semi合集-English.pdf - 第809页
SEMI E111-0305 © SEMI 2001, 2005 6 Figure 2 Detail A: Exte rnal Top View of Side Handling Flange Ali gnment Notch RFI D PL ACEM ENT Z ONE Figure 3 External Rear View of RSP 150 Figure 4 Int…
SEMI E111-0305 © SEMI 2001, 2005 5
A pad in the up position must be z26 above the horizontal reference plane. A pad in the down position must be z2
above the horizontal reference plane. Info pad assignments are shown in Table 1. Info pads that are “not defined”
can be at either the up or down position unless specified by the end user. RSP configurations “to be assigned” may
be assigned by the end user.
Table 1
Info Pad
RSP Configuration
A B C D
6 inch reticle not defined not defined up down
to be assigned not defined not defined down down
to be assigned not defined not defined up up
to be assigned not defined not defined down up
7 Related Documents
7.1 SEMI Standards
SEMI P1 — Specification for Hard Surface Photomask Substrates
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
RFID PLACEMENT ZONE
d63 = 35 + 0.9 / -0.1
Figure 1
External Top View of RSP150
SEMI E111-0305 © SEMI 2001, 2005 6
Figure 2
Detail A: External Top View of Side Handling Flange Alignment Notch
RFID PLACEMENT ZONE
Figure 3
External Rear View of RSP150
Figure 4
Internal Front View of RSP150
SEMI E111-0305 © SEMI 2001, 2005 7
d63 =
35 + 0.9 / -0.1
Figure 5
Detail B: Top Robotic Handling Flange Hole Feature
1.5
Figure 6
Detail C: Reticle Seating and Capture Detail