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SEMI E26-92 © SEMI 1992, 2004 3 Figure 1 Radial Cluste r Tool Module Footprint
SEMI E26-92 © SEMI 1992, 2004 2
Table 1 Modular Footprint Variables
L Transport module side length
(alpha) Angle subtended by a side of the transport module at the common point (see Section 3.1)
a
Half-minimum separation of adjacent module footprints
A
R
Half-width of reach area within the restricted area
A
M
Half-width of maintenance access area within the restricted area
W1 Module footprint primary width
W2 Module footprint secondary width
X1 Minimum distance to the interface plane for the module footprint primary width
X2 Maximum distance to the interface plane for the module footprint primary width
X3 Minimum distance to the interface plane for the module footprint secondary width
X4 Maximum distance to the interface plane for the module footprint secondary width
Table 2 Definition of Module Footprint Variables (Units are in mm)
420.0 L
2
90sin 420.0)-L(0.720
2
1
A
R
or
2
cos0.210
2
L
0.360
2
0.195
AA
RM
or
2
cos0.210
2
L
5.457
2
90sin)0.400L(
2
1
a
or
2
cos0.200
2
L
0.400
2
90cos320.02W1
or
0.400
2
sin0.640
W1
2
90cos0.27022W
or
0.400
2
sin0.1180
2
90sin0.3201X
or
2
cos0.320
X1
2
90seca
2
720.0
X2
or
2
cos0.590
2
cot0.200
2
L
2
cosec 0.360
X2
2
90tanW1W2
2
1
X3
or
2
cos0.590
2
cot0.200
2
L
2
cosec 0.360
X5
2
90sec0.7200.915
2
1
4X
or
2
cos0.590
2
cot0.200
2
L
2
cosec 7.545
SEMI E26-92 © SEMI 1992, 2004 3
Figure 1
Radial Cluster Tool Module Footprint
SEMI E26-92 © SEMI 1992, 2004 4
RELATED INFORMATION 1
NOTE: This related information is not an official part of
SEMI E26 but was reapproved for publication by full letter
ballot procedures on February 28, 1999.
R1-1 Alpha Values
R1-1.1 A transport module in the shape of an N-sided
regular polygon possesses an alpha value of 360/N (see
Section 4.1 and Figure 1).
R1-2 Transport Module Side Length
R1-2.1 The specified transport module side length (L)
of 420 mm (16.54 in.) given in Table 2 is a minimum
value that will ensure clearance at the interface plane
valve (see SEMI E21), assuming a 340 mm (13.39 in.)
flange width at the interface plane plus additional
clearance for side-mounted clamps. The side length is
specified as a minimum value since a single transport
module could have various side lengths and/or alpha
values. Longer side lengths may ease access to the
transport module, but will have the negative impact of
increasing the transport module handler extension,
which is the distance from the common point (in Figure
1) to the wafer transport position (defined in SEMI
E22). For a radial cluster tool with the transport module
handler having the "home" position at the common
point, the maximum extension in millimeters is related
to the side length, alpha, and the transport maximum
reach, which is specified as 305 mm (12 in.) in SEMI
E21 by:
L
2
×
tan 90
–
2
305
R1-3 Evaluation of Footprint Shapes
R1-3.1 Access (see Section 4.1) for a variety of
purposes is severely restricted in a radial cluster tool,
because all modules converge toward one areR1-
Achieving access to clamps at the interface plane and to
the module (usually a process module) in proximity to
the interface plane is especially difficult. Thus, several
footprint shapes were modelled: A radial architecture
comprising an N-sided regular polygon transport
module with L = 420 mm (see Table 2 and Section R1-
2) was used, and the dimensional effects on the module
footprint were investigated for 4 N 10. Anatomical
data was used to evaluate access to various parts of the
radial cluster tool. The configuration chosen provides a
short, fat footprint. It allows maximum freedom for the
module designer and accommodates modules near the
interface plane without forcing the design of additional
wafer transport mechanisms. Guidance in setting W1
and W2 values (see Figure 1) was provided by the need
for a single wafer sputter module to be placed directly
on an N = 8 regular polygon transport module and a
batch processing module with an intermediate "buffer"
station on the same transport module.
R1-4 Module Width at Interface Plane
R1-4.1 Although L can be longer than 420 mm (16.54
in.), the module attached to the transport module cannot
possess a width greater than 400 mm (15.75 in.) at the
interface plane in order to be interchangeable among all
transport module interfaces (see Figure 1).
R1-5 Flexibility for Module Suppliers
R1-5.1 Module footprint dimensions (calculated from
the expressions in Table 2) and transport module
handler extensions (calculated from the expression in
Section R1-2) for L = 420 mm and for selected values
of alpha are given in Table A1 to provide guidance for
weighing design targets. Alpha values corresponding to
values of N for an N-sided regular polygon transport
module are noted.
R1-5.2 Modules designed for an N = 8 ( = 45º)
transport module will fit on any transport module with
N 8 ( 45º), providing for greater flexibility, but
possessing a more restrictive footprint, than a module
designed for an N = 6 ( = 60º) transport module.
R1-6 Nonradial Cluster Tool Applicability
R1-6.1 An example of a nonradial transport module is
shown in Figure R1-1. Sides 1, 3, 4, and 5 of the
transport module are equivalent to a radial cluster tool.
The standard applies to these four sides (see Section
4.1).
R1-7 Restricted Areas
R1-7.1 Access (see Section 4.2) for maintenance
activities that involve the lifting of heavy components
or crouching, requires a minimum separation of 2 AM
= 915 mm (36 in.) between integrated module hardware
(see Table 2). When a width of 915 mm (36 in.) for the
entire restricted area was used in the model (see Section
R1-3), it became apparent that footprints would
comprise narrow corridors. This would force the design
of buffer chambers and additional wafer handling
mechanisms for many applications. For practical
purposes, the concept of a smaller reach area (the
hatched region in Figure R1-2), where the module
should be detached from the transport module for heavy
lifting or crouching tasks, was considered acceptable.