semi合集-English.pdf - 第5973页

SEMI P42-0304 © SEMI 2004 6 Item Data type Unit the entry example Reticle ID ID ---- Uniqueness ID Reticle name string ---- Bar code string ---- ex. Code39 Size unsignedInt ---- 230,5,6 Retic le size UnitType string mm/u…

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SEMI P42-0304 © SEMI 2004 5
Table 1 Reticle Frame Data
Item Data type Unit the entry example
Date Date Time ---- 1999-05-31T13:20+08:00Formulation
information
Person string ---- HIGASHINO
Use exposure
machine
Machine type information (1 – ∞) string ----
Wafer type string ---- SEMI,JEIDA,OF,notch
Size unsignedInt ---- 150,200,300,5,6,8,12 Wafer size
UnitType string mm/um/inch mm,inch
Clearance Double ---- 3.0 Edge Clearance
UnitType string mm/um/inch mm
Thickness unsignedInt ---- 725 Wafer thickness
UnitType string mm/um/inch um
Wafer
information
Wafer Rotation unsignedInt deg 0,90,180,270,xxx
X Double ---- X size
Y Double ---- Y size
Step Pitch
UnitType string mm/um/inch
C unsignedInt ---- Col Shot Map array
R unsignedInt ---- Row
X Double ---- X offset
Y Double ---- Y offset
Shot Map
information
Shot Map offset
UnitType string mm/um/inch
Shot area ID ID ---- Uniqueness ID
Reticle ID string ---- Reticle information
Reticle ID
X Double ---- X size
Y Double ---- Y size
Shot area size
UnitType string mm/um/inch
X Double ---- X shift
Y Double ---- Y shift
Shot area shift
UnitType string mm/um/inch
X Double ---- X position
Y Double ---- Y position
Shot area
information
(1 – ∞)
Shot area position
shift
UnitType string mm/um/inch
Shot ID ID ---- Uniqueness ID
Shot area ID string ---- Shot area information
Shot area ID
C unsignedInt ---- Column Shot Location
R unsignedInt ---- Row
X Double ---- X position
Y Double ---- Y position
Shot map
Shot information
(1 – ∞)
Shot position
UnitType string mm/um/inch
SEMI P42-0304 © SEMI 2004 6
Item Data type Unit the entry example
Reticle ID ID ---- Uniqueness ID
Reticle name string ----
Bar code string ---- ex. Code39
Size unsignedInt ---- 230,5,6 Reticle size
UnitType string mm/um/inch mm,inch
Reticle Type string ---- Cr,ArCr,Att.PSM,
EAPSM,….
Reticle Mark ID string ----
Reticle Mark Type string ---- STD
Reticle
design
Reticle
information
(1 – ∞)
Projection Magnification unsignedInt ---- 1,2,4,5………
Alignment Mark ID ID ---- Uniqueness ID
Group string ----
Wafer mark type string ---- P1,P2,…,F1,F2…
X Double ---- X-Mark X position X-
Mark
Y Double ---- X-Mark Y position
X Double ---- Y-Mark X position
Wafer mark
position
Y-
Mark
Y Double ---- Y-Mark Y position
UnitType string mm/um/inch
Alignment Mark
information
(0 – ∞)
Comment string ----
Alignment
Mark design
Mark use rule FileName string ----
Alignment Mark ID ID Uniqueness ID
Group string
Wafer mark type TYPE=P1,P2,…,F1,F2…
X Double ---- X-Mark X position X-Mark
Y Double ---- X-Mark Y position
X Double ---- Y-Mark X position
Wafer mark
position
Y-Mark
Y Double ---- Y-Mark Y position
UnitType string mm/um/inch
Alignment
USE Mark
Alignment Mark
information
(0 – ∞)
Comment string ----
7 XML Description (Schema)
XML description defined from Table 1 is as follows.
<?xml version="1.0" encoding="UTF-8"?>
<xsd:schema targetNamespace="file://XML\SEMI_Samples\SemiSEMI"
xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:rfd="file://XML\SEMI_Samples\SemiSEMI">
<!-- ================ Reticle frame design data infomation Table ====================== -->
<xsd:element name="rdm" type="rfd:rdmType"/>
<xsd:complexType name="rdmType">
<xsd:sequence>
<xsd:element name="FormulationInformation"
type="rfd:FormulationInformationType"/>
<xsd:element name="UseExposureMachine" type="rfd:UseExposureMachineType"/>
<xsd:element name="ShotMap" type="rfd:ShotMapType"/>
<xsd:element name="ReticleDesign" type="rfd:ReticleDesignType"/>
<xsd:element name="AlignmentMarkDesign" type="rfd:AlignmentMarkDesignType"/>
<xsd:element name="AlignmentUSEMark" type="rfd:AlignmentUSEMarkType"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================== FormulationInformation ============================ -->
SEMI P42-0304 © SEMI 2004 7
<xsd:complexType name="FormulationInformationType">
<xsd:sequence>
<xsd:element name="Date" type="xsd:dateTime"/>
<xsd:element name="Person" type="xsd:string"/>
</xsd:sequence>
</xsd:complexType>
<!-- ======================= UseExposureMachine ============================ -->
<xsd:complexType name="UseExposureMachineType">
<xsd:sequence>
<xsd:element name="MachineTypeInformation" type="xsd:string"
maxOccurs="unbounded"/>
</xsd:sequence>
</xsd:complexType>
<!-- ============================= ShotMap ================================= -->
<xsd:complexType name="ShotMapType">
<xsd:sequence>
<xsd:element name="WaferInformation" type="rfd:WaferInformationType"/>
<xsd:element name="ShotMapInformation" type="rfd:ShotMapInformationType"/>
<xsd:element name="ShotAreaInformation" type="rfd:ShotAreaInformationType"
maxOccurs="unbounded"/>
<xsd:element name="ShotInformation" type="rfd:ShotInformationType"
maxOccurs="unbounded"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="WaferInformationType">
<xsd:sequence>
<xsd:element name="WaferType" type="xsd:string"/>
<xsd:element name="WaferSize" type="rfd:WaferSizeType"/>
<xsd:element name="EdgeClearance" type="rfd:EdgeClearanceType"/>
<xsd:element name="WaferThickness" type="rfd:WaferThicknessType"/>
<xsd:element name="WaferRotation" type="xsd:unsignedInt"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="ShotMapInformationType">
<xsd:sequence>
<xsd:element name="StepPitch" type="rfd:XYCodeType"/>
<xsd:element name="ShotMapArray" type="rfd:CRUnitType"/>
<xsd:element name="ShotMapOffset" type="rfd:XYCodeType"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="ShotAreaInformationType">
<xsd:sequence>
<xsd:element name="ShotAreaID" type="xsd:ID"/>
<xsd:element name="ReticleID" type="xsd:string"/>
<xsd:element name="ShotAreaSize" type="rfd:XYCodeType"/>
<xsd:element name="ShotAreaShift" type="rfd:XYCodeType"/>
<xsd:element name="ShotAreaPositionShift" type="rfd:XYCodeType"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="ShotInformationType">
<xsd:sequence>
<xsd:element name="ShotID" type="xsd:ID"/>
<xsd:element name="ShotAreaID" type="xsd:string"/>
<xsd:element name="ShotLocation" type="rfd:CRUnitType"/>
<xsd:element name="ShotPosition" type="rfd:XYCodeType"/>