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SEMI E79-0304 © SEMI 1999, 2004 8 7 Related Reference Material Nakajima, S., Introduction to TPM: Total Productive Maintenance , Productivity Press, Cambridge, MA. 1988. TPM in Process Industries ; Edited by Tokutaroo Su…

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SEMI E79-0304 © SEMI 1999, 2004 7
allowances for them in either production time or theoretical
production time.
6.3.1 Theoretical Production Time (for Actual Units
and for Effective Units)
6.3.1.1 Virtual Machine Theoretical Production Time
(for Actual Units and for Effective Units) — Theoretical
production time earned by an individual virtual
machine according to the virtual machine model.
Virtual Machine
Theoretical Production Time for Actual Units =
Σ
i
[(Theoretical Production Time Per Unit
for Virtual Machine Recipe i)
× (Actual Units of Virtual Machine Recipe i)]
Virtual Machine
Theoretical Production Time for Effective Units
= Σ
i
[(Theoretical Production Time Per Unit
for Virtual Machine Recipe i)
× (Effective Units of Virtual Machine Recipe i)]
6.3.1.2 Flexible-Sequence Cluster Tool Theoretical
Production Time (for Actual Units and for Effective
Units) — Aggregate theoretical production time earned
by all virtual machines according to the virtual machine
model.
Flexible-Sequence Cluster Tool
Theoretical Production Time for Actual Units
= Σ
j
(Theoretical Production Time
for Actual Units for Virtual Machine j)
Flexible-Sequence Cluster Tool
Theoretical Production Time for Effective Units
= Σ
j
(Theoretical Production Time
for Effective Units for Virtual Machine j)
6.3.2 Production Time
6.3.2.1 Virtual Machine Production Time — The sum
of all periods of manufacturing time in which a virtual
machine is performing operations according to the
virtual machine model. When SEMI E10 equipment
states are tracked at the virtual machine level,
processing module production time is equivalent to E10
productive time. Automated tracking is required for
accurate results.
6.3.2.2 Flexible-Sequence Cluster Tool Production
Time — Aggregate production time for all virtual
machines tracked according to the virtual machine
model.
Flexible-Sequence Cluster Tool Production Time =
=Σ
j
(Production Time for Virtual Machine j)
NOTE 7: In this quantity, elapsed times for transport
operations that reposition units from one virtual machine to
another are intentionally credited to both modules. Also note
that this aggregate measure may be larger than the elapsed
time observed and can only be compared with similar
aggregate flexible-sequence cluster tool metrics.
6.3.3 Equipment Uptime
6.3.3.1 Equipment uptime is defined to measure the
total time, during a period of observation, that a virtual
machine or a flexible-sequence cluster tool is in a
condition to perform processing in some form.
6.3.3.2 SEMI E10 defines equipment uptime as
including E10 productive time, engineering time, and
standby time. This definition applies to individual
virtual machines of a flexible-sequence cluster tool.
For the flexible sequence cluster tool as a whole,
production time is the sum of production times for the
individual virtual machines. This production time is
used in lieu of productive time.
6.3.3.3 Virtual Machine Equipment Uptime
Virtual Machine Equipment Uptime =
Virtual Machine Production Time
+ Virtual Machine Engineering Time
+ Virtual Machine Standby Time
6.3.3.3.1 Virtual Machine Engineering Time — The
sum of all periods of time in which a virtual machine is
user-selected for the exclusive use of engineering
product, process, and/or equipment experiments.
Engineering time may be declared for one virtual
machine without having to declare engineering time for
all virtual machines.
6.3.3.3.2 Virtual Machine Standby Time — The sum of
all periods of manufacturing time not counted in
production time, when the virtual machine is capable of
starting new work.
6.3.3.4 Flexible-Sequence Cluster Tool Equipment
Uptime
Flexible-Sequence Cluster Tool Equipment Uptime =
Σ
j
(Virtual Machine Equipment Uptime
for Virtual Machine j)
6.3.4 Total Time
6.3.4.1 Virtual Machine Total Time — For individual
virtual machines, virtual machine total time is trivially
defined as all time observed (at the rate of 24 hours per
day and seven days per week).
6.3.4.2 Flexible-Sequence Cluster Tool Total Time
Flexible-Sequence Cluster Tool Total Time =
Σ
j
(Virtual Machine Total Time
for Virtual Machine j) =
(Total Time Observed) × (Number of Virtual Machines)
SEMI E79-0304 © SEMI 1999, 2004 8
7 Related Reference Material
Nakajima, S., Introduction to TPM: Total Productive
Maintenance, Productivity Press, Cambridge, MA.
1988.
