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SEMI E54.1-1000 © SEMI 1996, 2000 42 A P PENDIX 2 ERROR RESPONSES NOT E: This a ppendix w as approve d as a n off icial part of SEMI E54.1 by full lette r ballot proce dure. The following is a listing of common service e…
SEMI E54.1-1000 © SEMI 1996, 200041
1292 MicroAmps
1293 NanoAmps
1294 PicoAmps
1295 FemtoAmps
1296 KiloAmps
1297 MegaAmps
1298 GigaAmps
1300 Ohms
1301 MilliOhms
1302 MicroOhms
1303 NanoOhms
1304 PicoOhms
1305 FemtoOhms
1306 KiloOhms
1307 MegaOhms
1308 GigaOhms
1310 Farads
1311 MilliFarads
1312 MicroFarads
1313 NanoFarads
1314 PicoFarads
1315 FemtoFarads
1320 Henries
1321 MilliHenries
1322 MicroHenries
1323 NanoHenries
1324 PicoHenries
1325 FemtoHenries
1326–1471 Reserved
1472–1535 Open
SEMI E54.1-1000 © SEMI 1996, 2000 42
APPENDIX 2
ERROR RESPONSES
NOTE: This appendix was approved as an official part of SEMI E54.1 by full letter ballot procedure.
The following is a listing of common service error
responses. The details of presentation of these
responses over the network (such as response codes) are
network-specific and, thus, are not part of this
document. Also, note that there may be additional
service error responses delineated in the appropriate
SDM specification or manufacturer specification.
A2-1 Error Responses
A2-1.1 Resource Unavailable — Resources needed for
the object to perform the requested service are
unavailable.
A2-1.2 Service Not Supported — The requested
service is not implemented or is not defined for this
Object Class/Instance.
A2-1.3 Invalid Attribute Value — Invalid attribute data
detected.
A2-1.4 Already in Requested Mode/State — The object
is already in the mode/state being requested by the
service.
A2-1.5 Object State Conflict — The object cannot
perform the requested service in its current mode/state.
A2-1.6 Attribute Not Settable — A request to modify a
non-modifiable attribute was received.
A2-1.7 Device State Conflict — The device’s current
mode/state prohibits the execution of the requested
service.
A2-1.8 Service Parameter Data Not Complete — Not
enough data supplied with the service request.
A2-1.9 Attribute Not Supported — The attribute
specified in the request is not supported.
A2-1.10 Too Much Data for Service Parameters —
The service supplied more data than was expected.
A2-1.11 Object Does Not Exist — The object specified
does not exist in the device.
A2-1.12 Vendor-Specific Error — Vendor-specific
error.
A2-1.13 Invalid Service Parameter — A parameter
associated with the request was invalid.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E54.2-0698 © SEMI 1998, 2004 1
SEMI E54.2-0698 (Reapproved 0704)
GUIDE FOR WRITING SENSOR/ACTUATOR NETWORK (SAN)
STANDARD BALLOTS
This guide was technically reapproved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on March 14, 2004. Initially available at www.semi.org
May 2004; to be published July 2004. Originally published June 1998.
1 Purpose
1.1 This guide recommends the method, form, and
content for adding specific device models and
associated Sensor Actuator Network Communications
Standard (SANCS) extensions to the SEMI Sensor
Actuator Network (SAN) standard. This guide
facilitates consistency of these ballots, leading to better
consistency and clarity of the resulting specifications
and to easier development of SAN standard-conformant
devices that achieve a high level of interoperability.
2 Scope
2.1 This guide provides written templates for ballots
that will add either a specific device model (SDM), an
SANCS ancillary standard, or SANCS extensions to
support an SDM to the SEMI SAN standards. The
guide provides directions for using the templates.
2.2 Physical devices will not be compliant with this
guide; they will be compliant to standards which are
spawned from the templates specified herein.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and
Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network
Common Device Model
SEMI E54.3 — Standard for Sensor/Actuator Network
Specific Device Model for Mass Flow Device
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 Abbreviations and Acronyms
4.1.1 A — Actuator (a CDM class definition)
4.1.2 AE — Active Element (a CDM class definition)
4.1.3 C — Controller (a CDM class definition)
4.1.4 CDM — (SEMI) Common Device Model
4.1.5 DM — Device Manager (a CDM class definition)
4.1.6 ISO-OSI — International Organization for
Standardization - Open Systems Interconnect (model)
4.1.7 NCS — Network Communications Standard
4.1.8 OMT — Object Modeling Technique
4.1.9 S — Sensor (A CDM object)
4.1.10 SAC — Sensor/Actuator/Controller (a CDM
class definition)
4.1.11 SAN — Sensor/Actuator Network (or Sensor
Bus)
4.1.12 SANCS — Sensor/Actuator Network
Communications Standard, frequently abbreviated to
NCS
4.1.13 SDM — (SEMI) Specific Device Model
4.2 Definitions
4.2.1 connection oriented — a situation between
communicating objects wherein they are connected in a
mode analogous to a two-way phone conversation.
4.2.2 specific device model (SDM) — a model used to
specify each type of device, such as a Mass Flow
Controller or Thermocouple.
5 Background
5.1 The SEMI sensor bus (SAN) communications
model consists of three components: a CDM, an SDM,
and an SANCS (NCS). The following subsections
provide a brief description of the specifications which
define these components: