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SEMI S21-1103 © SEMI 2003 8 10.1.1.4 Prior to perform ing work, workers shoul d reconfirm the instructions a nd other related docum ents to avoid any misunderstanding of the work proced ure. 10.1.1.5 An appropriat e meth…

SEMI S21-1103 © SEMI 2003 7

9 EEW at Hazardous Voltage or Energy Levels

9.1 Hazardous electrical energy should be isolated

whenever it is possible to perform the work with the

equipment non-energized.

9.2 When electrical energy cannot be isolated due to

the type of work to be performed (e.g., trouble-

shooting, power supply adjustment), suppliers should

identify all tasks that include electrical-energized work

and should provide procedures for safely accomplishing

such work.

9.2.1 Facility operators should verify, modify if

necessary, and approve procedures before EEW is

performed at the facility.

NOTE 20: Appropriate levels of PPE for EEW can only be

calculated with knowledge of the energy available from the

source (e.g., sub-station, transformer) that provides power

from the facility to the equipment circuit.

9.3 EEW or Working on Energized Electrical Circuitry

9.3.1 Supplier should notify the user of any EEW that

may be required.

NOTE 21: Routine testing of circuits may be included in the

definition of EEW in some circumstances and in some

jurisdictions.

9.3.1.1 Two or more qualified persons should perform

EEW, except for the routine testing of circuits.

9.3.1.2 One worker should always have access to and

be ready to de-energize the system by operating the

appropriate disconnecting device.

NOTE 22: Some jurisdictions or users may require persons to

be trained in emergency rescue procedures such as cardio

pulmonary resuscitation (CPR) electrical shock first-aid, and

extracting a person from an energized circuit.

9.3.1.3 EEW should only be performed by workers

wearing appropriate electrical PPE and natural fiber

clothing for protection against shock, arc, flash, or burn.

NOTE 23: Electrical PPE manufacturers have been testing

certain models of natural fiber or electrical protective

synthetic fiber (e.g., Monofilament Nomex) for clean room

purposes, however, supplier personnel and users should

coordinate the use of clothing that is acceptable in the specific

factory.

9.3.1.3.1 Clothing made from synthetic materials such

as acetate, nylon, polyester, or rayon, either alone or in

blends with cotton, should not be worn for EEW at

hazardous energy levels where the exposure for arc,

flash or burn exists; because it can melt and therefore

fail to provide adequate protection.

NOTE 24: Normal clean room clothing is made from

synthetic fabrics and caution should be taken to provide

adequate protection.

NOTE 25: A Hazard/risk analysis may be used to determine

available fault current and incident energy level in J/cm

These calculated levels establish the level of natural fiber,

calorie-rated flame resistant clothing and electrical PPE

necessary for protection. Calculation formulas and

hazard/risk analysis methods are available in documents such

as ANSI/NFPA 70E.

9.3.1.4 Metal jewelry (e.g., such as watches, rings,

metal framed eyeglasses, and body-piercing jewelry)

should be removed during EEW.

9.3.1.5 During EEW, access to the immediate work

area should be restricted from unqualified workers by

the use of barricades, safety signs, safety cones, safety

tape or a human guardian.

9.4 Safe EEW procedures should be provided by

supplier and should include the following:

a. Verification of valid reasons for performing the

work energized.

b. Identify electrical energy sources and the location

of the means of isolation for each source.

NOTE 26: Identification is required to ensure that workers

know how to remove energy if an emergency develops during

the work task.

c. When the hazard is remote from the equipment

controls, the warning should also be provided at the

point of the hazard.

d. When the EEW is complete, workers should

restore the equipment to its original state and ensure

that all safeguards are restored and interlocks are

functioning properly.

10 Radiation-Producing Equipment

10.1.1 Ionizing Radiation

10.1.1.1 Initial radiation surveys should be performed

as required by regulations to verify that radiation

shielding is installed.

10.1.1.1.1 Additional radiation surveys should be

conducted following maintenance or service tasks to

ensure shielding remains in place, and is effective.

10.1.1.2 Access of unauthorized persons, to working

areas where there is a risk of exposure to hazardous

levels of radiation, should be restricted.

10.1.1.3 If work associated with radiation is required,

the workers should be trained on the hazard

characteristics and appropriate protection measures,

including safe handling, use, and shielding.

NOTE 27: Certification of the people performing the work

may be required, depending on the work to be performed or

the type of radiation.

SEMI S21-1103 © SEMI 2003 8

10.1.1.4 Prior to performing work, workers should

reconfirm the instructions and other related documents

to avoid any misunderstanding of the work procedure.

10.1.1.5 An appropriate method of monitoring the

amount of worker exposure to radiation during work

with ionizing radiation should be considered.

10.1.2 Non-Ionizing Radiation

10.1.2.1 When performing work with potential

exposure to non-ionizing radiation, the potential

exposure should be evaluated and appropriate

protection provided. See SEMI S2 as a technical guide.

10.1.3 Lasers

10.1.3.1 Work on lasers should be performed with the

laser de-energized whenever possible.

10.1.3.2 Workers performing work on laser equipment

should be trained in the hazards and proper work

procedures.

10.1.3.3 During work on other than Class 1 or Class 2

laser equipment, access to the area where unauthorized

personnel can be exposed to energized laser beams

should be controlled with a safety enclosure or other

appropriate method.

