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SEMI E102-0600 © SEMI 2000 30 Table R-1 Material Transport and St orage Scenario Definiti ons Case Source Destinatio n Batch Size Route/C ondition Comme nts 1 Stk4 Stk9 Manual Output Port 1 Carrier Stk4>Ohs 2>Stk9 …

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SEMI E102-0600 © SEMI 200029
RELATED INFORMATION 1
SCENARIOS FOR MATERIAL TRANSPORT AND STORAGE
NOTE: This related information is not an official part of SEMI E10# and was derived from the work of the I300I/J300E AMHS
workgroup accomplished during development of the proposed standard. This related information is included with the Material
Transport and Storage Component specification to aid the readers in understanding the intent and use of the standard. This related
information was approved for publication by full letter ballot procedures on January 14, 2000.
R1-1 Introduction
R1-1.1 Scenario Assumptions — These scenarios show possible implementations of the SEMI standard. The
information shown here is intended to be a guide rather than describe rigid implementation rules. Some of the
message sequences and implied functionality included in these scenarios will vary across different implementations.
R1-1.2 Scenario Configuration — There are thirteen scenarios included in this section. The first and last scenarios
show all interactions at an individual interface level. For simplicity, the remaining scenarios show interactions
abstracted up to the Component level. Background information related to the scenarios is shown in Figure R1-1.
Table R1-1 outlines the thirteen scenario case conditions.
Stk1
Stk2
Stk3
Stk4
Stk5
Stk6
Stk7
Stk8
Eq1 Eq2
Eq3 Eq4
Agt1
Agt2
Ohs1 Ohs2
Bay1
Bay2
Stk = Stocker
Eq
= Production Equipment
Agt = Automated Guided Transport
Sgr = Stocker Group
Oht = Overhead Hoist Transport
Stk9
Stk10
Sgr1
Eq5 Eq6
Bay3
Oht1
Figure R1-1
Scenario System Layout Configuration
SEMI E102-0600 © SEMI 2000 30
Table R-1 Material Transport and Storage Scenario Definitions
Case Source Destination Batch
Size
Route/Condition Comments
1 Stk4 Stk9
Manual
Output
Port
1
Carrier
Stk4>Ohs2>Stk9 Interactions at an
individual interface level.
2Eq1 Stk7 1
Carrier
Eq1>Agt1>Stk2>Ohs1>Stk(Relay)>Ohs2>Stk7
Stk(Relay) priority = Stk4, Stk5, Stk6
Base Scenario: Delivery
from Production
Equipment to Stocker.
3Stk7 Eq3 2
Carriers
Stk7>Ohs2>Stk8>Agt2>Eq3
Eq3 batch size = 2 Carrier
Ohs2 batch size = 1 Carrier
Agt2 batch size = 2 Carrier
Base Scenario: Batch
delivery from Stocker to
Production Equipment.
4Eq1 Stk7 1
Carrier
Eq1>Agt1>Stk2>Ohs1>Stk (Relay)>Ohs2>Stk8
(Temp)>Stk7
Stk(Relay) priority = Stk4, Stk5, Stk6
Stk4 Status = Down
Stk7 logical partition = Full
Includes AMHS equipment
(Storage Device)
monitoring and stocker
logical partition overflow
control.
5 Stk6 Stk4 1
Carrier
Operator>Stk6 Manual Carrier Input
handling.
6 Stk4 Stk9 1
Carrier
Stk4>Ohs2>Stk9 - Ohs2 Status = Down Includes AMHS equipment
(transport device)
monitoring.
7Stk7 Eq6 4
Carriers
Stk7>Ohs2>Sgr1>Oht1>Eq6
Eq6 has internal buffer, batch size = 4 carriers
Ohs2 batch size = 1 carrier, Oht1 batch size = 1
carrier
Base scenario: Batch
delivery to internal buffer
equipment.
8Stk5 Eq5 1
Carrier
Stk5>Ohs2>Sgr1>Oht1>Eq5
Macro command is aborted with carrier on Ohs2.
Includes abort job
handling.
9Stk5 Eq5 1
Carrier
Stk5>Ohs2>Sgr1>Oht1>Eq5
Macro command is modified to final destination
Sgr1.
Includes modify job
handling.
10 - - - Startup - Material Transport and Storage
Component is registered and starts up.
Base scenario: MTSC
startup.
11 Stk6 Stk4 1
Carrier
Stk6>Ohs2>Stk4 - Operator removes carrier
while on Ohs2.
Includes handling of
manual interruption of
delivery.
12 Eq3 Eq5 1
Carrier
Eq3>Agt2>Stk8>Ohs2>Sgr1>Oht1>Eq5 Base scenario: tool-to-tool
delivery.
13 Stk4 Stk9 1
Carrier
Stk4>Ohs2>Stk9 Interactions at an
individual interface level
(including capacity
reservation).
SEMI E102-0600 © SEMI 200031
R1-2 Scenarios
R1-2.1 Scenario One — Interactions at the Interface Level
2: requestJob(JobType Transport, Priority 1, Deadline time1, container aaa, DestinationMachine Stk9, DestPort Stk9/Manual)
3: returns Job Handle TrJob1
7: makeInTransit()
20: setMaterialTrackingLocation(materialTrackingLocation Ohs2)
21: DurableLocationChangedEvent
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
10: Transfer (aaa, Bay_Out) (Internal Interface)
11: Transfer Command to Stk4 (src Stk4, dest st4/Bay_Out) (Stocker SEM)
12: Transfer Command Updates (Stocker SEM)
13: Transfer Command Complete (Stocker SEM)
14: Transfer complete (Internal Interface)
16: Transfer (aaa, stk4/Bay_Out, stk9/Bay_In) (Internal Interface)
17: Transfer Command to Ohs2 (src stk4/Bay_Out, dest stk9/Bay_In) (IBSEM)
18: Transfer Command Update (IBSEM)
19: Transfer Update (Internal Interface)
23: Transfer Command Complete (IBSEM)
24: Transfer Complete (Internal Interface)
25: Transfer (carrier aaa, src Bay_In, dest Man_Out) (Internal Interface)
26: Transfer Command to stk9 (src Bay/In, dest Man_Out) (Stocker SEM)
27: Transfer Command Updates (Stocker SEM)
28: Transfer Command Complete CarrierStoredAltEvent (Stocker SEM)
29: Transfer Complete CarrierStoredAlt (Internal Interface)
8: MaterialContainerStateChangedEvent
MTSC determines AMHS Route (Internal Service)
9: getUnit()
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
15: removeMaterial(MaterialContainer aaa)
22: addMaterialToTrack(MaterialContainer aaa)
1: setUnit( unitvalue)
30: getMaterialTrackingLocation("stk9MTL")
Factory
Operations
Material
Container aaa
Material
TransportManager
Job TrJob1 AMHS Equipment
Controllers
MaterialTracking
Location ohs2MTL
MaterialTracking
Location stk4MTL
MaterialTracking
Location stk9MTL1
Storage
Machine stk9
Transport
Machine Ohs2
Storage
Machine stk4
Figure R1-2
Scenario Case 1