semi合集-English.pdf - 第4275页

SEMI F79-0703 © SEMI 2003 12 SEMI Gas # Chemical Name Cate gory Symbol Formula Synonym 321 Trifluoromethylhypofluorite 4 CF4O CF 4 O CF3OF; Hypofluorous acid 290 Trifluoropropane 4 C3H5F3 C 3 H 5 F 3 1,1,1-Trifluoropropa…

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SEMI F79-0703 © SEMI 2003 11
SEMI Gas # Chemical Name Category Symbol Formula Synonym
160 Difluoromethane 4 CH2F2 CH
2
F
2
Methylene Fluoride
75 Ethyl Chloride 4 C2H5Cl C
2
H
5
Cl Chloroethane or Ethane, Chloro
221 Ethyl Fluoride (FREON 161) 4 C2H5F CH
3
CH
2
F
Fluoroethane, R-161, FREON-
161
222 Ethylene Dichloride 4 C2H4Cl2 ClCH
2
CH
2
Cl 1,2 Dichloroethane
223 Fluoroacetylene 4 C2HF
FC≡CH
49 Fluoroform 4 CHF3 CHF
3
Trifluoromethane,F-23, R-23
137 Halothane 4 C2HBrClF3 BrClHCCF
3
295 Heptafluoropropane 4 C3HF7 C
3
HF
7
Freon 227
272 Hexafluoro Acetylacetone 4 C5H2F6O2 C
5
H
2
F
6
O
2
297 Hexafluoro butadiene-1,3 4 C4F6 CF
2
=CF-CF=CF
2
Perfluorobutadiene-1,3;
267 Hexafluoro Propane 4 C3H2F6 CH
2
FCF
2
CF
3
1,1,1,2,2,3-Hexafluoropropane
270 Hexafluoro-2-Butyne 4 C4F6
CF
3
C≡CCF
3
Bis(trifluoromethyl)acetylene
225 Hexafluoroacetone 4 C3F6O (CF
3
)
2
CO
192 Hexafluorobenzene 4 C6F6 C
6
F
6
296 Hexafluorocyclobutene 4 C4F6 C
4
F
6
Perfluorocyclobutene
118 Hexafluoroethane 4 C2F6 F
3
CCF
3
F-116, Perfluoroethane
138 Hexafluoropropylene 4 C3F6 CF
3
CF=CF
2
Perfluoropropylene
286 Hexafluoropropylene oxide 4 C3F6O C
3
F
6
O Hexafluoroepoxypropane
323 Iodomethane 4 CH3I CH
3
I Methyl iodide; Un 2644
44 Methyl Bromide 4 CH3Br CH
3
Br Bromomethane
36 Methyl Chloride 4 CH3Cl CH
3
Cl Chloromethane
33 Methyl Fluoride 4 CH3F CH
3
F Fluoromethane
268 Methylene Bromide 4 CH2Br2 CH
2
Br
2
UN 2664; Methyl dibromide
236 Octafluorobutane 4 C4F8 C
4
F
8
129 Octafluorocyclobutane 4 C4F8 (CF
2
)
4
Perfluorocyclobutane
266 Octafluorocyclopentene 4 C5F8
CF
2
=C(CF
3
)-
CF=CF
2
155 Pentafluoroethane 4 C2HF5 CF
3
CHF
2
F-125, R-125
288 Pentafluoropropanol 4 C3H3F5O C
2
F
5
CH
2
OH Perfluorodihydropropanol
241 Perfluorobutane 4 C4F10 C
4
F
10
128 Perfluoropropane 4 C3F8 CF
2
(CF
3
)
2
168 Tetrachloroethylene 4 C2Cl4 Cl
2
C=CCl
2
Perchloroethylene
94 Tetrafluorethylene 4 C2F4 F
2
C=CF
2
156 Tetrafluoroethane 4 C2H2F4 CH
2
FCF
3
R-134A, F-134A
83 Tribromomethane 4 CHBr3 CHBr
3
112 Trichloroethane 4 C2H3Cl3 CH
3
CCl
3
TCA, Methylchloroform
91 Trichlorofluoromethane 4 CCl3F CCl
3
F F-11, R-11
126 Trichlorotrifluoroethane 4 C2Cl3F3 CF
2
ClCCl
2
F F-113, R-113
SEMI F79-0703 © SEMI 2003
12
SEMI Gas # Chemical Name Category Symbol Formula Synonym
321 Trifluoromethylhypofluorite 4 CF4O CF
4
O CF3OF; Hypofluorous acid
290 Trifluoropropane 4 C3H5F3 C
3
H
5
F
3
1,1,1-Trifluoropropane
56 Vinyl Bromide 4 C2H3Br CH
2
=CHBr
55 Vinyl Chloride 4 C2H3Cl CH
