semi合集-English.pdf - 第5563页

SEMI P10-0705 © SEMI 1990, 2005 58 </xs:sequence> <xs:sequence minOccurs="0" maxOccurs="unbounded"> <xs:element name="ScratchSizeBack" type="xs:double"/> <xs:s…

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SEMI P10-0705 © SEMI 1990, 2005 57
<xs:element name="DefectSizeClIsoRep"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDkIso" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDkIsoRep"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectDensity" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectCount" type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectCountRep" type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectiveDieDensity"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectiveDieCount"
type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectiveDieCountRep"
type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PercentDefectiveDie"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EdgeRoughness" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="InspectionArea" type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="InspectionAreaExclude"
type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ScratchSizeFront"
type="xs:double"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ScratchInspArea"
type="WindowType"/>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="ScratchInspExclude"
type="WindowType"/>
</xs:sequence>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 58
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ScratchSizeBack" type="xs:double"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ScratchInspArea"
type="WindowType"/>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="ScratchInspExclude"
type="WindowType"/>
</xs:sequence>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="GoodFields" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="DefectEquipReqd" type="xs:string"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EquipSiteReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectInspModeReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectInspPixelSizeReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="DefectType"
type="xs:string"/>
<xs:element name="DefectInspSensitivityReqd"
type="xs:string"/>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="BinSize"
type="xs:string"/>
<xs:element name="SeverityCriterionReqd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSetupFileNameReqd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DatabaseInspection"
type="DatabaseInspectionType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RepairDefinition"
type="RepairDefinitionType"/>
</xs:sequence>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 59
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartDefectDefinition"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndDefectDefinition"/>
</xs:complexType>
<xs:complexType name="DatabaseInspectionType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Price" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DatabaseSource" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DatabaseTopCell" type="xs:string"/>
<xs:element name="DatabaseLayer" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DatabaseFileName"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DatabaseUnit" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="UserUnit" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DatabaseWithJob"
type="xs:boolean"/>
<xs:sequence minOccurs="0">
<xs:element name="DatabaseJobName"
type="xs:string"/>
<xs:element name="DatabaseJobLevel"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="DatabaseArea" type="WindowType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartDatabaseInspection"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndDatabaseInspection"/>
</xs:complexType>
<xs:complexType name="RepairDefinitionType">
<xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="RepairEquipReqd" type="xs:string"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EquipSiteReqd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>