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SEMI PR8-0703 © SEMI 2003 15 Table 17 Equipment ID XML definition Tag Name Description XML Datatype Behavior EquipmentID Complex element that contains all the equipm ent identifier fields Complex Required Supplier Suppli…

SEMI PR8-0703 © SEMI 2003 14

7.6.2.7.3 XML Definition of Data Management Responses — Responses to data management requests are

embedded in the HTTP response to the data management request. The response will contain only the operation type

element as defined below.

Table 16 XML Data Management Response Definition

Tag Name Description XML Datatype Behavior

IsEda-

Enabled

GetDefined-

PlanIds

GetActive-

PlanIds

ActivatePlan Deactivate-

Plan

See columns 4-8

in this row for

tag names,

shown in quotes

Operation Name

Element

Complex

Required-

“IsEda-

Enabled

Response”

Required-

“GetDefined

PlanIds

Response”

Required-

“GetActive-

PlanIds

Response”

Required-

“Activate-

Plan

Response”

Required-

“Deactivate-

Plan

Response”

DefinedPlanIds Space delimited array

of defined data

collection plan names

List N/A Required N/A N/A N/A

ActivePlanIds Space delimited array

of Active data

collection plan names

List N/A N/A Required N/A N/A

IsEnabled Whether or not the

EDA port is enabled

Boolean Required N/A N/A N/A N/A

IsActivated Whether or not the

equipment activated

the requested plan

Boolean N/A N/A N/A Required N/A

Deactivated-

PlanIds

Data collection plan

ids de-activated by

this operation

List N/A N/A N/A N/A Required

Error Include if data

management request

could not be executed

Complex Optional Optional Optional Optional Optional

ErrorTime Time of the error DateTime Optional Optional Optional Optional Optional

ErrorType Category of error String Optional Optional Optional Optional Optional

ErrorCode Unique identifier of

error

String Optional Optional Optional Optional Optional

ErrorDesc Text description of

error

String Optional Optional Optional Optional Optional

7.7 XML Message Formats

7.7.1 This section describes the XML fragments that

make up the body of the SOAP messages that will be

sent by equipment to EDA clients through the EDA

port. The section describes the general construction of

the SOAP body and the structure of the elements that

make up the SOAP body. Each EDA client must

implement all of the messages defined in this section.

7.7.2 General Construction — Each SOAP body will

have the following structure: The root element is the

Operation Name element, and is named after the

operation being performed. The first element inside the

root element will be the Equipment ID element. The

Equipment ID element is followed by one or more

Operation Name elements. Each Operation Name

element in a data acquisition message may contain 0 or

more Param elements.

7.7.3 Equipment ID

7.7.3.1 Each message has one and only one

EquipmentID element. The EquipmentID element

identifies the equipment for which all data in the

message apply.

SEMI PR8-0703 © SEMI 2003 15

Table 17 Equipment ID XML definition

Tag Name Description XML Datatype Behavior

EquipmentID Complex element that contains all the equipment

identifier fields

Complex Required

Supplier Supplier Name String Required

Model Equipment Model String Required

ImmutableID Serial number or Immutable ID of the specific tool String Required

7.7.3.2 General Structure Example

<Supplier>Some Supplier</Supplier>

</EquipmentID>

<Event>

……..

…….

</Event>

……..

</ExEvent>

</EdaData>

7.7.4 Param Element

7.7.4.1 There may be zero or more Param elements

inside any Operation Name element. Param elements

can describe measured values or descriptive attributes.

Any tag names not explicitly defined in this proposed

standard must be communicated through param

elements. All param elements that may be

communicated through the EDA interface must be

defined in the Metadata files.

7.7.4.2 All param elements must contain the Name and

Value elements, at a minimum. Other, optional

elements are listed in the table below. The equipment

supplier may define additional optional elements. The

elements to be included in the communication of

specific Names must be defined in the Metadata files.

The units and the data type of specific Names must be

defined in the Metadata files.

Table 18 Param Element Definition

Tag Name Description XML Datatype Behavior

Param Complex element containing all fields

pertaining to a single parameter.

Complex Required

Name The name of the parameter. String Required

Value The value of the parameter. See below for

more definition.

Complex Required

IntVal An integer value Integer Optional;

maxOccurrances=unbounded

IntArrayVal An array of integers List; itemType=integer Optional;

maxOccurrances=unbounded

FloatVal A float value Float Optional;

maxOccurrances=unbounded

FloatArrayVal An array of Float values List; itermType=Float Optional;

maxOccurrances=unbounded

DoubleVal A double value Double Optional;

maxOccurrances=unbounded

DoubleArrayVal An array of double values List; itemType=double Optional;

maxOccurrances=unbounded

StringVal A string String Optional;

maxOccurrances=unbounded

StringArrayVal An array of strings List: itemType=string Optional;

maxOccurrances=unbounded

DateTimeVal A dateTime DateTime Optional;

maxOccurrances=unbounded

Tag Name Description XML Datatype Behavior

DateTimeArrayVal An array of dateTimes List: itermType=dateTime Optional;

maxOccurrances=unbounded

Base64BinaryVal A base64 values Base64Binary Optional;

maxOccurrances=unbounded

AnyURIVal A URI AnyURI Optional;

maxOccurrances=unbounded

BoolVal A Boolean value Boolean Optional;

maxOccurrances=unbounded

BoolArrayVal An array of Boolean values List: itemType=boolean Optional;

maxOccurrances=unbounded

StructVal Container for groups of simple types. May

contain an unlimited number of the simple

types defined for value.

Complex Optional;

maxOccurrances=unbounded

MeasTime Time of the measurement, if applicable. dateTime Optional

Locator Unique identifier for the tool entity, or

namable, to which the param applies.

String Required

Extension Element containing any additional fields

provided by the supplier.

Any Optional

7.7.4.3 Value Elements — The elements within the Value element may contain a single scalar value, a space

delimited array, or a StructVal element. StructVal elements may not be nested.

Example 1: simple parametric data point named pressure

<Param>

<Name>Pressure</Name>

<Value>

</Value>

<MeasTime>1999-05-31T13:20:00.087-05:00</MeasTime

</Param>

Example 2: Collection event ID

<Param>

<Value>

</StructVal>

</Value>

</Param>

7.7.5 DateTime XML Datatype — Whenever an element is given the dateTime XML DataType in this specification

it shall conform to the dateTime built-in data type defined in XML Schema Part 2-Datatypes. The dateTime

representation shall include the difference from UTC and the fractional seconds precision shall be at least .01

seconds (i.e., ss.ss). Equipment shall pad the fractional seconds field with zeros beyond its measurable precision.

7.7.6 Eda Client Operations — This specification defines three different notifications that EDA clients must

support: EdaEnabled, EdaDisabled, and EdaData. The EdaData notification includes both Event and Exception

data. Extensions to the Event data for the EdaData message are described in related information. The SOAPAction