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SEMI E63-1104 © SEMI 1997, 2004 1 SEMI E63-1104 MECHANICAL SPECIFICATION FOR 300 mm BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE This specification was technically approved by the Gl obal Ph ysical Interfaces &…
SEMI E62-0705 © SEMI 1997, 2005 8
APPENDIX 1
APPLICATION NOTES
NOTICE: This appendix was approved as an official part of SEMI E62, but the recommendations in this appendix are optional
and are not required to conform to this standard.
A1-1 Perpendicularity and parallelism are implicitly defined in the geometric tolerances.
A1-2 ¶6.1 discusses the need for clearance between the box and the tool’s front-opening interface when the box is
placed on the load port. After the box is placed on the load port, the kinematic couplings will move the box forward
to engage with the tool’s front-opening interface. The possibility of human fingers being pinched between the box
and the tool's front-opening interface may be a safety concern for tool designers.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E63-1104 © SEMI 1997, 2004 1
SEMI E63-1104
MECHANICAL SPECIFICATION FOR 300 mm BOX OPENER/LOADER
TO TOOL STANDARD (BOLTS-M) INTERFACE
This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is
the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition
approved by the North American Regional Standards Committee on July 11, 2004 and August 16, 2004.
Initially available at www.semi.org September 2004; to be published November 2004. Originally published
in 1997, previously published June 2000.
1 Purpose
1.1 This standard specifies the tool side of the
mechanical interface between the main part of a process
or metrology tool and the component that opens boxes
and presents the boxes to the tool wafer handler for
unloading and loading 300 mm wafers. The box
opener/loader unit would include one or more load
ports (that would conform to SEMI E15.1) as well as
storage capacity for empty boxes or waiting lots (if
needed by the tool throughput). The box opener/loader
unit might not only be configured to handle boxes (that
would conform to SEMI E47.1 and SEMI E62) but also
to open cassettes (that would conform to SEMI E1.9).
This standard defines one interface for all such carriers
and for any carrier capacity (13 and 25 wafers).
2 Scope
2.1 This standard is intended to set an appropriate level
of specification that places minimal limits on
innovation while ensuring modularity and
interchangeability at all mechanical interfaces. Only the
mechanical interface is specified; no materials
requirements or micro-contamination limits are given.
The interface specified in this standard is designed for a
tool with a sealed minienvironment, but it could also
just be a well-defined automation interface. This
interface is not intended to provide high repeatability or
rapid removal (both of which can be provided by other
couplings in the box opener/loader unit). This
specification also does not apply when load ports are
stacked one on top of the other. This specification does
not apply when inserting open cassettes into load-lock
chambers directly.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E1.9 Mechanical Specification for Cassettes
Used to Transport and Store 300 mm Wafers
SEMI E15 Specification for Tool Load Port
SEMI E15.1 Specification for 300 mm Tool Load
Port
SEMI E19 Standard Mechanical Interface (SMIF)
SEMI E47.1 Provisional Mechanical Specification
for Boxes and Pods Used to Transport and Store 300
mm Wafers
SEMI E57 Mechanical Specification for Kinematic
Couplings Used to Align and Support 300 mm Wafer
Carriers
SEMI E62 Provisional Specification for 300 mm
Front-Opening Interface Mechanical Standard (FIMS)
3.2 ISO Specification
1
ISO/DIS 68-1 ISO General Purpose Screw Threads
Basic Profile Part I: Metric Screw Threads
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 Definitions
4.1.1 bilateral datum plane a vertical plane that
bisects the wafers and that is perpendicular to both the
horizontal and facial datum planes (as defined in SEMI
E57).
4.1.2 BOLTS plane a plane parallel to the facial
datum plane near the front of the tool where the box
opener/loader is attached.
1 International Organization for Standardization,ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30,
Website: /www.iso.ch
SEMI E63-1104 © SEMI 1997, 2004 2
4.1.3 box a protective portable container for a
cassette and/or substrate(s).
4.1.4 box opener/loader the equipment component
that opens wafer carriers (if needed) and presents the
carriers to the equipment's wafer handler for unloading
and loading wafers.
4.1.5 carrier capacity the number of substrates that
a carrier holds (as defined in SEMI E1.9).
