NOTE 1: Stocker uses primar y set of k inemat…

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SEMI E85-0705 © SEMI 1999, 2005 7
Active Transport Delivers a Carrier to an Internal Stocker Position
Option A
A
ctive
Vehicle
Top View
NOTE 1: Top view of center exclusion
volume. In Option A the Stocker uses the
primary set of kinematic pins.
D
D
1
S
A
1
A
1
Defines front view of
exclusion volume
defined in Section 7.6
(refer to Figure 7).
A
2
H
2
Front View
Stocker
Vehicle
H
2
HDP
C
3
Side View
NOTE 2: Transport
vehicle uses secondary
set of kinematic pins.
Internal boundary
of stocker
Option A H2 (min) A1 (min) A2 (range) C3 (min) D (max) D1 (max) S (min)

deg)
FOUP 130 375 213 +2/-0 150 240 150 450 0
Open Cassette 140 375 213 +2/-0 100 270 150 450 2
Figure 1
AMHS Interbay Load Port Option A
SEMI E85-0705 © SEMI 1999, 2005 8
Active Transport Delivers a Carrier to an Internal Stocker Position
Stocke
r
Overhead
Transport
V
ehicle
HDP
Side View
Option B
Top View
NOTE 1:
Stocker uses
primary set of kinematic
pins.
Front View
H0
HDP
H1
C1
C2
D
D0
W1
W2
HDP
H
D1
Option B
H
#1
H0
(min)
H1
(max)
C1
(min)
C2
(min)
D0
(min)
D
(range)
D1
(range)
W1
(max)
W2
(min)
FOUP TBD 40 25 75 30 110 250 +0/-10 200 +10/-4 130 205
Open Cassette TBD 50 25 75 30 110 250 +0/-10 200 +10/-4 130 205
#1
User to specify actual dimension (see ¶ 6.2).
Figure 2
AMHS Interbay Load Port Option B
SEMI E85-0705 © SEMI 1999, 2005 9
Active Transport Delivers a Carrier to an Internal Stocker Position
Option C
(Drive Through)
T
3
Front View
A
2
Top View
NOTE 1: Carrier rests on the primary set of
kinematic pins while on the transport.
NOTE 2: Transport must maintain
same exclusion zones as
depicted in Figure 1.
C
5
Stocker
Vehicle
H
2
HDP
T
3
Side View (Over the Rail)
C
5
Stocker
Vehicle
H
2
HDP
Side View (Suspended Type)
NOTE 3: Transport vehicle uses
primary set of kinematic pins.
C
5
H
4
D
10
NOTE 4: Transport vehicle uses
primary set of kinematic pins.
Option C
(Drive
Through)
H2 (min)
H4
(min)
A1
(min)
A2
(range)
A3
(min)
C5
(range)
D10 (max)
#1
D6 (min) T3 (min)
#1

(deg)
FOUP 100 170 N/A 213 +2/-0 225 250 ±
50
150 or 230 112 800 or
1150
0
Open
Cassette
110
#1
170 N/A 213 +2/-0 225 250 ±
50
150 or 230 112 800 or
1150
2
#1
User to specify which dimension (see ¶6.3.1).
Figure 3
AMHS Interbay Load Port Option C (Drive Through)