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SEMI E49-1104 © SEMI 1995, 2004 2 SEMI F20 — Specification for 316L Stainless Steel Bar, Forgings , Extruded Sha p es, Plate, and Tubing for Component s Used in General Purpose , High Purity and Ultra-High Purity Semi co…

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SEMI E49-1104 © SEMI 1995, 2004 1
SEMI E49-1104
GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING
PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
This standard was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on August 16, 2004. Initially available at
www.semi.org
September 2004; to be published
November 2004. Originally published 1995; last published March 2004.
1 Purpose
1.1 The purpose of this overview document is to
provide a basic set of terminology and reference
documents for SEMI E49.2–E49.8 and E137.
2 Scope
2.1 This document contains terminology and reference
documents used in SEMI E49.2–E49-8 and E137,
which will reference performance and method standards
as well as recommended practices.
2.1.1 The SEMI E49 subdocuments are organized by
types of piping distribution systems — gas,
DI/chemical, solvent — and by types of assembly and
testing procedures — sub-assembly for stainless steel,
sub-assembly for polymer and final tool assembly.
Final assemblies should be tested or validated for all
appropriate parameters (e.g., purity, integrity, failure
rate) as specified in the applicable E49 subdocuments.
2.1.2 The piping distribution documents (SEMI E49.2
through E49.8) include guidelines for system design,
performance, materials, and components. Purity and
performance grades are described for each of the three
types of distribution systems.
2.1.3 Users should complete an overall tool cost of
ownership analysis (see SEMI E35) to determine the
optimum application of HP or UHP tool features. Key
parameters should include facilities cost and installation
cycle time, piping system reliability and maintainability
factors, tool and sub-system contribution to
contamination, and resultant effects on wafer quality
and wafer throughput factors.
2.2 Final assemblies should be evaluated according to
the criteria of SEMI S2 for Environmental, Health and
Safety (EH&S) issues associated with their use.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI C41 — Specifications and Guidelines for 2-
Propanol
SEMI E10 — Specification for Definition and
Measurement of Equipment Reliability, Availability,
and Maintainability (RAM)
SEMI E35 — Cost of Ownership for Semiconductor
Manufacturing Equipment Metrics
SEMI E49.2 — Guideline for the Qualification of
Polymer Assemblies Used in Ultrapure Water and
Liquid Chemical Systems in Semiconductor Process
Equipment
SEMI E49.4 — Guide for High Purity Solvent
Distribution Systems In Semiconductor Manufacturing
Equipment
SEMI E49.5 — Guide for High Purity Solvent
Distribution Systems In Semiconductor Manufacturing
Equipment
SEMI E49.6 — Guide for Subsystem Assembly and
Testing Procedures - Stainless Steel Systems
SEMI E49.7 — Purity Guide for the Design and
Manufacture of Ultrapure Water and Liquid Chemical
Systems in Semiconductor Process Equipment
SEMI E49.8 — Guide for High Purity and Ultrahigh
Purity Gas Distribution Systems In Semiconductor
Manufacturing Equipment
SEMI E137 — Guide for Final Assembly, Packaging,
Transportation, Unpacking, and Relocation of
Semiconductor Manufacturing Equipment
SEMI F1 — Specification for Leak Integrity of High-
Purity Gas Piping Systems and Components
SEM F19 — Specification for the Surface Condition of
the Wetted Surfaces of Stainless Steel Components
SEMI E49-1104 © SEMI 1995, 2004 2
SEMI F20 — Specification for 316L Stainless Steel
Bar, Forgings, Extruded Shapes, Plate, and Tubing for
Components Used in General Purpose, High Purity and
Ultra-High Purity Semiconductor Manufacturing
Applications
SEMI F27 — Test Method for Moisture Interaction and
Content of Gas Distribution Systems and Components
by Atmospheric Pressure Ionization Mass Spectrometry
(APIMS)
SEMI F58 — Test Method for Determination of
Moisture Dry-Down Characteristics of Surface-
Mounted and Conventional Gas Distribution Systems
by Atmospheric Pressure Ionization Mass Spectrometry
(APIMS)
SEMI F60 — Test Method for ESCA Evaluation of
Surface Composition of Wetted Surfaces of Passivated
316L Stainless Steel Components
SEMI F63 — Guidelines for Ultrapure Water Used in
Semiconductor Processing
SEMI F70 — Test Method for Determination of
Particle Contribution of Gas Delivery System
SEMI F73 — Test Method for Scanning Electron
Microscopy (SEM) Evaluation of Wetted Surface
Condition of Stainless Steel Components
SEMI F74 — Test Method for the Performance and
Evaluation of Metal Seal Designs for Use in Gas
Delivery Systems
SEMI F78 — Practice for Gas Tungsten Arc (GTA)
Welding of Fluid Distribution Systems in
Semiconductor Manufacturing Applications
SEMI F81 — Specification for Visual Inspection and
Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid
Distribution Systems in Semiconductor Manufacturing
Applications
SEMI S2 — Environmental, Health, and Safety
Guideline for Semiconductor Manufacturing Equipment
3.2 American Society of Mechanical Engineers
1
ASME SA479 — Specification for Stainless and Heat-
Resisting Steel Bars and Shapes for Use in Boilers and
Other Pressure Vessels (ASTM A 479/A 479-90)
