semi合集-English.pdf - 第6868页

SEMI S2-0703a E © SEMI 1991, 2004 97 C. Pulse Repetition Frequency in Hertz (Hz) ____ ___, _______, _______ D. Averag e Pow er in Watts (W) _ ______, _______, _______ E. Radiant Exposure Joules/square centimeter (J/cm 2 …

100%1 / 7923
SEMI S2-0703a
E
© SEMI 1991, 2004 96
26.4 The following detailed information should be available to an evaluator:
Justification for when engineering controls are not feasible to limit exposure during operation or maintenance
tasks, and how administrative controls provide equivalent protection (See Section 26.2); and
Documentation showing compliance with an appropriate international laser product safety or industry standard,
or the national standard of the country of use.
D1-4 Addition of Appendix 7 (Laser Data Sheet – SEMI S2) — OPTIONAL Before Effective Date
D1-4 Addition of the following as Appendix 7 (Laser Data Sheet – SEMI S2):
APPENDIX 7
Laser Data Sheet – SEMI S2
A7-1 Equipment Information - (All Laser Product Classes)
Laser Equipment Manufacturer ____________________________________________________
Equipment Model # ________________________
Date Laser Data Sheet Completed ________________
Laser Product Classification ____________ (e.g., 1, 1M, 2, 2M, 3A, 3R, 3B, 4)
Classification Standard(s) ____________ (e.g., IEC, FDA/CDRH, JIS)
Certification File Identification Number ______________(e.g., CDRH accession number, or if CDRH accession
number has been applied for, but not yet received, a statement of ‘pending’ along with the submittal date may be
used instead. If self declaring under IEC 60825-1 or if certification is not required, e.g., if class 1 laser product is
incorporated without changes, then ‘N/A’ may be used)
A7-2 Laser Information (Greater than Class 2 & embedded Class 3R (3A), 3B & 4)
Is access to laser radiation above the maximum permissible exposure (MPE) level YES NO
required during maintenance or service tasks? ____ _____
If NO, then the information in Parts A7-2, A7-3 and A7-4 need not be provided.
If YES, complete the information in Parts A7-2, A7-3 and A7-4 for each task and laser that requires access.
If there are multiple lasers contained within the laser equipment, provide the following for each task/laser
combination that meets the above criteria.
Laser Parameters Laser ___1___, ___2___, __etc.__
Laser Manufacturer _______, _______, _______
Laser Model No. _______, _______, _______
A7-2.1 Laser Medium Type (HeNe, Nd:YAG, Argon, KrF, Diode, etc.) _______, _______, _______
A7-2.2 Wavelength(s) in nanometers (nm) _______, _______, _______
A7-2.3 Laser Hazard Classification (individual laser) _______, _______, _______
NOTE 3: If a laser is used in both continuous wave and pulsed modes, complete both A7-2.4 and A7-2.5.
A7-2.4 Continuous Wave Lasers
A. Power in Watts (W) _______, _______, _______
B. Irradiance in Watts/square centimeter (W/cm
2
at aperture) _______, _______, _______
A7-2.5 Pulsed Laser Characteristics
A. Pulse Duration in Seconds (s) _______, _______, _______
B. Energy per Pulse in Joules (J) _______, _______, _______
SEMI S2-0703a
E
© SEMI 1991, 2004 97
C. Pulse Repetition Frequency in Hertz (Hz) _______, _______, _______
D. Average Power in Watts (W) _______, _______, _______
E. Radiant Exposure Joules/square centimeter (J/cm
2
) _______, _______, _______
F. Q-Switch controlled pulses (Yes/No) _______, _______, _______
A7-2.6 Beam Parameters at maintenance or service access points
Exception: In the case of proprietary information, an acceptable alternative to providing the Beam
Parameters is to provide NOHD results for each access point according to IEC 60825 or equivalent.
