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SEMI E109-0305 © SEMI 2001, 2005 18 # Previous State Trigger New State Actions Comment 17 WAITING FOR HOST A CancelPod service is received. SLOT MAP VERIFICATION FAIL Prepare the Reticle Pod for Unload. Data required to …

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SEMI E109-0305 © SEMI 2001, 2005 17
# Previous State Trigger New State Actions Comment
9 WAITING
FOR HOST
ON ID
STATUS
A Cancel Pod Service is
received.
ID
VERIFICATION
FAILED
None. Data required to be available for
this event report:
PortID
PodID
10 ID NOT READ BypassReadID
i
variable is set
to FALSE, and a reticle pod is
received when the id reader is
not in service or not installed.
WAITING FOR
HOST ON ID
STATUS
Wait for
ProceedWithPod.
Data required to be available for
this event report:
PortID
PodID
11 ID NOT READ BypassReadID
i
variable is set
to TRUE, and a reticle pod is
received when the id reader is
not in service or not installed.
ID
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID
PodID
12 ID NOT READ The equipment successfully
reads, but unsuccessfully
verifies a reticle PodID.
ID
VERIFICATION
FAILED
None.
This transition should be
followed by the equipment
performing a self initiated
CancelBind service (see transition
29)
Data required to be available for
this event report:
PodID (of the pod instantiated in
the Bind service)
Data required to be available for
this event report:
PortID
PodID
13 (no state) A reticle pod is instantiated. SLOT MAP
NOT READ
None. No event is required for this
transition.
14 SLOT MAP
NOT READ
Slot Map is read and verified
successfully by the equipment.
SLOT MAP
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID (if valid)
PodID
LocationID
15 SLOT MAP
NOT READ
Normal host based
verification: Slot Map is read
successfully and the
equipment is waiting for host
verification.
Equipment based verification:
Slot map is read successfully
but equipment based
verification has failed.
Slot map read fail: Slot Map
cannot be read.
WAITING FOR
HOST ON SLOT
MAP STATUS
Save new slot map
in the SlotMap
attribute.
Data required to be available for
this event report:
PortID (if valid)
PodID
LocationID
SlotMap (if valid)
Reason
16 WAITING
FOR HOST
A ProceedWithPod service is
received.
SLOT MAP
VERIFICATION
OK
Proceed with the
Reticle Pod as
instructed.
Data required to be available for
this event report:
PortID (if valid)
PodID
LocationID
SEMI E109-0305 © SEMI 2001, 2005 18
# Previous State Trigger New State Actions Comment
17 WAITING
FOR HOST
A CancelPod service is
received.
SLOT MAP
VERIFICATION
FAIL
Prepare the Reticle
Pod for Unload.
Data required to be available for
this event report:
PortID (if valid)
PodID
LocationID
18 (no state) A reticle pod object is
instantiated.
NOT
ACCESSED
None. Data required to be available for
this event report:
PodID
19 (no state) A reticle pod object is
instantiated.
NOT
AVAILABLE
or
AVAILABLE
None. This is the default entry into
NOT ACCESSED. If the reticle
is instantiated by service, the
state is NOT AVAILABLE. If
instantiated by PodID read the
state is AVAILALBLE.
Data required to be available for
this event report:
PodID
20 NOT
AVAILABLE
The reticle pod is received by
the equipment.
AVAILABLE None. Data required to be available for
this event report:
PodID
PortID
21 AVAILABLE The equipment opens the
reticle pod.
IN ACCESS None. Data required to be available for
this event report:
PodID
22 IN ACCESS Normal with ReticleTransfer-
Job service for pod with
OutputPortID not equal to
zero: The actions defined in
the reticle transfer job have
completed and the equipment
closes the reticle pod.
PodComplete service: The
host sends the PodComplete
service and the equipment
closes the reticle pod.
Internal Pod Buffer: The
PodOut service has been
received.
Abnormal: The pod has failed
slot map verification and/or a
CancelPod service is received
and the pod is ready for
unload.
COMPLETE None. Data required to be available for
this event report:
PodID
23 NOT
ACCESSED
Via ID verification failure:
The pod has failed ID
verification and the carrier is
ready for unload.
Via Service: A CancelBind,
CancelPodNotification,
CancelPod, or
CancelReticleTransferJob has
been received prior to pod
arrival.
COMPLETE None. Data required to be available for
this event report:
PodID
SEMI E109-0305 © SEMI 2001, 2005 19
# Previous State Trigger New State Actions Comment
24 (no state) A reticle pod is instantiated. NOT LOCKED None. Data required to be available for
this event report:
PodID
PortID
25 NOT LOCKED A reticle pod is clamped or
otherwise physically
restrained from removal by an
entity external to equipment.
LOCKED None. Data required to be available for
this event report:
PortID
PodID
26 NOT LOCKED A reticle pod is clamped or
otherwise physically
restrained from removal by an
entity external to equipment.
RELEASED
AND LOCKED
or
HOLD
None. This is the default entry into
LOCKED. If the PodRelease
flag is set to Equipment Release
the state is RELEASED AND
LOCKED. If the PodRelease
flag is set to Host Release the
state is HOLD.
Data required to be available for
this event report:
PortID
PodID
27 HOLD A PodRelease service has
been received by the
equipment.
RELEASED
AND LOCKED
28 RELEASED
AND LOCKED
MANUAL Access Mode: The
POD ACCESSING state
enters COMPLETE and a
reticle pod is unclamped or
has had any restraints
preventing removal by an
external entity removed.
AUTO Access Mode and
Unclamp control trigger set to
Pod Closed: The POD
ACCESSING state enters
COMPLETE and a reticle pod
is unclamped or has had any
restraints preventing removal
by an external entity removed.
AUTO Access Mode and
Unclamp control trigger set to
AMHS Triggered Unclamp:
The POD ACCESSING state
is COMPLETE and the
AMHS arrives and starts a
PIO sequence.
NOT LOCKED None. Data required to be available for
this event report:
PortID
PodID