semi合集-English.pdf - 第5604页

SEMI P10-0705 © SEMI 1990, 2005 99 < x s : a t t r i b u t e n a m e = " g r o u p N a m e " t y p e = " x s : s t r i n g " u s e = " r e q u i r e d " / > < x s : a t t r i b u t …

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SEMI P10-0705 © SEMI 1990, 2005 98
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SEMI P10-0705 © SEMI 1990, 2005 99
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
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fixed
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< xs: elem ent nam e= "Mea sure dRegist r M ark I d"
type
= " xs:st r ing" / >
< xs: elem ent nam e= "VendorRe gist r a t ionM a rkI d"
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< / xs: ext ension>
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< / xs: ext ension>
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< / xs: ext ension>
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SEMI P10-0705 © SEMI 1990, 2005 100
< xs: at t ribut e nam e= "p1 0 Mult iValue "
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fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
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< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
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< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt Mea su re dRe gist rM a rk " / >
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fixed
= "EndMea sur edRegist r M a rk " / >
< / xs: com plexType>
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< xs: elem ent nam e= "Regist rClosureEquipUse d"
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< xs: elem ent nam e= "EquipSit e Use d" type= "xs:st r in g"
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< xs: elem ent nam e= "Regist rClosu re" t ype= "x s:double"
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