semi合集-English.pdf - 第2104页

SEMI E54.13-0303 © SEMI 2003 5 Required by Object EIP Class ID (See Note 1.) CDM Tag (See Note 2.) EIP (See Note 1.) CDM (See Note 2.) NCS Controller 33 CntIn No No No (Other) ***  No No No NOTE 1: See EtherNet/IP speci…

SEMI E54.13-0303 © SEMI 2003 4

6.6 Transport Layer  The transport layer requires the

support of Transmission Control Protocol (TCP) (RFC

793) as well as User Datagram Protocol (UDP) (RFC

768).

6.7 Session Layer  Many of the services and

functions of the session layer for the EtherNet/IP

protocol are divided and handled, in varying capacities,

by the TCP/UDP protocol specifications and the

EtherNet/IP Application Layer specifications. The first

defines transport level connection sessions, while the

latter defines application level sessions in terms of

Explicit Connection and I/O Connection management.

6.8 Presentation Layer  The presentation layer is

defined in terms of standard data types and specific

encoding definitions for application layer data.

6.9 Application Layer  The device shall comply with

the EtherNet/IP application layer specification for

defining and addressing objects, including their

attributes and services, and enabling specified network

behavior. The device shall comply with the object

model specifications provided in the EtherNet/IP

specification.

6.10 Object models  EtherNet/IP provides an object-

oriented specification for creating, defining and

addressing objects explicitly, including their attributes

and services (i.e., explicit messaging), and creating,

defining and communicating object attribute assemblies

in an application dependent format (i.e., input/output

messaging). The device shall comply with the object

model specifications provided in the EtherNet/IP

documentation. In addition, the device shall comply

with the object specifications defined in Section 7 of

this document.

7 Required Object Types

7.1 The EtherNet/IP specification identifies and

describes objects (i.e., classes) that must exist in all

EtherNet/IP compliant devices. The Common Device

Model (CDM) specification additionally identifies two

objects, the Device Management (DM) and Sensor

Actuator Controller (SAC) objects, that must exist in all

SEMI compliant SAN devices. The required object

types for a SEMI compliant SAN device utilizing the

network communication specification described herein,

necessarily comprises the union of the above two

requirements.

7.2 A list of required and optional object types is given

in Table 2. Note that the Sensor, Actuator, and

Controller object types are not required, and are

indicated as optional in the CDM specification. These

objects are aggregated together to form a SEMI and

EtherNet/IP compliant device.

7.3 The two required object types from the CDM (the

DM and the SAC) are implemented as mapped

components in EtherNet/IP; they are mapped to the

SEMI-specific S-Device Supervisor object class as

described in this section.

7.4 The listed object types are:

• Identity,

• Message Router (MR),

• Connection (Conn),

• Connection Manager (CM),

• Ethernet Link (EL),

• TCP/IP Interface (TCP/IP),

• S-Device Supervisor (S-DS),

• Device Management (DM),

• Sensor Actuator Controller (SAC),

• Sensor,

• Actuator, and

• Controller.

7.5 Also, although not a network addressable object,

each device shall support the Unconnected Message

Manager (UCMM) as defined by EtherNet/IP.

Table 2 Object Types

Required by

Object EIP

Class ID

(See

Note 1.)

CDM

Tag (See

Note 2.)

EIP (See

Note 1.)

CDM (See

Note 2.)

NCS

Identity 01



Yes No Yes

MR 02



Yes No Yes

Conn 05



Yes No Yes

CM 06



Condi-

tional

(See

Note 1.)

No Condi-

tional

(See

Note 1.)

EL F5



Condi-

tional

(See

Note 1.)

No Condi-

tional

(See

Note 1.)

TCP/IP F6



Yes No Yes

S-DS 30



No No Yes



DmI0 No Yes Yes (See

Note 4.)

SAC



SACI0 No Yes Yes (See

Note 4.)

Sensor 31 SenIn No No No

Actuator 32 ActIn No No No

SEMI E54.13-0303 © SEMI 2003 5

Required by Object EIP

Class ID

(See

Note 1.)

CDM

Tag (See

Note 2.)

EIP (See

Note 1.)

CDM (See

Note 2.)

NCS

Controller 33 CntIn No No No

(Other) ***



No No No

NOTE 1: See EtherNet/IP specification for further information;

values are hexadecimal.

NOTE 2: See CDM specification for further information.

NOTE 3: Application Dependent.

NOTE 4: The DM and SAC Objects are implemented as mappings to

the S-Device Supervisor object for EtherNet/IP.

7.6 See the EtherNet/IP specification for the

implementation detail of the following object classes:

• Identity

• Message Router (MR)

• Connection (Conn)

• Connection Manager (CM)

• Ethernet Link (EL)

• TCP/IP Interface (TCP/IP)

• S-Device Supervisor (S-DS)

7.7 The Sensor, Actuator and Controller object types

are utilized collectively to model the type specific

structure and behavior of the device. The requirement

and number of each of these object types in a device

model is device type specific. Further, the attributes,

services and behavior associated with each of these

object classes and instances in a device is also device

type specific, but must be compliant with both SEMI

and EtherNet/IP specifications. The specification of

these object types for a specific device type can be

found in the appropriate SDM. The method of

presentation of object structure and behavior to the

EtherNet/IP network for objects defined for and

associated with a specific device type can be found in

Section 9 of this document.

7.8 The following sections describe the implementation

detail for the two required objects from the CDM. The

EtherNet/IP specification essentially combines the

Device Management (DM) Object and the Sensor

Actuator Controller (SAC) Object into a single Object:

the S-Device Supervisor (S-DS) Object.

