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SEMI PR8-0703 © SEMI 2003 2 overlap, a nd may not be com patible with, any such specifications once completed. 3.2 This proposed st andard docum ent provides a textual specification of the int erface, and is intended for…

SEMI PR8-0703 © SEMI 2003 1

SEMI PR8-0703

PROPOSED STANDARD FOR EQUIPMENT DATA ACQUISITION

SOLUTIONS

This proposed standard was technically approved by the Global Information and Control Committee and is

the direct responsibility of the Japanese Information and Control Committee. Current edition approved by

the Japanese Regional Standards Committee on January 10, 2003. Initially available at www.semi.org

January 2003; to be published March 2003.

NOTICE: The designation of this document was

updated during the 0703 publication cycle to reflect the

addition of Related Information Sections 5-8 by

committee vote.

1 Purpose

1.1 The purpose of this document is to facilitate the

development of an Equipment Data Acquisition (EDA)

interface that can function independently of the

SECS/GEM interface. It can be used as a reference for

providing early implementations and prototypes of such

an interface in the absence of a complete set of SEMI

specifications enabling these capabilities.

1.2 Intended Audience — This proposed standard is

intended for use by original equipment manufacturers,

subsystem suppliers, third party automation software

suppliers, and device makers who need to implement or

interface to semiconductor equipment data acquisition

capabilities.

2 Scope

2.1 In Scope

2.1.1 Essential Concepts

2.1.1.1 This proposed standard provides a description

of the essential concepts necessary to provide an EDA

interface implementation.

2.1.2 Use of Communication Technologies

2.1.2.1 This proposed standard specifies technologies

that shall be used for communicating messages and data

in the implementation of an EDA implementation. This

proposed standard specifies the appropriate usage of

these technologies.

2.1.3 Structure of Messages and Data

2.1.3.1 This proposed standard defines a set of

messages and their associated input and output

arguments, error conditions, and data types using the

specified technology.

2.1.4 Optional Features

2.1.4.1 This proposed standard describes which

interface features are considered optional for an EDA

implementation.

2.2 Out of Scope

2.2.1 Equipment Process Control Capabilities

2.2.1.1 This proposed standard will not address

features needed to initiate or control the execution of

material processing, upload/download of recipes,

movement of material, or any other capability that does

not directly relate to the setup and collection of data.

2.2.2 Internal Design of Implementations

2.2.2.1 This proposed standard does not describe or

recommend any particular internal design approach for

the implementation of an EDA interface.

2.2.3 Factory System Architectures

2.2.3.1 This proposed standard does not describe or

endorse any factory system architectures based on the

implementations of the interface described herein.

Examples will be used where necessary to provide

context or illustrate concepts, but such descriptions are

not an endorsement of, or prescription for, the depicted

architecture.

2.2.4 Design or Function of Applications

2.2.4.1 This proposed standard does not describe

details regarding the design or function of any

application that uses implementations of the EDA

interface described herein. Examples will be used

where necessary to provide context or illustrate

concepts, but such descriptions are not an endorsement

of, or prescription for, the depicted application.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This proposed standard provides a specification for

implementing a functional EDA interface in the

absence of a complete set of specifications intended to

address the full set of capabilities. Some or all of the

capabilities supported by this proposed standard may

SEMI PR8-0703 © SEMI 2003 2

overlap, and may not be compatible with, any such

specifications once completed.

3.2 This proposed standard document provides a

textual specification of the interface, and is intended for

human comprehension and understanding of the

capabilities supported by this specification only. For

the technologies in use, it is best to utilize machine-

readable XML Schema and WSDL documents for

implementation to ensure interoperability in the factory

environment. The corresponding schema and WSDL

documents can be obtained through SEMI separately

from this document.

3.3 This proposed standard applies to semiconductor

production equipment. Other types of equipment have

not been examined.