A. Beam shape Circular (C), Rectangular (R), Elliptical (E) _______, _______, _______
B. Beam size (mm) Major axis (R/E) or diameter (C) _______, _______, _______
Minor axis (R/E) _______, _______, _______
Laser Parameters Laser ___1___, ___2___, __etc.__
C. Beam divergence in milliradians (mr)
Major axis (R/E) or diameter (C) _______, _______, _______
Minor axis (R/E) _______, _______, _______
D. Focal length in millimeters (mm) (of the emitting lens)
Major axis (R/E) or diameter (C) _______, _______, _______
Minor axis (R/E) _______, _______, _______
E. Is there a collecting optics hazard? (Yes/No) _______, _______, _______
A7-3 Laser Control Measures
A7-3.1 Specify maintenance/service tasks requiring access to laser radiation in excess of the MPE and
recommended laser control measures.
A. Task 1 ________________________________________________________________
B. Task 2 ________________________________________________________________
C. Etc. ________________________________________________________________
Note 1: Suppliers may alternately provide a reference to laser control measures information that is located in a document
available to users.
A7-3.2 Of the tasks in A7-3.1, which tasks need a Laser Controlled Area (for Class 3b or 4 lasers)?
_______________________________________________________________________________
A7-3.3 If a nominal ocular hazard distance (NOHD) is used as a control measure, then provide the NOHD
calculations and assumptions. See IEC 60825-1 for NOHD calculations.
Exception: If specific information required by A7-2.6 is proprietary, suppliers may provide the NOHD results and
an explanation of the assumptions made.
A7-3.4 Include a beam path diagram identifying the accessible points.
NOTE 1: A description of the access points from the exterior of the tool can be considered equivalent to a diagram.
A7-4 Personnel Protective Equipment (PPE)
Provide information for accessible laser radiation hazards in excess of the Maximum Permissible Exposure (MPE)
Laser Parameters Laser ___1___, ___2___, __etc.__
A. Optical Density (OD) of PPE required during maintenance _______, _______, _______
B. OD of PPE required during service activities _______, _______, _______
SEMI S2-0703a
E
© SEMI 1991, 2004 98
C. Other types of PPE (e.g., skin protection) if needed _______, _______, _______
Note 2: Suppliers may alternately provide a reference to PPE information located in a document available to users.
D1-5 Revisions to Related Information 9 (Laser Checklist) — OPTIONAL Before Effective Date
D1-5.1 Revision of the existing Related Information 9 (Laser Checklist) as shown below:
RELATED INFORMATION 9
LASER CHECKLIST
LASER EQUIPMENT SAFETY FEATURES
NOTICE: This related information is not an official part of SEMI S2 and was derived from practical application by
task force members. This related information was approved for publication by vote of the responsible committee on
Oct
ober 21, 1999 April 22, 2004 with an effective date of July 1, 2006.
Laser Manufacturer:
__________________________________
Model #:
__________________________________
Serial #:
__________________________________
Laser Hazard Classification: (During Op
eration)
1. Classification Number (e.g. 1, 2, 3a, 3b, 4):
________
2. Classification Standard(s) (e.g. FDA/CDRH, IEC, JIS, etc.):
________
NOTE R9
-1: If any laser contained in the equipment is Class 2, 3a, 3b or 4 laser system or product, the vendor should
make available upon request a hazard evaluation to include the following information for each laser in the equipment
(where applicable):
Laser Parameters
1. Laser medium type (HeNe, Nd:YAG, CO
2
, Argon, Excimer, GaAs, etc.): __________
Note: For Excimer lasers, specify gases: _______________
2. Wavelength(s) in nanometers (nm):
_______________
3. Continuous Wave
A. Peak Power in Watts (W): ________
B. Available Power in Watts (W): ________
C. Irradiance in Watts/square centimeter (W/cm
2
): _ ________
4.
Pulse Characteristics
A. Duration of Pulse in Seconds (s): ________
B. Energy per Pulse in Joules (J): ________
C. Frequency of Pulses (Pulse Repetition Frequency) in Hertz (Hz): ________
D. Average Power in Watts (W): ________
E. Radiant Exposure in Joules/square centimeter (J/cm
2
): ________
F. Q-Switch controlled pulses ( ) Yes ( ) No
5.
Beam Parameters
A. Emerging beam diameter in millimeters (mm): ________
B. Expanded beam diameter in millimeters (mm): ________
C. Beam divergence in milliradians (mr): ________