semi合集-English.pdf - 第1111页

SEMI E5-1104 © SEMI 1982, 2004 53 Attribute Name Definition Acc. Rqmt Form Default Value UD_* Non-standard attribute defined by supplier or user . Asterisk ind icates the part of the attribute n a me that is provided in …

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SEMI E5-1104 © SEMI 1982, 2004 52
Attribute Name Definition Acc. Rqmt Form Default Value
“ChangedBody” Set to TRUE if the recipe body has
changed without a subsequent upload to
the originating namespace. Note: this
attribute is never updated to a namespace.
Required only if recipe can be changed or
created.
RO Y Boolean. FALSE
“ExecChgCtl” Preserved. Specifies change control
requirements for recipe.
RO Y Binary.
Bitwise:
1 - may change
2 - change notification
required
4 - recipe may be selected
after change,
8 - most recent parameter
settings shall be saved.
Any combination of these
four bits is allowed.
0
Optional Attributes
“AgentSpec_
Comments”
Copied from the original agent-specific
attribute when downloaded. Set by the
user.
RO N Text. Maximum length is
80 characters.
-
“ApprovalLevel” Indicates the level of approval assigned
by an authorized user.
RO N Unsigned integer 0
“Certified” Preserved from the agent-specific
attribute as downloaded. May be used as
control for production-worthy recipes.
RO N Unsigned integer 0
“Comments” User comments. Preserved from the
generic attribute as downloaded.
RO N Text. Maximum length is
80 characters.
-
“EditedBy” Preserved unless recipe is modified. The
name of the person or executing agent
who last modified the recipe.
RO N Text. Maximum length is
40 characters.
-
“EstRunTime” The nominal or estimated execution (run)
time of the recipe, in seconds. Used for
scheduling purposes. Preserved from the
generic attribute as downloaded.
RO N Unsigned integer 0
“ExecLinkParam” Preserved unless last value is changed
(Section 9.7.4). Contains the list of
parameter definitions including any
agent-specific modifications. Required
for variable parameter support.
RO N Structure composed of
parameter name, initial
value, and restrictions.
NULL
“LinkList” Preserved. A complete list of recipe
specifiers for a linked recipe set.
Required for multi-part recipe support.
RO N List of formatted text. NULL
“SrcRcpID” For a derived object form recipe, contains
the recipe identifier of the original source
f
orm recipe. Required only for derived
object form recipes.
RO N Formatted text. NULL
“VerificationID” Identification code used by the verifier of
the recipe. May be used to determine out-
of-date formats that need to be re-verified.
RO N Text. Maximum length is
40 characters.
NULL
Non-Standard Attributes
AgentSpec_UD_* Preserved from the original agent-specific
attributed as downloaded.
RO N Defined by supplier or
user. Text limited to 80
characters.
-
SEMI E5-1104 © SEMI 1982, 2004 53
Attribute Name Definition Acc. Rqmt Form Default Value
UD_* Non-standard attribute defined by
supplier or user. Asterisk indicates the
part of the attribute name that is provided
in this definition. Shall be preserved
exactly except by the entity that defined
it.
RO N Varies with definition.
Text form is limited to 80
characters.
-
Table 16 Managed Recipe Attribute Definition
Attribute Name Description Access Format Value
“ObjType” The object type. RO 20 “MRcp”
“ObjID” An identifier derived from Class, Name, and
Version
. No part of a recipe’s identifier shall be
changed except through renaming.
RO 20
(other) Description of the information contained. RO
or
RW
Varies with
definition.
Varies with definition.
“Name” A logical name assigned by the user when the
recipe is created or renamed.
RO 20
“Class” The recipe’s class (e.g., “/PROCESS/” or
“/PROCESS/LOADER/”).
RO 20 Formatted text:
“CLASS/CLASS/../CLASS/”
“Version” The version of the recipe. RO 20
“AttrLength” The total length of the generic attributes, in bytes.
Mandatory.
RO 5()
“AttrChgTime” Timestamp of the last change to a generic attribute.
Mandatory.
