semi合集-English.pdf - 第832页

SEMI E112-0305 © SEMI 2001, 2005 14 Symbol Used Figure Value Spe cified Reference Measured From Feature Measured To z 295 4 108.20 mm (4.260 in.) horizontal reference p lane nominal reticle seating plane z 296 4 127.25 m…

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SEMI E112-0305 © SEMI 2001, 2005 13
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
y127 1 61.9 ± 0.5 mm
(2.437 ± 0.020 in.)
facial reference plane edge of side handling flange corner
bevel
y225 1 115.25 mm
(4.537 in.) maximum
facial reference plane side of pod
y226 7 88.5 mm (3.484 in.)
minimum
facial reference plane edge of rear retainer volume
y227 7 45 mm (1.772 in.)
maximum
facial reference plane edge of end-effector exclusion
volume
y228 7 12.6 ± 0.4 mm
(0.496 ± 0.016 in.)
facial reference plane reticle bisecting plane
y232 8 45.5 mm (1.791 in.)
maximum
facial reference plane edge of end effector exclusion
volume
y233 8 44.5 mm (1.752 in.) facial reference plane center of reticle contact surface
y234 8 77.5 mm (3.051 in.) facial reference plane center of reticle contact surface
y235 9 1 mm (0.039 in.)
maximum
center of reticle contact
surface
edge of reticle contact surface
y236 10 82.5 mm (3.248 in.)
minimum
facial reference plane end of conveyor rail surface
y238 8 78.5 mm (2.941 in.)
maximum
facial reference plane edge of end effector exclusion
volume
y239 1 10 mm (0.394 in.)
minimum
facial reference plane edge of RFID
placement zone
y240 1 58 mm (2.283 in.)
maximum
facial reference plane edge of RFID
placement zone
y242 11 80.25 ± 0.5 mm
(3.159 ± 0.020 in.)
facial reference plane center of info pads
z2 None 2 mm (0.079 in.)
maximum
horizontal reference plane surface of info pads (when down)
z26 None 9 mm (0.354 in.)
minimum
horizontal reference plane surface of info pads (when up)
z149 3, 5 5 mm (0.197 in.)
maximum
bottom surface of robotic
handling flange
top of robotic handling flange
z276 6 ± 0.15 mm
(0.006 in.)
each nominal reticle seating
plane
entire bottom surface of the reticle
z281 3 182.5 mm (7.185 in.)
maximum
horizontal reference plane top surface of dome recess
z282 3 185 mm (7.283 in.)
maximum
horizontal reference plane top surface of dome
z283 3, 5 200 ± 0.5 mm
(7.874 ± 0.020 in.)
horizontal reference plane bottom surface of robotic handling
flange
z284 3 179 ± 0.5 mm
(7.047 ± 0.020 in.)
horizontal reference plane bottom edge of side handling flange
z285 3 182.5 mm (7.185 in.)
maximum
horizontal reference plane top surface of side handling flange
z286 3 155 mm (6.102 in.)
maximum
horizontal reference plane edge of side handling exclusion
volume
z290 4 22 mm (0.866 in.)
maximum
horizontal reference plane edge of first reticle pellicle exclusion
volume
z291 4 32 mm (1.260 in.) horizontal reference plane nominal reticle seating plane
z292 4 51.05 mm (2.010 in.) horizontal reference plane nominal reticle seating plane
z293 4 70.10 mm (2.760 in.) horizontal reference plane nominal reticle seating plane
z294 4 89.15 mm (3.510 in.) horizontal reference plane nominal reticle seating plane
SEMI E112-0305 © SEMI 2001, 2005 14
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
z295 4 108.20 mm
(4.260 in.)
horizontal reference plane nominal reticle seating plane
z296 4 127.25 mm
(5.010 in.)
horizontal reference plane nominal reticle seating plane
z297 6 1.5 mm (0.059 in.)
minimum
each nominal reticle seating
plane
edge of end-effector exclusion
volume
z298 6 9.4 mm (0.370 in.)
minimum
each nominal reticle seating
plane
edge of lift clearance exclusion
volume
z299 6 8.95 mm (0.352 in.)
minimum
each nominal reticle seating
plane
edge of end-effector exclusion
volume
z300 6 8 mm (0.315 in.)
minimum
each nominal reticle seating
plane
edge of end-effector exclusion
volume
z301 4 22 mm (0.866 in.)
maximum
horizontal reference plane edge of safety rail exclusion volume
z302 4 23.5 ± 0.5 mm
(0.925 ± 0.020 in.)
horizontal reference plane edge of first reticle end-effector
exclusion volume
z308 11 25 mm (0.984 in.)
maximum
horizontal reference plane edge of RFID
placement zone
z310 3, 5 8 mm (0.315 in.)
maximum
bottom surface of robotic
handling flange
top of robotic handling flange
z311 4 12.7 mm (0.500 in.)
maximum
nominal reticle seating plane edge of lift clearance exclusion
volume
z314 n/a 133 mm (5.236 in.)
minimum
horizontal reference plane top of reticle backstops
z315 11 30 mm (1.181 in.)
maximum
horizontal reference plane top of RFID
placement zone
z316 11 10 mm (0.394 in.)
minimum
horizontal reference plane bottom of RFID
placement zone
SEMI E112-0305 © SEMI 2001, 2005 15
APPENDIX 1
APPLICATION NOTES
NOTICE: This appendix is an official part of SEMI E112 and was approved by full letter ballot procedures on
August 27, 2001, but the recommendations in this appendix are optional and are not required to conform to this
standard.
A1-1 Edge contact only with the photomask is preferred when handling, transporting or storing.
A1-2 Skewness, warp, rock, and stiffness are implicitly defined in the dimensional tolerances.
A1-3 Features on the MRSP150 which enable stacking may be required by end users. It is preferred that these
features allow stacking in only one orientation.
A1-4 Features on the MRSP150 which provide visual orientation of the MRSP150 top and MRSP150 door may be
required by end users.