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SEMI F97-0305 © SEMI 2005 25 R2-1.2 SEMI E6 recommen ds data to be supp lied in the semiconductor equipment in stallation documentation including thei r units of measurement. It is recommended that FPUs and FMCS use the …

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SEMI F97-0305 © SEMI 2005 24
Data Information
FPU System Output Data
Analog Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Value
Range
Value Step Polarity Alarm
Levels
Warning
Levels
Discrete Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Meaning
FPU Subcontrol Level Data
Subsystem/Component:
Analog Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Value
Range
Value Step Polarity Alarm
Levels
Warning
Levels
Discrete Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Meaning
Subsystem/Component:
Analog Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Value
Range
Value Step Polarity Alarm
Levels
Warning
Levels
Discrete Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Meaning
SEMI F97-0305 © SEMI 2005 25
R2-1.2 SEMI E6 recommends data to be supplied in the semiconductor equipment installation documentation
including their units of measurement. It is recommended that FPUs and FMCS use the same units of measurement
for the data to be exchanged between them.
R2-2 Example
R2-2.1 The tables below give examples of the template tables listed in R2-1.
Table R2-2 Example of the Use of the Tables R2-1 for One Particular FPU
General Information
Project: Fab XXX, Purchaser Name, Location
FPU: UPW (Ultra Pure Water)
FPU Model: YYY-ZZZ
Supplier: Supplier Name
Protocol FPU/FMCS: PROFIBUS-DP
Status Information
Tag: CUB_UPW_STATUS
Field Bit Meaning Issue Comment/Value
Watchdog-Toggle 0 0/1 Supported? Yes / No
Frequency?
60 seconds
OP-Mode 1 0: Manual
1: Automatic
Supported? Yes / No
Initial state when started?
⌧Manual
Automatic
Restrictions to switch between states?
None
Control-Mode 2 0: Local
1: Remote
Supported? Yes / No
Initial state when started?
⌧Local
Remote
Run-Mode 3-4 0: Down
(unscheduled)
1: Down (scheduled)
2: Stand-by
3: Run
Supported? Yes
/ No
Initial state when started?
Down (unscheduled)
Down (scheduled)
⌧Stand-by
Run
Alarm-Mode 5 0: No_Alarm
1: Alarm
Supported? Yes / No
Type of acknowledgement?
Operator must
acknowledge at FPU
Warning-Mode 6 0: No_Warning
1: Warning
Supported? Yes / No
Error-Mode 7 0: No_Error
1: Error
Supported? Yes / No
Maintenance-Mode 8 0: No_Maintenance
1: Maintenance
Supported? Yes / No
SEMI F97-0305 © SEMI 2005 26
Tag: CUB_UPW_STATUS
Field Bit Meaning Issue Comment/Value
Simulation-Mode 9 0 : No_Simulation
1 : Simulation
Supported? Yes / No
Initial state when started?
⌧No_Simulation
Simulatiom
Means to switch between states?
Manual switch at control
panel of FPU
Lock-Mode 10 0: Not_Locked
1: Locked
Supported? Yes / No
Critical failures which cause FPU to leave
locked state?
see functional design
specification xxxx
Others
(Describe)
Data Information
FPU System Output Data
Analog Data Set Data
Possible
(yes/no)
Tag Data Type Update
Cycle
Time
Value
Range
Value
Step
Polarity Alarm
Levels
Warning
Levels
Temperature
(°C)
Yes CUB_UPW_
TIC_401
Real 32 2 s 20–100 0.1 Unipolar Low: 22
High: 40
Low: 25
High: 30
Resistivity
(MegaOhm-cm)
No CUB_UPW_
RES_402
Real 32 2 s 10–100 0.1 Unipolar Low: 16 Low: 17
Operation time
(hours)
No CUB_UPW_
TIME_403
Real 32 6 min 0–100,000 0.1 Unipolar
FPU Subcontrol Level Data
Subsystem/Component: Reverse Osmosis
Analog Data Set Data
Possible
(yes/no)
Tag Data Type Update
Cycle
Time
Value
Range
Value
Step
Polarity Alarm
Levels
Warning
Levels
Capacity (%) No CUB_UPW_
ROS_CAP
Integer 16 5 s 0–100 1 Unipolar High: 95 High: 90
Discrete Data Set Data
Possible
(yes/no)
Tag Data Type Update
Cycle
Time
Meaning
Cartridge RO-1
(on/off)
No CUB_UPW_
RO1_STATUS
Unsigned8 2 s 0: Off
1: On
Cartridge RO-2
(on/off)
No CUB_UPW_
RO2_STATUS
Unsigned8 2 s 0: Off
1: On