semi合集-English.pdf - 第1553页

SEMI E32.1-0997 © SEMI 1994, 1997 2 Parameter SECS-II Data Item Atomic Spec List Struc ture AttrData ATTRDATA AttributeID ATTRID CmdParameter List Structu re CmdParmName CP NAME CmdParmValue CPVAL EQName EQNAME ErrorCode…

100%1 / 7923
SEMI E32.1-0997 © SEMI 1994, 19971
SEMI E32.1-0997
SECS-II SUPPORT FOR MATERIAL MOVEMENT
1 Introduction
This document contains the necessary information to implement the Material Movement Management standard
using the SEMI E5 SECS-II communications protocol.
2 Service to Message Mapp ing
The table below lists each message service defined in the Material Movement standard with the SECS-II message
which should be used to perform that service.
Service SECS-II Msg Comments
TRJobCreate S4,F19
1
TRJobCreate Response S4,F20
TRJobCommand S4,F21
TRJobCommand Response S4,F22
TRJobAlert S4,F23
TRJobEvent S6,F11
2
Corresponding messages to enable reporting, create and link
reports, etc. are also assumed.
GetAttribute S1,F19
3
GetAttribute Response S1,F20
3
HOReady S4,F27
HOCommand S4,F29
HOCommand Response S4,F31
HOVerify S4,F33
HOVerify Response S4,F33
HOCancelReady S4,F35
HOCancelReady Response S4,F37
HOHalt S4,F39
HOHalt Response S4,F41
1
If the S4,F19 message is multi-block, it will require the S4,F25/F26 multi-block inquire/grant transaction.
2
TRJobEvent is an unconfirmed service. While the required S6,F12 reply must be transferred by the protocol layer, there is no action required on
the part of the host. Therefore, it shall be discarded rather than delivered to the application which employs this service.
3
The GetAttributes request and response will be removed from E32 and E32.1 in 1998. This message transaction is replaced by GetAttr,
S14F1/F2. See E39 and E39.1 for details.
3 Parameter to Data Item/Pa rameter Mapping
In the table below, each parameter used in the SEMI E32 messaging services is listed along with its corresponding
SECS-II data item. In some cases, a parameter will correspond to a SECS-II list. These cases are noted.
SEMI E32 defines a number of message parameters as conditional. This means that under certain conditions, these
parameters do not need to be included in the message. In SEMI E5, this is done by means of a zero length data item,
or if the parameter is a list, a zero length list. Please refer to SEMI E5, “Zero Length Items and Lists,” Sections 6.2.1
and 6.3.1.
SEMI E32.1-0997 © SEMI 1994, 1997 2
Parameter SECS-II Data Item
AtomicSpec List Structure
AttrData ATTRDATA
AttributeID ATTRID
CmdParameter List Structure
CmdParmName CPNAME
CmdParmValue CPVAL
EQName EQNAME
ErrorCode ERRCODE
ErrorText ERRTEXT
HOAck HOACK
HOCancelAck HOCANCELACK
HOCmdName HOCMDNAME
HOHaltAck HOHALTACK
HOStatus List Structure
ObjectID OBJID
ObjType OBJTYPE
Status List Structure
TRAck TRACK
TRAtomicID TRATOMICID
TRAutoStart TRAUTOSTART
TRCmdName TRCMDNAME
TRDirection TRDIR
TREventData List Structure (See S6,F11 in SEMI E5.)
TREventID CEID
TRJobID TRJOBID
TRJobMS TRJOBMS
TRJobName TRJOBNAME
TRLink TRLINK
TRLocation TRLOCATION
TRObjName TROBJNAME
TRObjType TROBJTYPE
TRPartner TRPTNR
TRPartnerPort TRPTPORT
TRPort TRPORT
TRRecipe TRRCP
TRRole TRROLE
TRStatus List Structure
TRType TRTYPE
4 Collection Event List
The following collection events must be available for
reporting from the equipment via S6,F11:
Committed To Transfer
Waiting for StartHandoff
Transfer Job Paused
Transfer Job Resumed
Atomic Transfer Started
Atomic Transfer Complete
Application Note — SECS-I Equipment-to-
Equipment Link
The direct SECS-I link between equipment poses a
small problem. That is, it is not clear which partner
should be the “SECS-I host” and which the “SECS-I
equipment.” As a general rule, if one partner is always
the primary transfer partner, it should be configured as
the SECS-I host. However, this is not a requirement,
since in some cases the choice of which is the primary
partner may depend upon the situation. Therefore,
where SECS-I is used to link the transfer partners, each
partner should be user-configurable as either “host” or
“equipment.”
NOTICE: These standards do not purport to addresxs
safety issues, if any, assosciated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicabliity of regulalatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E36-0704 1995, 2004
1
SEMI E36-0704
SEMICONDUCTOR EQUIPMENT MANUFACTURING INFORMATION
TAGGING SPECIFICATION
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on December 18, 1998. Initially available at www.semi.org
February 1999; to be published June 1999. Originally published 1995; previous published revision February
1998.
This document replaces SEMI E36-0298 in its entirety.
NOTICE: The designation of this standard was updated during the 0704 publishing cycle to reflect the creation of
SEMI E36.1.
NOTE: The Document Type Definitions, schemas, and
documentation defined in other parts of Semiconductor
Equipment Manufacturing Information Tagging may be
used freely without permission or payment of royalties
or other licensing charge, provided this source and/or its
associated specifications are cited.
1 Purpose
The purpose of Semiconductor Equipment
Manufacturing Information Tagging is to define a
markup philosophy, a markup framework, and an
information markup which is rich enough to facilitate:
• Electronic interchange and distribution of
information;
• Quality hardcopy printing and screen display of
information;
• Consistent high-precision online searching; and
• Reuse and repurposing of information for such
applications as integrating source material into
training material and online support applications.
The intent of this document is to create an information
interchange specification, not an authoring specification
or an electronic presentation specification.
Semiconductor Equipment Manufacturing Information
Tagging will define the markup necessary for
exchanging documents electronically, for facilitating
retrieval of information content, and for validating
information interchanges.
2 Scope
2.1 Information Scope - Semiconductor Equipment
Manufacturing Information Tagging is intended to
cover the types of technical and commercial
information typically needed to support the selection,
installation, use, and maintenance of semiconductor
manufacturing equipment.
The following list gives examples of information types
within scope; this list is not exhaustive.
• Operations Manuals/Guides — typically used by
equipment operators at customer sites to perform
the tasks for which the equipment was designed.
• Installation Manuals — typically used by supplier
and customer engineers to install the equipment at
the customer site.
• Maintenance Manuals — typically used by trained
maintenance technicians at customer sites to
perform repair and upkeep of equipment.
• Maintenance Schedules — typically used by site
coordinators and customer facility managers to
schedule and document normal preventive
maintenance.
• Spares/Parts Lists — typically used by on-site field
service engineers and customers to maintain a
sufficient stocking level to ensure prompt delivery
of parts.
• Repair/Troubleshooting Manuals — typically used
by equipment operators and qualified maintenance
technicians to identify and correct equipment
problems.
• Release Notes — typically used by operators,
technicians and system administrators to identify
changes in software configuration.
• Training Manuals — typically used by supplier
training personnel and customers to train operators
and maintenance technicians.
Additional information on potential use and re-use of
these information types in electronic form can be found
in the Auxiliary Information for this specification.
2.2 Content of SEMI E36 - Semiconductor Equipment
Manufacturing Information Tagging will be issued in
three parts:
• this base document,