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SEMI S2-0703a E © SEMI 1991, 2004 95 26.1.1.1 If pulsed, the pulse repetition rate, pulse duration and desc ription of the pulse wa veform should be identified in the documentation provid ed to the user. 26.1.1.2 For Cla…

SEMI S2-0703a

DELAYED REVISIONS SECTION 1 (EFFECTIVE JULY 1, 2006)

LASER MODIFICATIONS TO SEMI S2

NOTICE: This Delayed Revisions Section contains material that has been balloted and approved by the

SEMI Environmental Health and Safety Committee, but is not immediately effective. The provisions of this

material are not an authoritative part of the document until their effective date. The main body of SEMI S2-

0703 remains the authoritative version. Some or all of the provisions of revisions not yet in effect may

optionally be applied prior to the effective date, providing they do not conflict with portions of the

authoritative version other than those that are to be revised or replaced as part of the deferred revision, and

are labeled accordingly.

NOTICE: Unless otherwise noted, all material to be added shall be underlined

, and all material to be deleted shall

be struck through

D1-1 Revisions to Section 4 (Referenced Standards) — OPTIONAL Before Effective Date

D1-1.1 Addition of the following in alphanumeric order to Section 4.5 (IEC Standards):

IEC 60825-1 — Safety of Laser Products, Part 1: Equipment Classification, Requirements, and User’s Guide

D1-1.2 Addition of the following in alphanumeric order to Section 4:

4.# US Code of Federal Regulations

21CFR Parts 1000-1050 — Food and Drug Administration / Center for Devices and Radiological Health

(FDA/CDRH), Performance Standards for Electronic Products, Title 21 Code of Federal Regulations, Parts 1000-

1050

D1-2 Revisions to Section 5 (Terminology) — OPTIONAL Before Effective Date

D1-2.1 Addition of the following in alphabetical order to Section 5.1 (Abbreviations & Acronyms):

5.1.# MPE — maximum permissible exposure

5.1.# NOHD — nominal ocular hazard distance

D1-2.2 Addition of the following in alphabetical order to Section 5.2 (Definitions):

5.2.# maximum permissible exposure (MPE) – Level of laser radiation to which, under normal circumstances,

persons may be exposed without suffering adverse effects.

5.2.# nominal ocular hazard distance (NOHD) – Distance at which the beam irradiance or radiant exposure equals

the appropriate corneal maximum permissible exposure (MPE).

D1-3 Revisions to Section 26 (Lasers) — OPTIONAL Before Effective Date

D1-3.1 Revision of the existing Section 26 (Lasers) as shown below:

26 Lasers

26.1 Equipment containing lasers

should be properly identified with a laser product classification. This

classification should be based on the laser radiation level energy accessible during operation, per the applicable

standard or regulation. The laser product classification, applicable standard, and the certification file number (where

appropriate) should be documented on a Laser Data Sheet (format in Part 1 of Appendix 7) that is provided to the

user.

NOTE122: A Class 1 label may be required in some jurisdictions, but is not currently required in the United States.

26.1.1 The laser energy (or power), wavelength, and temporal mode (continuous wave or pulsed) should be

identified in the documentation to the user.

25 United States Food and Drug Administration/ Center for Devices and Radiological Health (FDA/CDRH). Available from FDA/CDRH

Website: http://www.accessdata.fda.gov/scripts/cdrh/cfdocs/cfcfr/cfrsearch.cfm

SEMI S2-0703a

26.1.1.1 If pulsed, the pulse repetition rate, pulse duration and description of the pulse waveform should be

identified in the documentation provided to the user.

26.1.1.2 For Class 3b or 4 embedded laser systems,

the above information and the physical location of the laser

sources within the product should be identified in the documentation provided to the user and in the maintenance

manual.

26.1.1 As an alternative to completing a Laser Data Sheet, the equipment manufacturer may provide the

information that is specified on the Laser Data Sheet in another format. The information should be organized so the

user can easily read and understand it.

26.1.2 Equipment should not exceed the laser product classification of Class 2; however, individual lasers may

exceed this classification prior to integration into the final equipment assembly.

26.1.3 Equipment and lasers should be labeled according to the appropriate standards (e.g., IEC 60825-1, 21CFR

1040.10).

NOTE 1: A Class 1 product label may be is required in some jurisdictions. but is not currently required in the United States.

NOTE 2: The laser product classification for some equipment is

will be Class 1 or 2, even though an embedded laser is of higher

hazard classification.

26.1.4 Equipment suppliers should provide maintenance or service task information in the documents provided to

users for equipment that requires access to laser radiation in excess of the maximum permissible exposure (MPE).

