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SEMI F7-92 © SEMI 19 92, 1999 2 7. Description of Test Equipment 7.1 A test apparatus capable of s ecuring the test specimen while accurately prov iding a uniform rate of pull to the specimen. T he test instrument shall …

SEMI F7-92 © SEMI 1992, 19991
SEMI F7-92 (Reapproved 0299)
TEST METHOD TO DETERMINE THE TENSILE STRENGTH OF TUBE
FITTING CONNECTIONS MADE OF FLUOROCARBON MATERIALS
This test method was technically reapproved by the Facilities Committee and is the direct responsibility of the
North American Facilities Committee. Current edition approved by the North American Regional Standards
Committee in October 1998. Initially available on www.semi.org February 1999; to be published February 1999.
Originally published in 1992.
1. Purpose
1.1 This method provides a uniform procedure to
determine the tensile strength of tube fitting
connections made of fluorocarbon materials.
2. Scope
2.1 This method can be used to characterize tube
fitting connections on the basis of test data developed
under the conditions described herein, but the results
are not intended to imply a performance rating.
2.2 Tube defined in this method has a circular cross
section and is made of fluorocarbon materials.
2.3 All parts of the tube fittings tested by this
method in contact with the internal fluid are made of
fluorocarbon materials.
2.3.1 Parts such as a nuts or grippers are not limited
to being made of a fluorocarbon material.
2.4 Only the seal between the tube and tube fitting
being evaluated is within the scope of this document.
All other, threaded seals are beyond the scope of this
document.
2.5 When using this method for making
comparisons among various tube fittings and/or
manufacturers, the user must be specific in the
selection of the tube and tube fittings to be evaluated.
2.6 The International System of Units (SI) is used as
the standard unit of measure in this document. The
U.S. Customary units are in parentheses for reference
purposes only and have been rounded to the nearest
whole value.
3. Referenced Documents
3.1 ASTM Standards
1
D3307 PFA
Fluorocarbon Molding and Extrusion
Materials
D3296
Standard Specification for FEP
Fluorocarbon Tube
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohoken, PA 19428-2959
4. Summary of Method
4.1 Subject tube fitting connections made of
fluorocarbon materials to extreme tensile forces.
5. Significance and Use
5.1 In the manufacturing of semiconductor products,
many types of hazardous chemicals and solvents are
required. As a result, tubing and various fitting
designs of fluorocarbon materials (which are
chemically resistant to these fluids) are used to
transport those fluids. It is important to control the
testing process when evaluating various fitting
designs, so that accurate comparisons of the tensile
strength can be made.
5.2 It is the intent of this method to provide a
procedure in which the tensile force will be applied to
tube fitting connections made of fluorocarbon
materials. By using this method, accurate
comparisons of various tube fitting designs can be
achieved.
5.3 The results obtained when using this method are
applicable only to conditions that specifically
duplicate the procedures used within this method.
5.4 When using this test method, it is assumed that
the test specimens are truly representative of the
material and manufacturing process specified for that
product. Departure from this assumption could
introduce discrepancies that are greater than those
introduced by departure from the details of the
procedure outlined in this method.
6. Terminology
6.1 characterize To describe the quality of.
6.2 failure Tube separation from a tube fitting
connection or tearing of the tube.
6.3 subject To expose to.
6.4 tensile Longitudinal, so as to lengthen the test
object.

SEMI F7-92 © SEMI 1992, 1999 2
7. Description of Test Equipment
7.1 A test apparatus capable of securing the test
specimen while accurately providing a uniform rate
of pull to the specimen. The test instrument shall
have the capability of recording the maximum tensile
force applied to the test specimen.
7.2 See Figure 1 for basic tensile test apparatus.
Figure 1
Basic Tensile Test Apparatus
8. Safety Precautions
WARNING: This test method will subject test
specimens to conditions that may exceed the
normal performance rating of the products
under evaluation. Adequate precautions
must be taken to prevent injury to the person
conducting the test.
9. Test Specimens and Conditioning
9.1 Sample Size A minimum of three specimens
shall be tested.
9.2 Specimen Size The specimen length shall be
no less than 10 cm (4 in) between the tensile fixture
and the tube end of the fitting connection.
9.3 Specimen Surface All surfaces of the
specimens shall be free of visible flaws, scratches, or
other imperfections, unless typically found on a
representative sample of the product.
9.4 Specimen Conditioning All specimens must
be conditioned for a minimum of one hour in an air
environment of 23° ± 2.8°C (73° ± 5°F) prior to
being subjected to tensile forces.
10. Calibration
10.1 Calibrate the tensile test equipment's rate of
pull to 2.5 cm (1 in) per minute, ± 5%.
10.2 Calibrate the tensile force instrument to ± 2%
full scale.
11. Test Procedure
11.1 Assemble a test fitting connection, per
manufacturer's specification, to one end of the tube.
(See 9.2.)
11.2 Install the fitting connection to the tensile
fixture (see Figure 1) in a manner that prevents
distortion of the connection.
11.3 Secure the open end of the tube to the tensile
fixture, leaving a minimum of 10 cm (4 in) of
exposed tube.
11.4 Begin pulling the test specimen at a rate of 2.5
cm (1 in) per minute.
11.5 Continue applying tensile force until the tube
pulls through the fitting connection or until tearing of
the tube occurs.
11.5.1 If the tube releases from the tensile fixture,
the data from that specimen must be disregarded and
an additional specimen tested.
11.6 Record on test data sheet (see Appendix 1 for a
sample) the mode of failure and the maximum tensile
force applied, in Newtons (lbs).
12. Calculations
12.1 Calculate the average "maximum tensile force"
and record.
12.2 Calculate the standard deviation of "maximum
tensile force" and record.
13. Data Accuracy
13.1 Tensile Force Newtons: ± 2%.
14. Test Data Sheet
The test data sheet shall include the following
information:

SEMI F7-92 © SEMI 1992, 19993
14.1 Date tested.
14.2 Operator and test facility.
14.3 Description of items tested, including:
Tubing
manufacturer, O.D., wall thickness, part
number, and material type.
Fitting
manufacturer, type, size, part number, and
material type.
14.4 Maximum tensile force for each specimen.
14.5 Average and standard deviation of maximum
tensile forces.
14.6 Mode of failure for each specimen.
NOTE: A sample test data sheet is provided as
Appendix 1.