4.1.6 cassette an open structure that holds one or
more substrates.
4.1.7 equipment front end module (EFEM) consists
of the carrier handler that receives carriers from the
factory material handling system on one or more load
ports (as specified in SEMI E15.1), opens the carriers
(if needed), and may include a substrate handler for
unloading and loading wafers from the carrier to the
process part of the equipment.
4.1.8 facial datum plane a vertical plane that bisects
the wafers and that is parallel to the front side of the
carrier (where wafers are removed or inserted). On tool
load ports, it is also parallel to the load face plane
specified in SEMI E15 on the side of the tool where the
carrier is loaded and unloaded (as defined in SEMI
E57).
4.1.9 horizontal datum plane a horizontal plane
from which project the kinematic-coupling pins on
which the carrier sits. On tool load ports, it is at the load
height specified in SEMI E15 and might not be
physically realized as a surface (as defined in SEMI
E57).
4.1.10 load face plane the furthest physical vertical
boundary plane from the cassette centroid or carrier
centroid on the side (or sides) of the tool where loading
of the tool is intended (as defined in SEMI E15).
4.1.11 minienvironment a localized environment
created by an enclosure to isolate the product from
contamination and people.
4.1.12 pod a box having a Standard Mechanical
Interface (SMIF) per SEMI E19.
4.1.13 seal zone a surface on the tool at the BOLTS
plane for sealing to the box opener/loader.
4.1.14
wafer carrier any cassette, box, pod, or boat
that contains wafers (as defined in SEMI E15).
5 Requirements
5.1 Datum Planes The physical alignment
mechanism for the box consists of features (not
specified in this standard) on the box that mate with
three or six pins underneath as defined in SEMI E57.
Many of the dimensions of the BOLTS interface are
determined with respect to the three orthogonal datum
planes defined in that standard: the horizontal datum
plane, the facial datum plane, and the bilateral datum
plane. The BOLTS plane is defined to be parallel to and
at a distance y70 from the facial datum plane of the
carrier (when the carrier is docked and in position for
wafer extraction and insertion). If the carrier is rotated
after being placed on the loadport, the facial datum
plane of the carrier and the BOLTS plane may no
longer be parallel to the load face plane of the
equipment. If the carrier is not rotated, the distance
(called the docking stroke) between the facial datum
plane when the carrier is placed on the loadport
(undocked) and the facial datum plane when the carrier
is in position for wafer extraction and insertion
(docked) must be y76 (but this is only a requirement for
equipment delivered in the year 2000 or later). The
tolerance on y70 is the installation tolerance. The cycle-
to-cycle repeatability on y70 (without replacing the box
opener/loader unit) must be within y75.
5.2 Symmetry All of the dimensions for the interface
are bilaterally symmetric about the bilateral datum
plane. These dimensions are shown in Figure 1 and
specified in Table 1.
5.3 Hole Opening The BOLTS interface consists of
a hole in the front of the tool at the BOLTS plane, a seal
zone surrounding the hole, six threaded holes for
bolting on the box opener/loader, reserved spaces for
the box opener/loader inside the tool from the hole, and
an exclusion volume for the box opener/loader outside
of the hole. The dimensions of the hole are defined by
x71, z71, and z76.
5.4 Seal Zone On the BOLTS plane surrounding the
hole opening must be a flat area for sealing between the
tool and the box opener/loader. The inner dimensions of
the seal zone are the same as the hole opening, and the
outer dimensions of the seal zone are defined by x72,
z72, and z77. The flatness of the seal zone must be
within y71, and the perpendicularity of the seal zone to
the facial and horizontal datum planes must be within
5.5
Bolt Holes At six points on the BOLTS plane
there must be threaded holes for bolting on the box
opener/loader. The opening of the threaded holes must
be within the flatness of the seal zone (y71), and the
holes must be at least y73 deep. The internal threads
must conform to the ISO/DIS 68-1 specification which
has a nominal diameter of 8 mm (0.31 in.), a thread
pitch of 1.25 mm (0.05 in.), a normal length of
engagement from 4 to 12 mm (0.16 to 0.47 in.), and no
allowance (variation from basic diameter). The centers
of the threaded holes are to be located at x73 to the left