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SEMI E34-95 © SEM I 1995 2 • Attach a copy of the form to the exterior of the shi pping con ta iner. • Enclose another copy inside the package attached to the protective plastic bag co ntaining the mass flo w device duri…

SEMI E34-95 © SEMI 19951

SEMI E34-95

GUIDELINE FOR MASS FLOW DEVICE RETURN

NOTICE: This safety guideline does not purport to

address all of the safety issues associated with its use. It

is the responsibility of the users of this guideline to

establish appropriate safety and health practices and

determine the applicability of regulatory limitations

prior to use.

1 Purpose

Mass flow devices (mass flow controllers, mass flow

meters and flow control valves) are used as an integral

part of the chemical delivery system in semiconductor

processing equipment. Many of the chemicals used in

semiconductor processes can be hazardous to

equipment and personnel. Once exposed to these

chemicals, the contaminated mass flow devices can

present a hazard to repair personnel and equipment if

not handled properly.

Implementing the procedures outlined in this guideline

provide a mechanism to reduce the risk associated with

shipping and/or receiving any potentially hazardous

mass flow device used to monitor or control gases or

liquids.

2 Scope

This guideline is intended to:

Recommend and encourage the purging of devices used

with hazardous materials prior to removal to reduce the

risk of handling them.

Alert the recipient of possibly hazardous mass flow

devices to the nature of the hazard.

Establish mechanism for properly identifying and

documenting possibly hazardous mass flow devices by

using an orange tag and a health and safety disclosure

form.

3 Referenced Documents

49 CFR

— Title 49 of the Code of Federal

Regulations (CFR)

NFPA 704

— Standard System for the Identification

of Fire Hazards of Materials

1 United States Government Printing Office, Washington, D.C. 20402

2 National Fire Protection Association, Batterymarch Park, Quincy,

MA 02269

4 Terminology

4.1 hazardous materials — Those chemicals or

substances that are physical hazards or health hazards

as defined and classified in NFPA 704 whether the

materials are in use or in waste conditions.

4.2 mass flow controller (mfc) — A self-contained

device, consisting of a mass flow transducer, control

valve, and control- and signal-processing electronics,

commonly used in the semiconductor industry to

measure and regulate the mass flow of gas.

4.3 mass flow meter (mfm) — A self-contained device,

consisting of a mass flow transducer and signal-

processing electronics, commonly used in the

semiconductor industry to measure the mass flow of

gas.

4.4 material safety data sheet (msd s) — Written or

printed material concerning a hazardous material which

is prepared in accordance with the provisions of 29

CFR 1910.1200.

4.5 protective container — A sealable plastic bag or

other container which will keep hazardous material

from the mass flow device from contaminating the

outer package. The container should be transparent, if

possible.

4.6 purge — To dilute potentially harmful material in

the mass flow device by flowing an inert gas through

the device. Purging a chemical delivery line containing

a mass flow device with an inert substance is intended

to dilute hazardous materials and reduce the level of the

hazard. To be effective, the inert substance must be able

to reach all points within the chemical delivery system

in sufficient quantity to dilute the hazardous material to

safe levels. The nature of the hazard and the physical

configuration of the chemical delivery system must be

considered when developing a purge procedure.

4.7 safe — Free of conditions that can cause

occupational illness, injury, or death to personnel or

damage to or loss of equipment or property or the

environment.

5 Procedure

5.1 Disclosure Form

• Complete the disclosure form for mass flow device

return.

• Send the completed form via Fax or other suitable

method to the recipient of the mass flow device.

SEMI E34-95 © SEMI 1995 2

• Attach a copy of the form to the exterior of the

shipping container.

• Enclose another copy inside the package attached

to the protective plastic bag containing the mass

flow device during shipment.

• Retain the original form for your records.

5.2 Purging Prior to Removal — Thoroughly purge

the mass flow device following the applicable purge

procedure. Purge procedures are usually unique to the

equipment and installation. Obtain purging procedures

from your facilities manager, corporate safety

department, and/or the equipment manufacturer. If a

formal purge procedure is available, note on the

disclosure form the purge procedure document number

and source.

5.3 Equipment Removal — WARNING: Do not

remove the mass flow device until it has been properly

purged.

5.3.1 The person removing the mass flow device

should fill out an orange-colored device tag indicating

the process gas(es) or chemicals used, possible exterior

contamination and the purge procedure document

number prior to removal of the device. A sample orange

device tag is shown in Figure 1.

Figure 1

Sample Orange Device Tag

5.3.2 Carefully remove the mass flow device from the

installation or system.

5.3.3 The inlet and outlet ports should be sealed to

prevent any leakage into or out of the mass flow device.

5.3.4 The person removing the mass flow device

should attach the orange tag to the device.

5.4 Equipment Packaging — Package all mass flow

devices for shipment per government regulations

including the following:

5.4.1 Seal the device in a protective container to

prevent the contamination of the shipping package. If

the orange tag is not visible through the container, an

additional tag should be attached to the outside of the

container.

5.4.2 Place the device in a shipping container with

adequate packing to avoid damage to the device and the

protective container during shipment.

5.5 Shipping — Ship the device so that it conforms to

all applicable regulations of the countries of origin,

trans-shipment, and destination governing the shipment

of materials.

HEALTH AND SAFETY DISCLOSURE FORM FOR MASS FLOW DEVICE RETURN

1. Mass Flow Device Information

1.1 Manufacturer ____________________________________

1.2 Model Number ____________________________________

1.3 Serial Number ____________________________________

1.4 Nameplate Gas __________ Nameplate Range ___________

1.5 Details of all substances to which the equipment has been exposed, Interior and Exterior:

Chemical name(s) and attach applicable MSDS(s)

Interior Exterior

a) _________________________________________________ o o

b) _________________________________________________ o o

c) _________________________________________________ o o

d) _________________________________________________ o o

1.6 Was this device purged with an inert gas? o Yes o No

1.7 Any further safety information that you consider to be relevant:

__________________________________________________

1.8 Document number and source of purge procedure used.

__________________________________________________

1.9 Person to contact regarding the above information:

Name:_______________________________________________

Company:____________________________________________

Title:________________________________________________

Phone Number: ( _______)__(______)__(__________)_(_____)

Country Code Area Code Number Extension

Address:_____________________________________________

__________________________________________________

Signature of Sender:____________________________________

1.10 Carrier to be used

__________________________________________________

Expected Delivery date

__________________________________________________

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

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