4 Referenced Standards

4.1 SEMI Standards

SEMI E5 — SEMI Equipment Communications

Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and

Control of Manufacturing Equipment (GEM)

4.2 Other Standards

Extensible Markup Language (XML) 1.0, W3C

Recommendation, October 6, 2000

(http://www.w3.org/TR/REC-xml)

Hyper Text Transfer Protocol (HTTP) 1.1, Internet

Engineering Task Force (IETF) RFC 2616, June 1999

(http://www.w3.org/Protocols/rfc2616/rfc2616.html)

Simple Object Access Protocol (SOAP) 1.1, W3C Note,

May 08, 2000 (http://www.w3.org/TR/SOAP)

Uniform Resource Identifiers (URI): Generic Syntax,

IETF RFC 2396, August 1998

(http://www.ietf.org/rfc/rfc2396.txt)

Uniform Resource Name (URN) Syntax, IETF RFC

2141, May 1997 (http://www.ietf.org/rfc/rfc2141.txt)

Web Service Definition Language (WSDL) 1.1, W3C

Note, March 15, 2001 (http://www.w3.org/TR/wsdl)

XML Schema , W3C Recommendation, May 02, 2001

(http://www.w3.org/TR/xmlschema-0,

http://www.w3.org/TR/xmlschema-1,

http://www.w3.org/TR/xmlschema-2)

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 DCP — Data Collection Plan

5.1.2 EDA — Equipment Data Acquisition

5.1.3 FDC — Fault Detection and Classification

5.1.4 HTTP — Hypertext Transfer Protocol

5.1.5 OEE — Overall Equipment Effectiveness

5.1.6 SEMI — Semiconductor Equipment and

Materials International

5.1.7 SOAP — Simple Object Access Protocol

5.1.8 URI — Universal Resource Identifier

5.1.9 W3C — World Wide Web Consortium

5.1.10 XML — Extensible Markup Language

5.2 Definitions

5.2.1 data acquisition message — any message sent

from an off-equipment software client to the equipment

via an interface supported by the equipment that

supports the reporting, configuration, activation, or de-

activation of automatic or ad-hoc collection of data

such as alarms/exceptions, events, sampling of time-

varying data, etc.

5.2.2 EDA Interface — an interface provided by

semiconductor production equipment that enables setup

of data collection plans and collection of data

independent of the equipment’s SECS/GEM interface.

5.2.3 process message — any message sent from an

off-equipment software client to the equipment via an

interface supported by the equipment that causes

physical movement, initiates, pauses, or aborts

processing, directly affects the course of processing, or

that results in the modification of state information

maintained by the equipment that directly affects

processing.

6 Overview

6.1 Interface Scope

6.1.1 The interface described by this proposed standard

only supports the acquisition of data from equipment.

Process messages will continue to remain in the domain

of the SECS/GEM interface to the equipment. This

means that any application that requires the use of

process messages in order to achieve its objectives will

continue to be required to send those messages through

the SECS/GEM interface.

6.1.2 Figure 1 shows a conceptual model of the relationship between applications that can utilize this interface for

data acquisition and the host system that uses the SECS/GEM interface to perform process control tasks. If process

messages must be sent to the equipment based on data obtained via the EDA interface, the host system must be

integrated with those components that utilize the EDA interface, so the corresponding process messages can be sent

to the equipment via SECS/GEM.

Host System

SECS/GEM

Diagnostic, Equipment Health

Monitoring, OEE, and other systems

EDA

Equipment data clients set up and control

the flow of data from the equipment, perform

analysis, and send/receive control

messages to/from host when necessary

messages

Host uses control/process

ob, GEM, etc. to control

equipment actions and

execution

Equipment

rocess and data acquisition

messages

data acquisition messages only

Figure 1

Control and Data Interfaces to the Tool

6.1.3 Figure 2 shows a conceptual picture of the capability supported by this specification. Note that some data

acquisition messages can be sent to the equipment via the SECS/GEM interface, if the equipment has been so

configured. This capability is in place to facilitate factory architectures in which all data management operations

must be centralized at the SECS/GEM host during the period when systems based on this specification are in

development.

Host System

EDA Client

•

Data management services

•

SECS

II / HSMS

Equipment

SECS Port

EDA Port

EDA Client

EDA Client(s)

• Data management services

• Data delivery services

SECS

EDA

Configure

data management

to take place via

either SECS or EDA

port

Figure 2

EDA Interface Features

6.2 Interface Features

6.2.1 This section itemizes interface features. Not all features require implementation from suppliers. The

“Implementation Required” column indicates whether the feature must be implemented in order to be in compliance

with this proposed standard. “Optional” in the Implementation Required column indicates that the feature is not

required for compliance with the standard, but shall be considered for advanced implementations, and need not be

implemented except at the supplier’s discretion. The column entitled “Supported by Interface Definition” indicates

whether the feature is supported via the SECS/GEM or XML/SOAP message specifications defined in this

document. A “-“ (dash) in the supported by interface definition column indicates that the feature is supported

outside of the interface, whereas a “!”(checkmark)

indicates that the feature is supported through the interface.