semi合集-English.pdf - 第745页
SEMI E100-1104 © SEMI 2000, 2003 8 Figure 8 Door Only Top View of 6 inch RSP Figure 9 Exterior Bottom View of 6 i nch and 230 mm RSP
SEMI E100-1104 © SEMI 2000, 2004 7
y129 75.5
Figure 6
Door Only Top View of 230 mm RSP
Figure 7
Section A-A: Internal Front View of 6 inch RSP
SEMI E100-1104 © SEMI 2000, 2003 8
Figure 8
Door Only Top View of 6 inch RSP
Figure 9
Exterior Bottom View of 6 inch and 230 mm RSP
SEMI E100-1104 © SEMI 2000, 2004 9
Table 2 External Dimensions and Common Internal Dimensions for 6 inch and 230 mm RSP
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
1 45° ± 0.5° facial reference plane sides of orientation notches
1 45° ± 0.5° facial reference plane edge of side handling flange chamfer
2 45° ± 0.5° facial reference plane sides of side handling flange
orientation notches
5 45° ± 1° bilateral and facial plane
intersection
surface of the center hole in the top
robotic handling flange
r65 n/a 1 mm (0.039 in.)
maximum
not applicable all required concave features (radius)
r66 n/a 2 mm (0.079 in.)
maximum
not applicable all required convex features (radius)
r18 6, 8 5 mm (0.197 in.)
minimum
info pad center perimeter of info pad
r19 None 10 mm (0.394 in.)
minimum
not applicable correctable RSP misalignment in any
horizontal direction
d63 5 35.0 + 0.9 / - 0.1 mm
(1.378 + 0.035 / -
0.004 in.)
centered on bilateral and
facial plane intersection
top robotic handling flange hole
design feature
x41 1 30 ± 1 mm
(1.181 ± 0.039 in.)
bilateral reference plane orientation notch center
x42 1 50 ± 1 mm
(1.969 ± 0.039 in.)
bilateral reference plane orientation notch center
x43 1 50 ± 1 mm
(1.969 ± 0.039 in.)
bilateral reference plane orientation notch center
x44 1 53 mm (2.087 in.)
maximum
bilateral reference plane side of robotic handling flange
column
x45 1 65.3 ± 1 mm
(2.571 ± 0.039 in.)
bilateral reference plane orientation notch tip
x46 1 71 ± 1 mm
(2.795 ± 0.039 in.)
bilateral reference plane edge of robotic handling flange
x47 1 58 mm (2.283 in.)
minimum
bilateral reference plane edge of robotic handling flange
corner beveling
x100 1 92.5 mm (3.642 in.)
minimum
bilateral reference plane edge of recess
x114 None 0 ± 1 mm
(0 ± 0.039 in.)
bilateral reference plane bisecting plane through reticle
x123 1 140.25 ± 1 mm
(5.522 ± 0.039 in.)
bilateral reference plane side edge of side handling flange
x127 1 141.5 mm
(5.571 in.) maximum
bilateral reference plane side of pod
x129 2 5.68 ± 0.25 mm
(0.224 ± 0.010 in.)
side edge of side handling
flange
vertex of side handling flange
alignment notch
x130 6, 8 89 ± 0.5 mm
(3.504 ± 0.020 in.)
bilateral reference plane center of info pads A and B