26.1.4.1 The information for these tasks should be documented on a Laser Data Sheet (See Appendix 7) in the

documents provided to users and should include the accessible laser and beam parameters (A7-2), laser control

measures (A7-3) and personal protective equipment (A7-4) for each laser or task requiring this access.

EXCEPTION: In the case of proprietary beam parameters, an acceptable alternative is to provide the nominal

ocular hazard distance (NOHD) results (according to IEC 60825 or its equivalent) for each task requiring access

above the MPE.

EXCEPTION: If a laser system is a stand-alone laser product delivered as a component or spare for laser

equipment, the laser system supplier’s responsibility for Laser Data Sheet information is limited to that which

applies specifically to the stand-alone laser product and not the integrated laser equipment.

26.1.5 The physical location of the embedded laser sources and access points within the laser product should be

identified in the documents provided to users.

26.2 Equipment, including beam diagnostic or alignment tools, should be designed to prevent injury from all lasers

during normal operation, and should minimize the risk of injury during maintenance or service. Potential exposures

should be controlled in the following order of preference:

26.2.1 Engineering controls (e.g., enclosures, shielding, filters, use of fiber optics to transmit energy, interlocks).

26.2.2 Temporary enclosures or control measures for maintenance, service, and non-routine tasks.

26.2.3 Administrative controls (e.g., written warnings, standard operating procedures, labeling).

26.2.4 Personnel protective equipment.

NOTE 3: Temporary enclosures and personal protective equipment are considered to be administrative controls, because they

require human action to implement.

NOTE 4: Certain classes of laser products are regulated around the world. Regulations and licensing requirements may cover

activities such as importing, exporting, distributing, demonstrating, installing, servicing, and using these laser products.

26.3 The equipment supplier should provide the following in the operation and maintenance manuals:

 A description of laser related hazards present during operation, maintenance, or service, and methods to

minimize the hazard;

 Justification for any procedures that require a laser controlled area and the dimensions of this hazard zone;

 Administrative controls used in maintenance and service activities; and

 A description of the necessary personal protective equipment.

SEMI S2-0703a

26.4 The following detailed information should be available to an evaluator:

 Justification for when engineering controls are not feasible to limit exposure during operation or maintenance

tasks, and how administrative controls provide equivalent protection (See Section 26.2); and

 Documentation showing compliance with an appropriate international laser product safety or industry standard,

or the national standard of the country of use.

D1-4 Addition of Appendix 7 (Laser Data Sheet – SEMI S2) — OPTIONAL Before Effective Date

D1-4 Addition of the following as Appendix 7 (Laser Data Sheet – SEMI S2):

APPENDIX 7

Laser Data Sheet – SEMI S2

A7-1 Equipment Information - (All Laser Product Classes)

Laser Equipment Manufacturer ____________________________________________________

Equipment Model # ________________________

Date Laser Data Sheet Completed ________________

Laser Product Classification ____________ (e.g., 1, 1M, 2, 2M, 3A, 3R, 3B, 4)

Classification Standard(s) ____________ (e.g., IEC, FDA/CDRH, JIS)

Certification File Identification Number ______________(e.g., CDRH accession number, or if CDRH accession

number has been applied for, but not yet received, a statement of ‘pending’ along with the submittal date may be

used instead. If self declaring under IEC 60825-1 or if certification is not required, e.g., if class 1 laser product is

incorporated without changes, then ‘N/A’ may be used)

A7-2 Laser Information (Greater than Class 2 & embedded Class 3R (3A), 3B & 4)

Is access to laser radiation above the maximum permissible exposure (MPE) level YES NO

required during maintenance or service tasks? ____ _____

If NO, then the information in Parts A7-2, A7-3 and A7-4 need not be provided.

If YES, complete the information in Parts A7-2, A7-3 and A7-4 for each task and laser that requires access.

If there are multiple lasers contained within the laser equipment, provide the following for each task/laser

combination that meets the above criteria.

Laser Parameters Laser ___1___, ___2___, __etc.__

Laser Manufacturer _______, _______, _______

Laser Model No. _______, _______, _______

A7-2.1 Laser Medium Type (HeNe, Nd:YAG, Argon, KrF, Diode, etc.) _______, _______, _______

A7-2.2 Wavelength(s) in nanometers (nm) _______, _______, _______

A7-2.3 Laser Hazard Classification (individual laser) _______, _______, _______

NOTE 3: If a laser is used in both continuous wave and pulsed modes, complete both A7-2.4 and A7-2.5.

A7-2.4 Continuous Wave Lasers

A. Power in Watts (W) _______, _______, _______

B. Irradiance in Watts/square centimeter (W/cm

at aperture) _______, _______, _______

A7-2.5 Pulsed Laser Characteristics

A. Pulse Duration in Seconds (s) _______, _______, _______

B. Energy per Pulse in Joules (J) _______, _______, _______