2
=CHCl Chloroethylene
51 Vinyl Fluoride 4 C2H3F H
2
C=CHF
6.5 Hydrides 5
35 Arsine 5 AsH3 AsH
3
244 Deuteriumsilane 5 SiD4 SiH
4
2
58 Diborane 5 B2H6 B
2
H
6
217 Digermane 5 Ge2H6 Ge
2
H
6
97 Disilane 5 Si2H6 Si
2
H
6
43 Germane 5 GeH4 GeH
4
24 Hydrogen Cyanide 5 HCN HCN
23 Hydrogen Selenide 5 H2Se H
2
Se
22 Hydrogen Sulfide 5 H2S H
2
S
229 Hydrogen Telluride 5 H2Te H
2
Te
185 Methylsilane 5 CH6Si CH
3
SiH
3
Monomethylsilane
142 Pentaborane 5 B5H9 B
5
H
9
239 Pentaborane(11) 5 B5H11 B
5
H
11
31 Phosphine 5 PH3 PH
3
39 Silane 5 SiH4 SiH
4
245 Stibine 5 SbH3 SbH
3
253 Tetrasilane 5 Si4H10 Si
4
H
10
328 Trisilane 5 Si3H8 Si
3
H
8
Silicopropane; Trisilicane;
H
8
Si3
6.6 Halogens, other than
Fluorine
6
21 Bromine 6 Br2 Br
2
19 Chlorine 6 Cl2 Cl
2
6.7 Halides, other than
Fluorides
7
193 Arsenic Tribromide 7 AsBr3 AsBr
3
216 Arsenic Trichloride 7 AsCl3 AsCl
3
196 Arsenic Triiodine 7 AsI3 AsI
3
79 Boron Tribromide 7 BBr3 BBr
3
70 Boron Trichloride 7 BCl3 BCl
3
201 Chlorine Dioxide 7 ClO2 ClO
2
205 Chlorosilane 7 SiH3Cl SiH
3
Cl
67 Dichlorosilane 7 SiH2Cl2 SiH
2
Cl
2
113 Germanium Tetrachloride 7 GeCl4 GeCl
4
Tetrachlorogermane
SEMI F79-0703 © SEMI 2003 13
SEMI Gas # Chemical Name Category Symbol Formula Synonym
10 Hydrogen Bromide 7 HBr HBr
11 Hydrogen Chloride 7 HCl HCl
17 Hydrogen Iodide 7 HI HI
183 Methyltrichlorosilane 7 CH3Cl3Si CH
3
SiCl
3
MTS
238 Oxygen Dichloride 7 OCl2 OCl
2
60 Phosgene 7 CCl2O CCl
2
O Carbonyl Chloride
102 Phosphorus Oxychloride 7 POCl3 POCl
3
193 Phosphorus Trichloride 7 PCL3 PCl
3
278 Silicon Tetrabromide 7 Br4Si Br
4
Si SiBr4; Tetrabromosilane
108 Silicon Tetrachloride 7 SiCl4 SiCl
4
Tetrachlorosilane
189 Sulfur Monochloride 7 S2Cl2 S
2
Cl
2
248 Tetrachlorodiborane 7 B2Cl4 B
2
Cl
4
145 Tin Tetrachloride 7 SnCl4 SnCl
4
Tetrachlorostannane
114 Titanium Tetrachloride 7 TiCl4 TiCl
4
254 Titanium Tetraiodide 7 TiI4 TiI
4
255 Tribromostibine 7 SbBr3 SbBr
3
147 Trichlorosilane 7 SiHCl3 SiHCl
3
256 Trichlorostibine 7 SbCl3 SbCl
3
6.8 Fluorine and Fluorides 8
226 Aluminum Trifluoride 8 AlF3 AlF
3
96 Arsenic Pentafluoride 8 AsF5 AsF
5
195 Arsenic Trifluoride 8 AsF3 AsF
3
48 Boron Trifluoride 8 BF3 BF
3
116 Bromine Pentafluoride 8 BrF5 BrF
5
76 Bromine Trifluoride 8 BrF3 BrF
3
202 Chlorine Pentafluoride 8 ClF5 ClF
5
77 Chlorine Trifluoride 8 ClF3 ClF
3
232 Difluoroamidogen 8 NF2 NF
2
134 Difluorosilane 8 SiH2F2 SiH
2
F
2
326 Disilane Hexafluoride 8 SiF6 SiF
6
F
6
Si
2
; Hexafluorodisilane
18 Fluorine 8 F2 F
2
327 Fluoro Silane 8 SiH3F SiH
3
F H
3
FSi
99 Germanium Tetrafluoride 8 GeF4 GeF
4
Tetrafluorogermane
12 Hydrogen Fluoride 8 HF HF
115 Iodine Pentafluoride 8 IF5 IF
5
124 Molybdenum Hexafluoride 8 MoF6 MoF
6
53 Nitrogen Trifluoride 8 NF3 NF
3
41 Oxygen Difluoride 8 OF2 OF
2