semi合集-English.pdf - 第2018页
SEMI E54.7-0999 © SEMI 1999 12 9.11 SISO -Setpoint – – The presen ta t i o n of the Single Input Single O utput S etpoint (SISO-Set point) obj ect instance attributes and services are as indicated in T able 23. Table 23 …
SEMI E54.7-0999 © SEMI 199911
Table 17 Assembly-MFM Object Instance
Attributes and Services
Assembly-MFM
Class ID = 131, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.6 Sensor-AI-Aux–– The presentation of the Sensor
Analog Input Auxiliary (Sensor-AI-Aux) object
instance attributes and services are as indicated in Table
18.
Table 18 Sensor-AI-Aux Object Instance
Attributes and Services
Sensor-AI-Aux
Class ID = 132, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.7 Actuator-AO-MF –– The presentation of the
Actuator Analog Output Mass Flow (Actuator-AO-MF)
object instance attributes and services are as indicated
in Table 19.
Table 19 Actuator-AO-MF Object Instance
Attributes and Services
Actuator-AO – MF
Class ID = 133, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
128 Valve Type A1
129 Override A2
Services
ID Service Name SDM Tag
-- No additional services defined --
9.8 Controller –– The presentation of the Controller
(Ca) object instance attributes and services are as
indicated in Table 20.
Table 20 Controller Object Instance Attributes
and Services
Controller
Class ID = 39, Instance ID = 01 through q
Attributes
ID Attribute Name SDM Tag
128 Alarm Settling Time CaA21
129 Warning Settling Time CaA24
Services
ID Service Name SDM Tag
-- No additional services defined --
9.9 Local Link –– The presentation of the Local Link
(Lnk) object instance attributes and services are as
indicated in Table 21.
Table 21 Local Link Object Instance Attributes
and Services
Local Link
Class ID = 4, Instance ID = 01 through j
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.10 SISO –– The presentation of the Single Input
Single Output (SISO) object instance attributes and
services are as indicated in Table 22.
Table 22 SISO Object Instance Attributes and
Services
SISO
Class ID = 134, Instance = 01
Attributes
ID Attribute Name SDM Tag
128 Input A1
129 Output A2
130 Data Type A3
Services
ID Service Name SDM Tag
-- No additional services defined --
SEMI E54.7-0999 © SEMI 1999 12
9.11 SISO-Setpoint –– The presentation of the Single
Input Single Output Setpoint (SISO-Setpoint) object
instance attributes and services are as indicated in Table
23.
Table 23 SISO-Setpoint Object Instance
Attributes and Services
SISO-Setpoint
Class ID = 135, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
161 Ramp Type A33
162 Ramp Rate A34
163 Ratio A35
Services
ID Service Name SDM Tag
--- No additional services defined --
9.12 Assembly-MFC –– The presentation of the
Assembly Mass Flow Controller (Assembly-MFC)
object instance attributes and services are as indicated
in Table 24.
Table 24 Assembly-MFC Object Instance
Attributes and Services
Assembly-MFC
Class ID = 136, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
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SEMI E54.8-0305 © SEMI 1999, 2005
1
SEMI E54.8-0305
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK
COMMUNICATIONS FOR PROFIBUS-DP
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the European Information & Control Committee. Current edition approved by the European
Regional Standards Committee on October 7, 2004. Initially available at www.semi.org February 2005; to be
published March 2005. Originally published September 1999.
1 Purpose
1.1 This specification is part of the SEMI Sensor/Actuator Network (SAN) suite of standards and defines a specific
communications protocol based on the PROFIBUS-DP standard. This Network Communication Standard (NCS)
taken together with the SEMI Sensor/Actuator Network standard suite and the PROFIBUS standard completely and
unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of
networked devices in semiconductor manufacturing equipment.
1.2 PROFIBUS is a vendor independent, open fieldbus standard for a wide range of applications in manufacturing,
process and building automation. Vendor independence and openness are guaranteed by the IEC standards for
PROFIBUS, IEC 61158 part 2 to part 6 and IEC 61784-1. PROFIBUS-DP is one version of PROFIBUS which is
optimized for high speed and inexpensive connectivity between automation control systems and distributed I/O at
the device level.
2 Scope
2.1 This document specifies a SAN communications standard based on the PROFIBUS-DP specification that is in
compliance with SEMI E54.1. As such, it specifies the protocol, services, and behavior that compliant intelligent
devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.
2.2 In conjunction with a SEMI standard SAN Common Device Model (CDM) specification and one or more SEMI
standard Specific Device Model (SDM) specifications (e.g., for a Mass Flow Controller, In-Situ Particle Monitor
Devices or Endpoint Devices), this Network Communication Standard (NCS) with the related PROFIBUS-DP
standard describe the data structures, interactions, and behavior that are characteristic of the various devices on the
network. This composite model forms a complete interoperability standard for communications among intelligent
sensors, actuators, and controllers in semiconductor manufacturing equipment.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This document specifies a semiconductor equipment SAN based solely on PROFIBUS-DP and is a companion
document to the PROFIBUS-DP specification; thus, a complete specification of this standard necessarily includes
the PROFIBUS-DP specifications. There are other semiconductor equipment SAN communications options. The
specifications for these options are not included here.
3.2 The specifications within are strictly enhancements that provide additional capabilities over and above those
currently required by PROFIBUS-DP. Included throughout this document, primarily in §6, is information
paraphrased from the PROFIBUS-DP specifications such as: protocol structure, capabilities, options, and
limitations. This information is provided here for reference only and is not intended to provide specification
definitions. In all such areas, refer to the PROFIBUS-DP specification documents for information. This document
is limited to describing enhancements or limitations to the PROFIBUS-DP specification that are imposed by this
standard.
3.3 A complete specification of the conformance testing procedure shall include the PROFIBUS-DP protocol
conformance testing specification. Conformance testing shall also include enhancements and limitations to the
PROFIBUS-DP specification required by this standard.