semi合集-English.pdf - 第5667页
SEMI P10-0705 © SEMI 1990, 2005 162 MASK_ID 1 !First write and process step DELIVERABLE_MASK F MULTIWRITE (1,1) START_PHASE_SHIFT 1 PSM_WAVELENGTH 248 TRANSMISSION_TARGET 6 TRANSMISSION_TOLERANCE 0.4 TRANSMISSION_RANGE 0…
SEMI P10-0705 © SEMI 1990, 2005 161
RELATED INFORMATION 3
SEMI PHOTOMASK ORDER DATA FILE EXAMPLE EMPLOYING
MULTIPLE WRITE AND PROCESS STEPS FOR A SINGLE MASK
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
EXAMPLE: One 4-die phase shift reticle requiring two write and process steps.
START_ORDER MS999
SEMI_REVISION P10-0704 !<mask_order>
CUSTOMER COMPANY NAME
VENDOR ULTIMATE MASK COMPANY
FILE_DATE_TIME 06-JUL-2000, 01:06:00
MASK_SET_ID 9999 !<mask_set>
END_MASK_SET_OPTIONS 9999
!
MASK_GROUP_ID PSM !<mask_group>
START_TITLE 1
TITLE_TEXT DEVICE 9999
TITLE_TYPE DEVICE
TITLE_LOCATION 12500,58500
END_TITLE 1
START_TITLE 2
TITLE_TEXT PHASE SHIFT POLY
TITLE_TYPE MASK
TITLE_LOCATION 12500,56500
END_TITLE 2
MIRROR_MASK T
PRODUCT_TYPE RETICLE
PRODUCT_MAGNIFICATION 5X
PRODUCT_IMAGING_TYPE EAPSM
BLANK_SIZE 6/250
BLANK_TYPE ULTE
BLANK_FLATNESS 1
MASK_COATING MOSI
RESIST_TYPE POSITIVE
START_CD SPECIFICATION
CD_TOLERANCE 0.05
CD_RANGE 0.06
END_CD SPECIFICATION
END_MASK_GROUP_OPTIONS 5X
!
PLACEMENT_TOP_CELL C1
!
SEMI P10-0705 © SEMI 1990, 2005 162
MASK_ID 1 !First write and process step
DELIVERABLE_MASK F
MULTIWRITE (1,1)
START_PHASE_SHIFT 1
PSM_WAVELENGTH
248
TRANSMISSION_TARGET 6
TRANSMISSION_TOLERANCE 0.4
TRANSMISSION_RANGE 0.8
PHASE_ANGLE_TARGET 180
PHASE_ANGLE_TOLERANCE 4
PHASE_ANGLE_RANGE 8
END_PHASE_SHIFT 1
START_REGISTR 1
REGISTR_ERROR 0.10
END_REGISTR 1
MIN_MASK_FEATURE_SIZE 0.8
END_MASK 1
!
MASK_ID 2 !Second write and process step
DELIVERABLE_MASK T
MULTIWRITE (1,2)
START_PHASE_SHIFT 2
PSM_WAVELENGTH 248
TRANSMISSION_TARGET 6
TRANSMISSION_TOLERANCE 0.4
TRANSMISSION_RANGE 0.8
PHASE_ANGLE_TARGET 180
PHASE_ANGLE_TOLERANCE 4
PHASE_ANGLE_RANGE 8
END_PHASE_SHIFT 2
TOP_PELLICLE_TYPE CA627P-7043L
MIN_MASK_FEATURE_SIZE 0.8
START_DEFECT_DEFINITION C
DEFECT_SIZE 0.3
DEFECT_COUNT 0
INSPECTION_AREA -30000,-35000,30000,35000
END_DEFECT C
END_MASK 2
!
CELL_ID C1 !<cell_definition>
END_CELL_OPTIONS C1
CELL_INSTANCE C2 !MAIN ARRAY
END_CELL_INSTANCE C2
LOCATION 0,0
PATTERN_GROUP_INSTANCE PG3 !RMS ALIGNMENT KEYS
SEMI P10-0705 © SEMI 1990, 2005 163
LOCATION 0,-57500
LOCATION -11000,57500
END_CELL C1 !END TOP CELL DEFINITION
!
CELL_ID C2 !MAIN ARRAY DEFINITION
END_CELL_OPTIONS C2
PATTERN_GROUP_INSTANCE PG1 !PRIMARY DIE
LOCATION -15000,-17500
STEPPING_DISTANCE 30000,35000
STEPPING_COUNT 2,2
PATTERN_GROUP_INSTANCE PG2 !SCRIBE LINE
LOCATION 0,0
END_CELL C2
!
PATTERN_GROUP_ID PG1 !PRIMARY PATTERN GROUP
PATTERN_ADDRESS_SIZE 0.05
SCALE_FACTOR 1.0
STRIPE_HEIGHT 1024
UNSCALED_PATTERN_SIZE 25000,30000
END_PATTERN_GROUP_OPTIONS PG1
LEVEL_ID 1
PATTERN_NAME VT9999X-1A-26
DIGITIZED_DATA_DARK T
END_PATTERN_DEFINITION 1
LEVEL_ID 2
PATTERN_NAME VT9999X-1A-10
DIGITIZED_DATA_DARK F
END_PATTERN_DEFINITION 2
END_PATTERN_GROUP PG1
!
PATTERN_GROUP_ID PG2 !SCRIBE PATTERN GROUP
PATTERN_ADDRESS_SIZE 0.05
SCALE_FACTOR 1.0
STRIPE_HEIGHT 1024
UNSCALED_PATTERN_SIZE 65000,75000
START_CD CD_SITES
CD_SITE_ID CD_1
CD_LOCATION -40000,0
CD_SITE_ID CD_2
CD_LOCATION 0,-40000
CD_SITE_ID CD_3
CD_LOCATION 0,40000
CD_SITE_ID CD_4
CD_LOCATION 0,0
END_CD CD_SITES