7.9 Device Management (DM) Object  The DM

object is the device component responsible for

managing and consolidating the device operation. The

DM object as well as its common required and optional

attributes, services and behavior are described in the

CDM standard. The presentation of object attributes

and services to the EtherNet/IP network shall be as

indicated in Table 3 and Table 4 respectively. Each

attribute and service is shown with its corresponding

identifier (ID) for the S-DS Object.

Table 3 Network Presentation of DM Object

Attributes

Device Management Object Attributes

CDM Tag Name S-DS

Attribute ID

(See Note 1.)

DmA1 Device Type 03

DmA2 Standard Revision Level 04

DmA3 Device Manufacturer Identifier 05

DmA4 Manufacturer Model Number 06

DmA5 Software or Firmware Revision

Level

DmA6 Hardware Revision Level 08

DmA7 Serial Number 09

DmA8 Device Configuration 0A

DmA9 Device Status 0B

DmA10 Reporting Mode N.A. (See

Note 2.)

DmA11 Exception Status Timer N.A. (See

Note 2.)

DmA12 Exception Status 0C

DmA13 Exception Detail Alarm 0D

DmA13 Exception Detail Warning 0E

NOTE 1: Attribute Identifier Values are hexadecimal.

NOTE 2: Reporting is controlled in EtherNet/IP by the configuration

of connection related object instances. See the EtherNet/IP

specification for detail.

Table 4 Network Presentation of DM Object

Services

Device Management Object Services

CDM Tag Name (SEMI) Name (S-DS) S-DS

Service ID

(See Note 1.)

DmS1 Reset Reset 05

DmS2 Abort Abort 4B

DmS3 Recover Recover 4C

DmS4 Get Attribute Get_Attribute

_Single

DmS5 Set Attribute Set_Attribute

_Single

DmS6 Execute Start 06

DmS7 Perform

Diagnostics

Perform

_Diagnostics

NOTE 1: Service Identifier Values are hexadecimal.

7.10 Sensor, Actuator, Controller (SAC) Object  The

SAC object is the device component responsible for

coordinating the interaction of the device with the

sensory/actuation/control environment. The SAC

object as well as its common required and optional

attributes, services and behavior are described in the

CDM standard. The presentation of object attributes

and services to the EtherNet/IP network shall be as

indicated in Table 5 and Table 6 respectively. Each

attribute and service is shown with its corresponding

identifier (ID) for the S-DS Object.

Table 5 Network Presentation of SAC Object

Attributes

SAC Object Services

CDM Tag Name S-DS

Attribute ID

(See Note 1.)

SacA1 Last Calibration Date 13

SacA2 Next Calibration Date 14

SacA3 Expiration Timer 15

SacA4 Expiration Warning Enable 16

SacA5 Run Hours 17

NOTE 1: Attribute Identifier Values are hexadecimal.

Table 6 Network Presentation of SAC Object

Services

SAC Object Services

CDM Tag Name (SEMI) Name (S-DS) S-DS

Service ID

(See Note 1.)

SacS1 Reset Reset 05

SacS2 Abort Abort 4B

SacS3 Recover Recover 4C

SacS4 Get Attribute Get_Attribute

_Single

SacS5 Set Attribute Set_Attribute

_Single

SacS6 Operate Start 06

SacS7 Restore Default N.A.

(See Note 2.)



SacS8 Publish

Attribute

N.A.

(See Note 3.)



NOTE 1: Service Identifier Values are hexadecimal.

NOTE 2: Restoring defaults in EtherNet/IP is managed at the device

level with services defined for the Identity Object.

NOTE 3: Reporting is controlled in EtherNet/IP by the configuration

of connection related object instances. See the EtherNet/IP

specification for detail.

8 Protocol Compliance

8.1 A method of testing protocol compliance is

required to verify implementation conformance to the

standard.

8.2 The compliance test suite for this protocol is

documented along with the EtherNet/IP specification.

ODVA has established an independent test center that

perform a complete EtherNet/IP protocol compliance

test suite. Visit <http://www.odva.org> for more

information.

9 Specific Device Model Mappings

9.1 The following sections specify mappings for

Sensor Actuator Network Specific Device Models.

9.2 Mass Flow Device — Reference SEMI E54.3 for a

complete specification of the SDM for Mass Flow

Devices. Accordingly, the following mapping rules

apply to the identification tags for the Objects,

Attributes and Services of this model.

9.2.1 Objects — Table 7 shows the mapping of the

SDM objects specified in SEMI E54.3 and the

EtherNet/IP objects.

Table 7 MFD Object Identifiers

SDM Object Name SDM

Object ID

EIP Object Name EIP ID

(See

Note 1.)

Sensor-AI-MF MFD3 S-Analog

Sensor

Sensor-AI-AT MFD4 S-Analog

Sensor

Assembly-MFM MFD5 Assembly 04

Sensor-AI-Aux MFD6 S-Analog

Sensor

Actuator-AO-MF MFD7 S-Analog

Actuator

Controller MFD8 S-Single Stage

Controller

Local Link MFD9 N.A. (See Note 2.)



SISO MFD10 N.A. (See Note 2.)



SISO Setpoint MFD11 N.A. (See Note 2.)



Assembly-MFC MFD12 Assembly 04

NOTE 1: Object Identifier Values are hexadecimal.

NOTE 2: The EtherNet/IP device model provides a different

mechanism for data flow based on the configuration of EPATH type

attributes. See the EtherNet/IP specification for detail.

9.2.1.1 Additional objects may be defined by the

manufacturer in the Device Profile for a given device.

9.2.1.2 All objects listed in Table 7 provide a one-to-

one correlation, with respect to Attributes and Services,

between the SEMI SAN and EtherNet/IP. Therefore,