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SEMI E81-0600 © 1999, 2 000 23 • Manu fact uri ng ope rato rs and othe r fa ctor y personnel are im portant resources to facilitate and superv ise material proces sing an d handl ing, preventive m a intenance, and in som…

NamedEntity

(from Resource AIG)

MaterialTrackingLocation

(from Machine Group)

MaterialGroup

0..*

contains

0..*

MaterialContainer

(from Durable Mgt Comp)

InventoryRegionSystem

(from Inventory Region Mgt Comp)

Material

0..*

0..1

0..*

0..1

holds

0..*

is grouped in

0..*0..*

0..1

0..*

0..1

0..*

holds

0..*

associated

with

Figure 6

Material Interface Architecture

7.3.3 Factory Resource Architecture

7.3.3.1 Factory resources, such as machines, people

and reticles, are the entities that participate in

transforming material into products. The CIM

Framework defines an overall domain architecture for

factory resources that supports

• resource tracking and maintenance (resource usage

counters, maintenance procedures, etc.),

• hierarchical organization (e.g., a factory is

organized into areas which group machines and

people),

• composition of resources (e.g., a machine is

composed of chambers, load ports and sensors),

and

• an object-oriented type structure (transport

machines and production machines are types of

machines; machines, ports, durables and people are

support resources, etc.).

7.3.3.2 This section defines the CIM Framework

resource architecture.

7.3.3.3 Factory Resource Hierarchy

7.3.3.3.1 A factory is usually viewed as a hierarchy of

resources organized in groups, as in Figure 7. Each

level or portion of the hierarchy has an associated task

scope.

• An enterprise often includes multiple factories. The

task of the enterprise is to deliver products to

customers.

• A factory is made up of areas and bays with

interbay material handling systems. The task of the

factory is to manufacture product in response to

product requests.

• Areas or bays are made up of processing and

metrology equipment with intrabay material

handling systems. The task of the areas or bays is

to perform a group of process operations on groups

of materials, move material to the processing

equipment, and perform maintenance and other

supporting tasks. For a simple factory, the area

level is optional. For a complex factory, there may

be multiple area levels, with areas made up of sub-

areas.

• Complex processing equipment (such as a cluster

tool) is made up of processing chambers and

internal material handling and storage resources.

The task of the processing equipment is to perform

a process or metrology step or a closely related

group of steps on a material lot or process group.

The task of the processing resource in the

processing equipment (such as a chamber in a

cluster tool) is to perform a single process step on a

single wafer or on a collection of wafers in a

process resource group.

• Material handling and transport systems are made

up of interconnected stockers, tracks, conveyers,

robotic handlers and other material storage and

movement equipment. The task of the material

handling systems is to store and move materials in

transport groups.

• Manufacturing operators and other factory

personnel are important resources to facilitate and

supervise material processing and handling,

preventive maintenance, and in some cases,

perform manufacturing steps such as moving

material or performing a visual inspection.

• Other factory resources include durables (reticles,

cassettes, pods, etc.) and consumables (gases,

utilities, etc.).

• The information model in Figure 8 shows the CIM

Framework Resource Composition Architecture.

The interfaces in the box labeled Resource Abstract

Interface Group define the generic resource

architecture. In general, resources can be composed

of other resources. In particular, at the factory and

area levels, Factory can be composed of Areas and

an Area can be composed of other Areas. Areas

group Support Resources, such as machines and

persons. This is not a strict composition so that

support resources can be in more than one Area

grouping. At the machine level, Machine

Resources are composed of other Machine

Resources, in general. In particular, Production

Machines are composed of Process Resources.

Production Machine

Transport Machine Storage Machine

Transport Resource Storage Resource

Enterprise

rea

Factory

Process Resource

Person

... ...

Figure 7

Factory Resource Hierarchy Model

Resource

MachineResource

Machine

ProductionMachine

ProcessResource

0..*0..*

MESFactory

SupportResource

Area

0..*0..*

groups

0..*

0..*0..*

Generic

Resource

Architecture

(part)

Figure 8

Resource Composition Architecture

ComponentManager

Sensor

MachineResource

Production Machine

ProcessResource

0..*

SupportResource

Durable

Material

Consumable

TransportMachineStorageMachine

any

OwnedEntity

is owned by

another

HistoryCollection

NamedEntity

0..1

is associated

with

Port

Machine

Person

0..*

assigned to

Capability

Resource

0..*

possible

0..*

assigned

0..*

Resource

Abstract

Interface Group

(part)

Area

MESFactory

Figure 9

Resource Type Architecture

7.3.3.3.2 Figure 9 shows the CIM Framework

Resource Type Architecture. Specializations of these

interfaces, such as Machine Resource and Durable,

provide component-specific details that extend the

generic resource architecture. The functions added at

each level of type specialization are discussed next.

7.3.3.3.3 Named Entity

7.3.3.3.3.1 The CIM Framework Named Entity

interface provides for names and histories to be

associated with any CIM Framework entity, including

resources.

7.3.3.3.4 Owned Entity

7.3.3.3.4.1 The Owned Entity interface provides for

resources to be organized into hierarchies.

7.3.3.3.5 Resource

7.3.3.3.5.1 The Resource interface provides for

• composition of subresources into complex

resources,

• representing resource capabilities (such as capacity

or process capability) (See Section 7.3.3),

• a simple state model (available, not available) and

services to startup and shutdown the resource, and

• modeling of resource levels as in Figure 7 and

Figure 8.

7.3.3.3.5.2 Each Resource has an attribute called

resourceLevel to support the factory resource

composition hierarchy of Figure 8. The CIM

Framework defines the following resource levels:

Factory (called MESFactory so as not to be confused

with the OMA’s object Factory type), Area, Machine

and Machine Resource. The Area level is optional, or it

may have multiple levels (such as an area called

LithoBay with sub-areas called Zone1 and Zone2).

Other levels can be defined. The resourceLevel concept,

combined with the Named Entity and Owned Entity,

also provide a name scoping facility.

7.3.3.3.6 Support Resource

7.3.3.3.6.1 The Support Resource interface provides

services for reserving resources (to support scheduling,

for example) and to track resource utilization and

effectiveness and associate maintenance tasks with

resources (see Figure 10 and Section 7.3.3.5). The

support resources include machine resources, material

load ports, sensors, durables and people.

7.3.3.3.7 Machine Resource

7.3.3.3.7.1 The Machine Resource interface provides

attributes for machine description, serial number, model

number, vendor, software version, etc. The interface