semi合集-English.pdf - 第1286页
SEMI E5-1104 © SEMI 1982, 2004 228 Stream,Function Name (Mnemonic) Direction S16,F7 Process Job Alert Notify (PRJA) S, H<-E,[reply ] Description The processing service ma y notify the controlling entity of im portant …

SEMI E5-1104 © SEMI 1982, 2004 227
Stream,Function Name (Mnemonic) Direction
S16,F5 Process Job Command Request (PRJCMDR) M,H->E,reply
Description
Send a job control command to a processing job.
Structure
L,4
1. <DATAID>
2. <PRJOBID>
3. <PRCMDNAME>
4. L,n
1. L,2
1. <CPNAME
1
>
2. <CPVAL
1
>
.
.
n. L,2
1. <CPNAME
n
>
2. <CPVAL
n
>
Exception
The CPNAME, CPVAL pairs are command parameter identifiers and values; n = 0 is valid for some commands
(PRCMDNAME).
Stream,Function Name (Mnemonic) Direction
S16,F6 Process Job Command Acknowledge (PRJCMDA) S,H<-E
Description
The processing service sends its confirmation for receipt of a command request.
Structure
L,2
1. <PRJOBID>
2. L,2
1. <ACKA>
2. L,n (n = {0,n})
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
This list n may be zero length.

SEMI E5-1104 © SEMI 1982, 2004 228
Stream,Function Name (Mnemonic) Direction
S16,F7 Process Job Alert Notify (PRJA) S,H<-E,[reply]
Description
The processing service may notify the controlling entity of important events. The Process Job Milestones only assume small
number of different values. However, the conditions under which a process job meets one of these milestones may vary. For
instance, a Job may reach Job Complete because the Process was Aborted. By using item 4, the status of the Alert
(PRJOBMILESTONE) can be indicated. See the list of Error Codes for Processing in Data Item Dictionary.
Structure
L,4
1. <TIMESTAMP>
2. <PRJOBID>
3. <PRJOBMILESTONE>
4. L,2
1. <ACKA>
2. L,n (n = {0,n})
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
The list n may be zero length.
Stream,Function Name (Mnemonic) Direction
S16,F8 Process Job Alert Confirm (PRJAC) S,H->E
Description
Host confirms receipt of Process Job Alert message from the equipment.
Structure
Header only
Exception
None

SEMI E5-1104 © SEMI 1982, 2004 229
Stream,Function Name (Mnemonic) Direction
S16,F9 Process Job Event Notify (PRJE) S,H<-E,[reply]
Description
Send Processing Job related event to the controlling entity.
Structure
L,4
1. <PREVENTID>
2. <TIMESTAMP>
3. <PRJOBID>
4. L,n
1. L,2
1. <VID
1
>
2. <V
1
>
.
.
n. L,2
1. <VID
n
>
2. <V
n
>
Exception
The VID, V pairs are variable data identifiers and values; exceptions n = 0 is valid for some events (PREVENTID).
Stream,Function Name (Mnemonic) Direction
S16,F10 Process Job Event Confirm (PRJEC) S,H->E
Description
Host confirms receipt of S16,F9 message to equipment.
Structure
Header only
Exception
None