NOTE 28: Laser classes greater than Class 1 and Class 2

require PPE when entering the path of an energized laser.

10.1.3.3.1 Suppliers should consider warning labels for

Class 2 laser equipment to ensure workers do not

inadvertently enter the laser path.

10.1.3.4 When working on an opened laser, protective

measures (which may include PPE) should be taken for

the appropriate hazards and level of risk.

10.2 Extreme Temperatures

10.2.1 When performing work with potential exposure

to hazardous surface temperatures, the potential

exposure should be evaluated, and appropriate

protection provided, or the temperature adjusted to a

safe level. See SEMI S2 for acceptable temperature

ranges.

11 Physical Hazards

11.1 Work at Elevated Heights

NOTE 29: Work at extreme heights may require specific

training or specially certified personnel. For example, Japan

Labor Safety Regulations require workers working at five

meters or higher to be a nationally certified chief worker.

11.1.1 If the work at an elevated position, such as the

end of a platform or through an opening, poses a fall

hazard, the area should be guarded with a fence,

handrail, or cover, or fall protection should be worn.

11.1.2 When installing components or assemblies at

heights, protective measures to prevent falling objects

should be implemented. Heavy components or

assemblies should be lifted into position with

ergonomically acceptable lifting equipment.

11.1.3 Work on a Stepladder

NOTE 30: Ladders must be approved for the jurisdiction in

which they are used, if applicable.

11.1.3.1 Stepladders should be stored away from

chemicals and contaminants.

NOTE 31: Regulations related to ladder materials of

construction acceptability may affect use of certain ladders in

areas where chemicals are used or where the ladder is used for

potentially energized electrical work.

11.1.3.2 Stepladders should be inspected to verify that

they are in good condition. If they are not, the

stepladders should be taken out of service until they are

repaired or replaced. Rungs should be inspected to

ensure that they are kept free from fluids and debris.

11.1.3.3 Only one person should be ascending or

descending a stepladder at any time even if steps are

provided on both sides of the ladder.

11.1.3.4 When ascending or descending, workers

should face the stepladder, use at least one hand to

grasp the stepladder and not carry any object that

interrupts the worker’s view.

11.1.3.5 Stepladders should be used fully extended and

with legs locked. Unstable positions such as work on

top two steps, work which requires the torso to extend

beyond the rails, and work which requires standing on

tiptoes or a single foot should be avoided.

11.1.3.6 Work should not be performed below the

stepladder when in use.

11.2 Protection Against Falling Objects

11.2.1 If the work involves hazards from flying or

falling objects, one or more of the following safety

measures should be implemented as appropriate:

• Control approach to the area

• Install a safety net

• Wear a hardhat

• Use measures to secure tools and parts used for the

work

11.3 Visual Hazard Warnings

11.3.1 Barrier tape or another equivalent method to

designate work areas involving fall hazards should be

used, in addition to appropriate signage such as

“Passage Closed,” “Keep Out,” and/or “Watch Your

Step.”

11.3.2 For work done from a standing height not lower

than 1.5 meters or a height specified by regulation,

mark the area along all of the sides with barrier tape

and post appropriate signs where they are visible from

all approaches to the area.

11.4 Floor Openings

11.4.1 If the work requires removal of floor panels, the

area should be barricaded with a barrier that can

support a person’s weight, or position an attendant next

to the area to keep out unauthorized workers.

11.4.2 Appropriate measures (e.g., removing

unnecessary materials from the work area, placing toe-

boards around the opening) should be taken to prevent

objects from falling into the opening.

11.4.3 Personnel below floor opening should be

notified when work is being performed above them.

11.5 Work Between Upper and Lower Floors

11.5.1 For work on cables or piping between upper and

lower floors, the worker should review the location and

level of the hazards associated with the work with the

facility operator.

11.5.2 Facility operators should insure workers on

lower floors are protected from falling objects

11.5.3 Overhead work (e.g., utility connection

activities) protection should be provided by engineering

controls wherever possible.

11.5.3.1 When engineering controls are not feasible,

alternative protection such as PPE (e.g., hardhats)

should be provided.

11.5.3.2 Personnel should be notified when work is

being performed above them.

11.5.4 When work is performed between the upper and

lower floors, the worker should be secured with a safety

harness and wear a hardhat to protect against falling

objects.

11.5.4.1 If wearing a safety harness and hardhat

increases hazards to the worker, alternative means of

providing safe work conditions should be identified.

11.6 Mechanical Hazards

11.6.1 Prior to the installation, an appropriate

equipment transfer method should be established by

reviewing the installation manual or other available

documents for applicable procedures or pertinent

information (e.g., equipment weight, equipment sling

method, lift position, and equipment anchorage

method). If the installation work warrants, appropriately

qualified personnel should perform the work.

11.6.2 Prior to operation, workers should be aware of

any moving parts and the potential for accidental

contact with them.

11.6.3 If a teaching operation is required for a robot or

other system, the operation should be performed in

accordance with the procedure specified in the

maintenance manual or other appropriate documents.

11.6.4 Prior to maintenance, all potential hazards (e.g.,

pinch point hazard, mechanical crush hazard) should be

identified by reviewing the maintenance manual or