TPM in Process Industries
; Edited by Tokutaroo
Suzuki, Productivity Press, 1994. (Originally published
as Sochi Kogyo no TPM
: Japan Institute of Plant
Maintenance, 1992).
TPM Encyclopedia
; Edited by Japan Institute of Plant
Maintenance, 1996.
TPM Focused Improvement
: Loss Assessment
Training Module, International SEMATECH, Available
to International SEMATECH and SEMI-SEMATECH
member companies, 1999.
TPM New Implementation Program in Fabrication and
Assembly Industries, Edited by Kunio Shirose, Japan
Institute of Plant Maintenance, 1996.
Konopka, John M., Improvement Output in
Semiconductor Manufacturing Environments, doctoral
dissertation, Arizona State University, Temp, Arizona,
1996.
Konopka, John., Trybula, Walt., Overall Equipment
Effectiveness (OEE) and Cost Measurement,
Proceedings of the 1996 IEEE/CPMT 19
th
International Electronics Manufacturing Technology
Symposium, Austin, TX, USA, 1996.
Leachman, Robert C., Closed-Loop Measurement of
Equipment Efficiency and Equipment Capacity, IEE
Trans. Sem. Manuf. 10(1), 84097, 1997.
Busing, David P., Automated Procedures for
Characterizing Specific Productivity Losses with
Applications in the Semiconductor Manufacturing
Industry
, doctoral dissertation, University of California,
Berkeley, 1998.
CSM-44: Performance Models of Theoretical and
Average Process Times for Selected Semiconductor
Fabrication Equipment; Engineering Systems Research
Center, University of California, Berkeley, 1999.
SEMI E79-0304 © SEMI 1999, 2004 9
APPENDIX 1
CALCULATING PRODUCTIVITY METRICS
NOTICE: The material in this appendix is an official part of SEMI E79 and was approved by full letter ballot
procedures on December 15, 1999 by the North American Regional Standards Committee.
A1-1 Example Calculations for an Individual
Processing Module or a Fixed-Sequence
Cluster Tool
A1-1.1 Sample Data — The calculations in this section
are based on the following sample data. The sample
data is for a seven-day period.
Non-Scheduled Time 0.00 hours
Unscheduled Downtime 4.00 hours
Scheduled Downtime 8.00 hours
Engineering Time 3.00 hours
Standby Time 6.00 hours
Production Time
147.00 hours
Total Time 168.00 hours
Recipe
Theoretical
Production
Time
Per Unit
Theoretical
Units
Per Hour
Actual
Units
of
Recipe
Effective
Units
of
Recipe
A 0.03333
hr/unit
30.00
units/hr
1420 1400
B 0.04000
hr/unit
25.00
units/hr
600 600
C 0.05000
hr/unit
20.00
units/hr
800 800
D 0.06667
hr/unit
15.00
units/hr
500 480
A1-1.2 Fundamental Quantities
Equipment Uptime
= (Production Time) + (Standby Time) + (Engineering Time)
= (147.00 hours) + (6.00 hours) + (3.00 hours)
= 156.00 hours
Production Time (given)
Theoretical Production Time for Actual Units
= ∑
i
(Actual Units of Recipe i × THT
i
)
= [(1420 units × 0.03333 hr/unit)
+ (600 units × 0.04000 hr/unit)
+ (800 units × 0.05000 hr/unit)
+ (500 units × 0 .06667 hr/unit)]
= 144.66 hours
Theoretical Production Time for Effective Units
= ∑
i
(Effective Units of Recipe i × THT
i
)
= [(1400 units × 0.03333 hr/unit)
+ (600 units × 0.04000 hr/unit)
+ (800 units × 0.05000 hr/unit)
+ (480 units × 0.06667 hr/unit)]
= 142.67 hours
A1-1.3 Productivity Metrics
Availability Efficiency
= (Equipment Uptime)/(Total Time)
= (156.00 hours)/(168.00 hours)
= 0.9286
Operational Efficiency
= (Production Time)/(Equipment Uptime)
= (147.00 hours)/(156.00 hours)
= 0.9423
Rate Efficiency
= (Theoretical Production Time for Actual Units)
/(Production Time)
= (144.66 hours)/(147.00 hours)
= 0.9840
Performance Efficiency
= (Operational Efficiency) × (Rate Efficiency)
= (0.9423) × (0.9840)
= 0.9272
Quality Efficiency
= (Theoretical Production Time for Effective Units)
/(Theoretical Production Time for Actual Units)
= (142.67 hours)/(144.66 hours)
= 0.9862
Overall Equipment Efficiency (OEE)
= (Theoretical Production Time for Effective Units)
/(Total Time)
= (142.67 hours)/(168.00 hours)
= 0.8492