semi合集-English.pdf - 第3317页

SEMI E130-1104 © SEMI 2003, 2004 31 R1-1.1.2.3 Process Material Host Prober MOVE-ABS() PS: AWAITING COMM AND to MOVING XYZ() Move Chuck to Designated Co ordinates() PS: MOVING XYZ to AWAITING COMMAND() The Host issues Mo…

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SEMI E130-1104 © SEMI 2003, 2004 30
R1-1.1.2.2 Job Start — At this point, the Process Job is in the PROCESSING state and the prober is waiting for the
host to begin processing the material identified in the PRMtlNameList.
Host Prober
Load Substrate()
Move substrate to Pre-align()
Load substrate on Chuck()
Move next substrate to Pre-align()
Align and Profile
PS: HANDLING MATERIAL to AWAITING COMMAND
PS: AWAITING LOAD to HANDLING MATERIAL
CA: NOT ACCESSED to IN ACCESS()
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ01.01
SubstPJ01.02
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-3
Normal Run - Job Start Scenario
SEMI E130-1104 © SEMI 2003, 2004 31
R1-1.1.2.3 Process Material
Host Prober
MOVE-ABS()
PS: AWAITING COMMAND to MOVING XYZ()
Move Chuck to Designated Coordinates()
PS: MOVING XYZ to AWAITING COMMAND()
The Host issues Move XYZ command
as required to achieve full step coverage
on the substrate. Host determines which
sites will be processed
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-4
Normal Run - Material Processing Scenario
R1-1.1.2.4 Load 2
nd
Substrate
Host Prober
Load Substrate()
Unload substrate from chuck
Load substrate on Chuck
Move next substrate to Pre-align
Align and Profile()
PS: AWAITING COMMAND to HANDLING MATERIAL()
PS: HANDLING MATERIAL to AWAITING COMMAND
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ01.02
SubstPJ01.03
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROCESSING
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Figure R1-5
Normal Run - Load 2
nd
Substrate Scenario
SEMI E130-1104 © SEMI 2003, 2004 32
Process Substrate SubstPJ01.02 (See Section R1-1.1.2.3 )
R1-1.1.2.5 Load 3
rd
Substrate – PJ02 Dispatched
PJ2 Recipe settings are identical to PJ1. No setup task required
Host Prober
Load Substrate()
Unload substrate from chuck
Load substrate on Chuck
Move next substrate to Pre-align
Align and Profile
PS: AWAITING COMMAND to HANDLING MATERIAL
PS: HANDLING MATERIAL to AWAITING COMMAND
PJ02: POOLED to SETTING UP()
PJ02: SETTING UP to PROCESSING()
PJ02 may transition from POOLED to
SETTING UP to PROCESSING before
the 3
rd
substrate of PJ01 alignment
completes. The order of the messages
presented in this scenario is not
significant.
Pre-Align Chuck
CarrierA
PJ02
PJ01
SubstPJ01.03
SubstPJ02.01
Figure R1-6
Normal Run - Load 3
rd
Substrate Scenario
Process Substrate SubstPJ01.03 (See Section R1-1.1.2.3 )