RO 20
“BodyLength” Length of the recipe’s body, in bytes. Mandatory. RO 5()
“EditTime” Timestamp of when the body was created or last
updated. Mandatory.
RO 20 Timestamp format:
“YYYYMMDDhhmmsscc”
“BodyFormat” Indicates the form and format of the recipe’s body.
Default is zero.
RO 52 0 = source,
1 = object,
>1 reserved.
“Verified” Indicates whether the recipe’s body is syntactically
correct. Reset when the recipe is created or
updated. Default is FALSE.
RO 11
“Linked” Indicates whether the recipe is linked. Reset when
the recipe is originated, verified, or unlinked.
Default is FALSE.
RO 11
“ApprovalLevel” Indicates the level of approval assigned by an
authorized user. Default is zero. Reset when the
recipe is originated or linked. For a linked recipe,
may not be higher than any of its subrecipes.
RW 52
“Comments” User comments. RW 20 Maximum length is 80 characters.
“EditedBy” The name of the person who last edited the recipe. RO 20 Maximum length is 40 characters.
“EstRunTime” The nominal or estimated execution (run) time of
the recipe, in seconds. Reset when the recipe, is
created or updated. Set when the recipe is verified.
May be recalculated to total time for a main recipe
when linked. Used for scheduling purposes.
Algorithm for calculation shall be documented.
Default is 0.
RW 54
SEMI E5-1104 © SEMI 1982, 2004 54
Attribute Name Description Access Format Value
“ExecChgCtrl” Specifies change control requirements for recipe.
Default is 0. Combinations of bits are used to
indicate multiple permissions.
RW 10 Binary.
Bitwise (MSB = 8):
1 - the recipe body may be changed
2 - change notification required
4 - recipe may be selected after
change,
8 - most recent parameter settings
shall be saved.
Any combination of these four bits
is allowed
“ExtRef” A list of all recipe specifiers as referenced within
the recipe. Explicit versions not required. Reset
when the recipe is created, updated, and verified.
RO 00 List of items of format 20.
“LinkList” A complete list of recipe specifiers found in the
ExtRef
attribute of a main recipe and all of its
subrecipes, with duplicates removed and all
versions explicitly determined. Set for the main
recipe when linked
. Reset when the recipe is
originated or verified. Required for multi-part
recipe support.
RO 00 List of items of format 20.
“LinkParam” A list of all variable parameter definitions
contained in the Parameters
attribute of a main
recipe and all of its subrecipes, with duplicates
removed. Reset when the recipe is created,
updated, or verified. Set when the recipe is linked.
Required for variable parameter support.
RO 00 List of parameter definition
structures composed of parameter
name, initial value, and restrictions.
“Parameters” A list of variable parameter definitions contained in
the recipe. Reset when the recipe is created,
updated, and verified. Set when the recipe is
verified. Required only for variable parameter
support.
RO 00 List of parameter definition
structures composed of parameter
name, initial value, and restrictions.
“SrcRecID” Identifier of the source form recipe from which a
derived object form recipe is derived. Value
determined by the verifier of the recipe. Required
only for support of derived object form recipes.
RO 20
“VerificationID” Identification code set by the verifier of the recipe.
May be used to determine out-of-date formats that
need to be re-verified.
RO 20 Maximum length is 40 characters.
“UD_” Non-standard attribute defined by supplier or user.
Asterisk indicates the part of the attribute name that
is provided in this definition. Shall be preserved
exactly except by the entity that defined it.
RO 10, 11, 20,
3(), 4(), 5()
Text form is limited to a maximum
of 80 characters.
Table 17 Process Job Attributes
Attribute Name Description Access Format Related
Data Item
Value
“ObjType” Name of the Object Type RO 20 - “PROCESSJOB”
“ObjID” Identifier of a Process Job RO 20 PRJOBID -
“PRMt1Type” Type of material being processed RO 20 - allowed values:
“css”
“wfr”
“PRMt1NameList” Process Material Name, identifies material
being processed by a job, which could be
more than one item.
RO 20 - (list of) Text