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SEMI PR8-0703 © SEMI 2003 16 Tag Name Description XML Datatype Behavior DateTimeArrayVal An array of dateTimes List: itermType=dateTime Optional; maxOccurrances=unbounded Base64BinaryVal A base64 values Base64Binary Opti…

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Table 17 Equipment ID XML definition
Tag Name Description XML Datatype Behavior
EquipmentID Complex element that contains all the equipment
identifier fields
Complex Required
Supplier Supplier Name String Required
Model Equipment Model String Required
ImmutableID Serial number or Immutable ID of the specific tool String Required
7.7.3.2 General Structure Example
<EdaData>
<EquipmentID>
<Supplier>Some Supplier</Supplier>
<Model>8400</Model>
<ImmutableID >998948</ImmutableID >
</EquipmentID>
<Event>
……..
…….
</Event>
<ExEvent>
……..
</ExEvent>
</EdaData>
7.7.4 Param Element
7.7.4.1 There may be zero or more Param elements
inside any Operation Name element. Param elements
can describe measured values or descriptive attributes.
Any tag names not explicitly defined in this proposed
standard must be communicated through param
elements. All param elements that may be
communicated through the EDA interface must be
defined in the Metadata files.
7.7.4.2 All param elements must contain the Name and
Value elements, at a minimum. Other, optional
elements are listed in the table below. The equipment
supplier may define additional optional elements. The
elements to be included in the communication of
specific Names must be defined in the Metadata files.
The units and the data type of specific Names must be
defined in the Metadata files.
Table 18 Param Element Definition
Tag Name Description XML Datatype Behavior
Param Complex element containing all fields
pertaining to a single parameter.
Complex Required
Name The name of the parameter. String Required
Value The value of the parameter. See below for
more definition.
Complex Required
IntVal An integer value Integer Optional;
maxOccurrances=unbounded
IntArrayVal An array of integers List; itemType=integer Optional;
maxOccurrances=unbounded
FloatVal A float value Float Optional;
maxOccurrances=unbounded
FloatArrayVal An array of Float values List; itermType=Float Optional;
maxOccurrances=unbounded
DoubleVal A double value Double Optional;
maxOccurrances=unbounded
DoubleArrayVal An array of double values List; itemType=double Optional;
maxOccurrances=unbounded
StringVal A string String Optional;
maxOccurrances=unbounded
StringArrayVal An array of strings List: itemType=string Optional;
maxOccurrances=unbounded
DateTimeVal A dateTime DateTime Optional;
maxOccurrances=unbounded
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Tag Name Description XML Datatype Behavior
DateTimeArrayVal An array of dateTimes List: itermType=dateTime Optional;
maxOccurrances=unbounded
Base64BinaryVal A base64 values Base64Binary Optional;
maxOccurrances=unbounded
AnyURIVal A URI AnyURI Optional;
maxOccurrances=unbounded
BoolVal A Boolean value Boolean Optional;
maxOccurrances=unbounded
BoolArrayVal An array of Boolean values List: itemType=boolean Optional;
maxOccurrances=unbounded
StructVal Container for groups of simple types. May
contain an unlimited number of the simple
types defined for value.
Complex Optional;
maxOccurrances=unbounded
MeasTime Time of the measurement, if applicable. dateTime Optional
Locator Unique identifier for the tool entity, or
namable, to which the param applies.
String Required
Extension Element containing any additional fields
provided by the supplier.
Any Optional
7.7.4.3 Value Elements — The elements within the Value element may contain a single scalar value, a space
delimited array, or a StructVal element. StructVal elements may not be nested.
Example 1: simple parametric data point named pressure
<Param>
<Name>Pressure</Name>
<Value>
<FloatVal>43.56</FloatVal>
</Value>
<MeasTime>1999-05-31T13:20:00.087-05:00</MeasTime
</Param>
Example 2: Collection event ID
<Param>
<Name>CEID</Name>
<Value>
<IntVal>1278</ IntVal >
<StructVal>
<DateTimeVal>…….</DateTimeVal>
<FloatVal>………</FloatVal>
</StructVal>
</Value>
</Param>
7.7.5 DateTime XML Datatype — Whenever an element is given the dateTime XML DataType in this specification
it shall conform to the dateTime built-in data type defined in XML Schema Part 2-Datatypes. The dateTime
representation shall include the difference from UTC and the fractional seconds precision shall be at least .01
seconds (i.e., ss.ss). Equipment shall pad the fractional seconds field with zeros beyond its measurable precision.
7.7.6 Eda Client Operations — This specification defines three different notifications that EDA clients must
support: EdaEnabled, EdaDisabled, and EdaData. The EdaData notification includes both Event and Exception
data. Extensions to the Event data for the EdaData message are described in related information. The SOAPAction
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HTTP headers used for these messages are “urn:semi-org:ws:eda_ps_v0.0:EdaEnabled”, “urn:semi-
org:ws:eda_ps_v0.0:EdaDisabled”, and “urn:semi-org:ws:eda_ps_v0.0:EdaData”, respectively.
7.7.6.1 EdaEnabled — Whenever the equipment EDA port enters the EDAEnabled state, it shall send the
EdaEnabled message to each configured client. The equipment will not send any additional messages to a
configured client until it receives a successful response to the EdaEnabled message from that client. If the response
is not received the equipment will retry the EdaEnabled message a specific number of times and at a specific
interval. Both the number of retries and the retry interval shall be configurable at the equipment. If at the end of
this retry cycle the expected response to the EdaEnabled message has not been received from that client then the
equipment shall deactivate all of that client’s hibernating data collection plans and each of those DCPs shall enter
the Inactive state (see transition 7 in Figure 5). The equipment will activate those DCPs again only when a
subsequent ActivatePlan request is received from a configured client.
7.7.6.2 EdaDisabled — Whenever the equipment EDA port is entering the EDADisabled state, the equipment shall
send the EdaDisabled message to each configured client.
Table 19 EdaEnabled/Disabled Message
Behavior
Tag Name Description XML Datatype
EdaEnabled EdaDisabled
See columns 3 and 4
in this row for tag
names, shown in
quotes.
Operation Name
element
Complex Required-“EdaEnabled” Required- “EdaDisabled”
EquipmentID EquipmentID
element
Complex Required Required
7.7.7 Event Data — The Event data format is a simple, general-purpose event format intended for communicating
fundamental events from the SECS/GEM interface, and other similar data. The event may be used as a container for
parametric data that does not have a particular context within either an operational segment or an exception event.
Event data can be provided anywhere within the EdaData message structure following the EquipmentID element. It
can appear zero or more times, and can be interspersed with Exception data.
Table 20 Event Description
Tag Name Description XML Datatype Behavior
Event Operation Name Complex Required
EventTime Event time and date stamp. dateTime Required
Locator Unique identifier for the tool entity, or
namable, to which the event applies.
String Required
EventID Event identifier String Required
Context Complex element containing all context
Param elements.
Complex Optional- 0 or 1
Param Complex element that contains all fields
pertaining to a single context param.
Complex 1 Required (if Context element
included), Many Optional
Data Complex element containing all data
param elements.
Complex Required-Exactly 1
Param Complex element that contains all fields
pertaining to a single data param.
Complex 1 Required, Many Optional
Extension Element containing any additional
information provided by the supplier.
Any Optional