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SEMI E5-1104 © SEMI 1982, 2004 164 Figure 6 Wafer Rotation P osition in Degrees

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SEMI E5-1104 © SEMI 1982, 2004 163
Stream,Function Name (Mnemonic) Direction
S12,F19 Map Error Report Send (MERS) S,H<->E
Description
Used to transmit map related errors.
Structure
L,2
1. <MAPER>
2. <DATLC>
Exception
None
S12,F20 Not Used
SEMI E5-1104 © SEMI 1982, 2004 164
Figure 6
Wafer Rotation Position in Degrees
SEMI E5-1104 © SEMI 1982, 2004 165
Figure 7
Wafer Rotation on Film Frame
Figure 8
Orientation Reference and Index Determination