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SEMI E58-0703 © SEMI 1997, 2003 1 SEMI E58-0703 AUTOMATED RELIABILITY, AVAI L ABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVIC ES This standard was technically approved by the Globa l Informa…

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SEMI E54.##-0705 © SEMI 2005 18
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SEMI E58-0703 © SEMI 1997, 2003 1
SEMI E58-0703
AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY
STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on October 19, 2000. Initially available at www.semi.org
January 2001; to be published March 2001. Originally published June 1997.
NOTICE: The designation of SEMI E58 was updated during the 0703 publishing cycle to reflect the reapproval of
SEMI E58.1.
CONTENTS
1 Purpose
1.2 Background and Motivations
2 Scope
3 Referenced Documents
4 Terminology
4.1 Acronyms
4.2 General Terms
4.3 Data Types
5 Basic Requirements
6 Conventions
6.1 State Model Methodology
6.2 Object Attribute Representation
6.3 Service Message Representation
6.3.1 Service Resource Definition
6.3.2 Service Parameter Dictionary
6.3.3 Service Message Definition
7 Overview
8 State Models
8.2 SEMI E10 Equipment States
8.3 ARAMS State Model Definition
8.3.1 ARAMS State Model Diagram
8.3.2 Descriptions of ARAMS States
8.3.2.1 TOTAL TIME
8.3.2.2 MANUFACTURING
8.3.2.3 PRODUCTIVE
8.3.2.4 STANDBY
8.3.2.5 ENGINEERING
8.3.2.6 UNSCHEDULED DOWNTIME
8.3.2.7 SCHEDULED DOWNTIME
8.3.2.8 NON-SCHEDULDED TIME
8.3.3 ARAMS Substates
8.3.4 State Transitions
8.4 General Equipment Operations Model
8.4.2 State Definitions
8.4.2.1 POWER-OFF
8.4.2.2 POWER-ON
8.4.2.3 INITIALIZING
8.4.2.4 READY
8.4.2.5 IDLE
8.4.2.6 BUSY
8.4.3 General Equipment Operations Model
Table of Transitions
8.5 State Model Relationships
8.5.2 IDLE and BUSY
8.5.3 Non-Manufacturing States
9 ARAMS Substate Codes
9.2 Reserved Codes
9.3 Additional Codes
9.4 Valid ARAMS Substate Code
9.5 Manufacturing Code
10 ARAMS Tables
10.2 Definition of Tables
10.2.1 Table Types and Identifiers
10.2.2 Table Row Definition
10.2.3 Table Attributes
10.2.4 Additional Requirements
10.3 ARAMS Substate Table
SEMI E58-0703 © SEMI 1997, 2003
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10.4 ARAMS Symptom Table
11 ARAMS Data
11.2 Status Information
11.2.3 ARAMSInfo
11.2.4 ARAMSState
11.2.5 ARAMSText
11.2.6 Clock
11.2.7 CycleCtr
11.2.8 DowntimeAlarm
11.2.9 DowntimeAlarmText
11.2.10 DowntimeData
11.2.11 LastPowerdown
11.2.12 PowerdownTime
11.2.13 PrdState
11.2.14 PrevARAMSState
11.2.15 SymptomID
11.2.16 SymptomText
11.3 Constant Data
11.3.1 EqpModel
11.3.2 EqpSerialNum
11.4 User-Configurable Data
11.4.1 EngInterrupt (optional)
11.4.2 EngRecovery (optional)
11.4.3 EqpName (required)
11.4.4 PowerupState (optional)
11.4.5 PrdRecovery (optional)
11.4.6 SbyRecovery (optional)
11.4.7 SubstateSelect (optional)
11.5 Accumulators
11.5.2 ARAMSAccumReset
11.5.3 ARAMSTimestamp
11.5.4 EngTime
11.5.5 InterruptionPrd
11.5.6 InterruptionTotal
11.5.7 NSTime
11.5.8 PrdTime
11.5.9 SbyTime
11.5.10 SDTime
11.5.11 UDTime
12 Events and Pre-Defined Event Reports
13 Object Services Compliance
13.1 Equipment Object
13.2 Table Objects
14 Human Interface Requirements
14.1 Data Access
14.2 Selection of an ARAMS State/Substate
14.3 User-Defined ARAMS Symptom Tables
14.4 Table Access
14.5 Color Codes
15 Services
15.2 Services Parameter Dictionary
15.3 TableSend
15.4 TableRequest
15.5 ARAMSStateChange
15.6 ResetAccumulators
16 ARAMS Behavioral Requirements
16.1 ARAMS State Transitions
16.2 Powerup Entry
16.3 Powerup and Powerdown States
16.3.2 PowerupState
16.4 User-Initiated State Change Requests
16.5 Production and Standby Substates
16.6 Equipment-Selected Substates
16.7 Equipment-Detected Exceptions
16.7.4 Fault Detection in ENGINEERING
16.8 Equipment-Initiated Recovery
16.8.2 Automatic Recovery
17 Requirements for Compliance
17.1 Fundamental Requirements
17.1.1 Event Notification
17.1.2 Clock Services
17.1.3 Read-Only Data Access
17.1.4 User-Configurable Data Access
17.1.5 Alarm/Exception Management