(Boiler and Pressure Vessel Codes, 1989)
1 American Society of Mechanical Engineers, Three Park Avenue,
New York, NY 10016-5990, USA, Telephone: 800.843.2763
(U.S./Canada), 95.800.843.2763 (Mexico), 973.882.1167 (outside
North America), Website: www.asme.org
3.3 ASTM Standards
2
ASTM A 269 — Standard Specification for Seamless
and Welded Austenitic Stainless Steel Tubing for
General Service
ASTM A 479 — Standard Specification for Stainless
and Heat-Resisting Steel Bar and Shapes for Use in
Boilers and Other Pressure Vessels
ASTM A 632 — Standard Specification for Seamless
and Welded Austenitic Stainless Steel Tubing (Small-
Diameter) for General Service
ASTM D 4327 — Standard Test Method for Anions in
Water by Chemically Suppressed Ion Chromatography
ASTM F 1373 — Test Method for Determination of
Cycle Life of Automatic Valves for Gas Distribution
System Components
ASTM F 1394 — Standard for Determination of
Particle Contribution from Gas Distribution System
Valves
ASTM F 1397 — Test Method for Determination of
Moisture Contribution for Gas Distribution System
Components
ASTM F 1400 — Test Method for Determination of
Helium Leak Rate for Gas Distribution System
Components
ASTM F 1438 — Test Method for Determination of
Surface Roughness by Scanning Tunneling Microscopy
for Ultra Pure Water Distribution Components
3.4 ISO Standards
3
ISO 14644-1 — Cleanrooms and associated controlled
environments Part 1: Classification of air cleanliness
ISO 14644-2 — Cleanrooms and associated controlled
environments Part 2: Specifications for testing and
monitoring to prove continued compliance with ISO
14644-1
ISO 14644-4 — Cleanrooms and associated controlled
environments Part 4: Design, construction, and startup
2 American Society of Testing and Materials, 100 Barr Harbor Drive,
West Conshohoken, PA 19428-2959, USA. Telephone:
610.832.9585, Fax: 610.832.9555 Website: www.astm.org
3 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland, Telephone: 41.22.749.01.11, Fax: 41.22.733.34.30,
Website: http://www.iso.ch
SEMI E49-1104 © SEMI 1995, 2004 3
3.5 National Fire Protection Association
4
NFPA Fire Protection Guide to Hazardous Materials
NFPA 704 — Standard System for the Identification of
the Hazards of Materials for Emergency Response
3.6 Military Standard
5
MIL-STD-105 — Sampling Procedures and Tables for
Inspection by Attributes
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 Abbreviations and Acronyms
4.1.1 Ar — argon
4.1.2 C
v
— valve flow coefficient
4.1.3 CVD — chemical vapor deposition
4.1.4 DSF — dead space free
4.1.5 DIW — deionized; for this document, used as
deionized water
4.1.6 ESCA — electron spectroscopy for chemical
analysis (also known as XPS)
4.1.7 FTIR — Fourier transform infrared
4.1.8 HD — high density, i.e., polymer
4.1.9 HP — high purity
4.1.10 HPM — hazardous production material
4.1.11 IEEE — Institute of Electrical and Electronics
Engineers, Inc.
4.1.12 ID/OD — inside/outside (i.e., diameter)
4.1.13 IPA — isopropyl alcohol
4.1.14 MFC — mass flow controller
4.1.15 MTBA — mean time between assists
4.1.16 MTBF — mean time between failure
4.1.17 MTTR — mean time to repair
4.1.18 PFA — perfluoroalkoxy
4.1.19 PPB — parts per billion
4.1.20 PTFE — polytetrafluoroethylene
4 National Fire Protection Association, Batterymarch Park, Quincy,
MA 02269, Telephone: 617-770-3000, Fax: 617-770-0700, Website:
www.nfpa.org
5 Military Specifications, Commanding Officer, Naval Publications,
and Forms Center, Attention: MPFC 105, 5801 Tabor Avenue,
Philadelphia, PA 19120
4.1.21 PVDF — polyvinylidene fluoride
4.1.22 QA — quality assurance
4.1.23 QC — quality control
4.1.24
R
a — roughness average (e.g., surface)
4.1.25 SMTR — Smelter’s test report
4.1.26 SPC — statistical process control
4.1.27 TEOS — tetraethylorthosilicate
4.1.28 TOC — total organic carbons
4.1.29 UHP — ultrahigh purity
4.1.30 WC — water column, inches (cm) of water
4.1.31 XPS – X-ray photoelectron spectroscopy
4.2 Definitions
4.2.1 high purity (HP) — for industry standard systems
consisting of high grade materials, components, and
standard design/configuration, assembly method, and
performance capability.
4.2.2 ultrahigh purity (UHP) — for advanced or
special systems consisting of higher grade materials and
components, with advanced or integrated design and
configuration, the latest assembly methods, and
enhanced performance capabilities, especially related to
purge or rinse time and contamination levels.
4.2.3 subassembly — an assembled unit designed to be
incorporated with other units in a finished product.
5 Impact
5.1 The impact of improved tool quality and
standardization is:
5.1.1 Reduced tool purchase price for customized
piping distribution systems, by employing standard
designs and practices for HP and UHP systems.
5.1.2 Reduced tool installation cost and cycle time.
5.1.3 Reliability, Maintainability — Improved tool up-
time, repair time, and availability will positively affect
cost of ownership. Primary improvement is in system
MTBF and MTTR.
5.1.4 Sub-Assembly Contamination Control — Cost of
ownership will also be improved by lower long-term
contamination levels in the process chamber or bath,
resulting in wafer defect reductions and/or yield
improvement. Long-term flow accuracy for mass flow
controllers (MFC’s) will also be improved for better
wafer level uniformity.