semi合集-English.pdf - 第1967页

SEMI E54.4-0704 © SEMI 1997, 2004 2 Figure 1 Sensor/Actuator Network Related Documents 2.5 Document Str u cture — The DeviceNet network communicat ion standard com plies with the SEMI SAN NCS template document structure;…

SEMI E54.4-0704 © SEMI 1997, 2004 1

SEMI E54.4-0704

STANDARD FOR SENSOR/ACTUATOR NETWORK

COMMUNICATIONS FOR DEVICENET

This standard was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current edition approved by the

North AmericanRegional Standards Committee on April 22, 2004. Initially available at www.semi.org June

2004; to be published July 2004. Originally published September 1997.

1 Purpose

1.1 This standard defines a communication

specification based on the DeviceNet protocol to enable

communications between intelligent devices on a

sensor/actuator network (SAN) that operate according

to SEMI- specified device models (common and device

specific) in a semiconductor manufacturing tool.

1.2 Background and Motivation — DeviceNet provides

for networking between simple industrial devices (e.g.,

sensors and actuators) and higher level devices such as

controllers. DeviceNet provides:

• A solution to low-level device networking.

• Access to intelligence present in low-level devices.

• Master/Slave and Peer-to-Peer capabilities.

1.2.1 DeviceNet is based on the Controller Area

Network (CAN) technology. CAN defines a Media

Access Control (MAC) methodology and physical

signaling characteristics. DeviceNet wraps a

communication model and protocol as well as a

complete Physical Layer definition around CAN to

provide a complete network definition.

1.3 This document enables communications between

intelligent devices on a SEMI-compliant SAN by

providing a presentation mapping of common and

specific device network visible structure and behavior

to a DeviceNet network.

2 Scope

2.1 This document specifies the protocol and services

that compliant intelligent devices must support to

interchange information over this semiconductor

equipment sensor/actuator network.

2.2 This document specifies the utilization of the

DeviceNet protocol to present externally visible device

structure and behavior, specified in the Common

Device Model (CDM) and appropriate Specific Device

Models (SDM' s), on a DeviceNet network.

2.3 This document is used in conjunction with a SEMI

standard SAN Common Device Model specification

and one or more SEMI standard-specific device model

specifications (e.g., for a mass flow controller).

Together, they describe the externally visible data

structure and behavior of devices using the DeviceNet

networking capability in a SEMI-compliant SAN

system.

2.4 This standard, together with a sensor/actuator

network interoperability guideline, the sensor/actuator

network common device model, one or more

sensor/actuator network specific device model

documents, and the DeviceNet specifications, form a

complete interoperability standard. The general

sensor/actuator network document architecture is

shown in the Sensor/Actuator Network Common

Device Model document in Figure 1.

SEMI E54.4-0704 © SEMI 1997, 2004 2

Figure 1

Sensor/Actuator Network Related Documents

2.5 Document Structure — The DeviceNet network

communication standard complies with the SEMI SAN

NCS template document structure; this structure is

shown in Figure 2. The standard document is composed

of two main parts. The first part (Sections 1 through 8)

specifies the SAN enabling protocol as well as the

presentation (i.e., mapping) of CDM object structure

and behavior onto the network (referred to as the

“CDM mapping”). The second part (Section 9)

specifies the presentation (i.e., mapping) of SDM object

structure and behavior onto the network for each SEMI-

specified SDM (referred to as the “SDM mapping”).

CDM

Mapping

(DeviceNet NCS)

SDM

Mappings

(M F C , P article C ounter,

Resig. Gas Anal., etc.)

{

This

Document

•

(Other NCS

Standards)

Figure 2

DeviceNet NCS Document Structure

2.6 Adding SDM Mappings — SDM mappings added

to part two of this document are considered document

additions and are balloted as such. An SDM mapping

may only be balloted for addition to this document if

the corresponding SEMI SDM has been standardized or

is in the process of being balloted for standardization.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This document specifies a semiconductor

equipment SAN based solely on DeviceNet and is a

companion document to the DeviceNet specification;

thus, a complete specification of this standard

necessarily includes the DeviceNet specifications.

There are other semiconductor equipment SAN

communications options. The specifications for these

options are not included here.

3.2 This standard specifies enhancements that provide

additional capabilities over and above those currently

required by DeviceNet. In order to avoid document

consistency problems, information in the DeviceNet

specification that relates to this standard is not repeated

in this document. This document is limited to

describing enhancements or limitations to the

DeviceNet specification that are imposed by this

standard.

3.3 A complete specification of the conformance

testing procedure shall include the DeviceNet protocol

conformance testing specification. Conformance testing

shall also include enhancements and limitations to the

DeviceNet specification required by this standard.

SEMI E54.4-0704 © SEMI 1997, 2004 3

4 Referenced Standards

4.1 SEMI Standards

SEMI E30 — Generic Model for Communications and

Control of SEMI Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services

SEMI E54.1 — Standard for Sensor/Actuator Network

Common Device Model

4.2 ISO Standards

ISO 7498 — Basic Reference Model for Open Systems

Interconnection

ISO 11898 — Road Vehicles — Interchange of Digital

Information — Controller Area Network (CAN) for

High-Speed Communications

4.3 Other Documents

DeviceNet Specification — ODVA

Controller Area Network Specification — Version 2, R.

Bosch GmbH, + Postfach 50 D-7000, Stuttgart 1,

Germany, 1991

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

Terminology that is common to all of the documents in

this SAN standard may also be defined in the Sensor

Actuator Network Standard. Terminology may be

reproduced here which is defined in other SEMI

documents.

5.1 Abbreviations & Acronyms

5.1.1 CAN — Controller area network

5.1.2 CDM — Common device model

5.1.3 DM — Device manager (object)

5.1.4 DN — DeviceNet

5.1.5 NCS — Network communication standard

5.1.6 OSI — Open systems interconnect

5.1.7 OSS — Object services standard

5.1.8 SAC — Sensor, actuator, controller (object)

5.1.9 SAN — Sensor/actuator network

1 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30,

Website: www.iso.ch

2 Open DeviceNet Vendor Association, www.odva.org

5.1.10 SDM — Specific device model

5.2 Device Component Definitions — As this standard

defines the presentation or mapping of CDM data

structure and behavior over a network, it makes use of

many of the terms in the CDM document. Table 1

provides a mapping of fundamental terminology of the

CDM document into this document and the DeviceNet

specification. Note that Column 2 contains an equal

sign “=” if the definition is used exactly as specified in

the CDM specification.

Table 1 Mapping of CDM to NCS Terminology

CDM Term

NCS Equivalent

DeviceNet

Equivalent

Device = =

Device Model = =

Object =, Class =, Class

Instance = =

Attribute = =

Behavior = =

Service = =

State Diagram = =

Byte = =

Nibble = =

Character String = =

5.3 DeviceNet Specific Definitions

5.3.1 class — a set of objects that all represent the

same kind of system component. A class is a

generalization of an object. All objects in a class are

identical in form and behavior, but may contain

different attribute values.

5.3.2 controller area network (CAN) — a protocol

developed by the Bosch corporation for automotive in-

vehicle networking. The CAN specification specifies

OSI reference model layers 1 and 2, specifically the

physical signaling and media access/data link protocols.

5.3.3 device profile — a DeviceNet specification for a

device that contains an object model for the device

type, the I/O data format for the device type, and the

configuration data and the public interface(s) to that

data.

5.3.4 explicit message connections — connections over

a DeviceNet network that provide generic, multi-

purpose communication paths between two devices.

These connections often are referred to as just

messaging connections. Explicit messages provide the

typical request/response - oriented network communi-

cations.