semi合集-English.pdf - 第5612页

SEMI P10-0705 © SEMI 1990, 2005 107 - < x s : s e q u e n c e > < x s : e l e m e n t n a m e = " D e f e c t Q u a l i t y I d " t y p e = " x s : s t r i n g " m i n Oc cu r s = " 0 &q…

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SEMI P10-0705 © SEMI 1990, 2005 106
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SEMI P10-0705 © SEMI 1990, 2005 107
- < xs: sequence>
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SEMI P10-0705 © SEMI 1990, 2005 108
< xs: elem ent nam e= "BinSize " t ype= "x s:st ring"
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