semi合集-English.pdf - 第1074页
SEMI E5-1104 © SEMI 1982, 2004 16 Name Format Description Values Where Used DATASEG 20 Used to identify the data requested S3F29, F31; S18F5, F7 DATASRC 20 Object type for Data Source Objects S14F1, F3, F6, F7, F8; S17F1…
SEMI E5-1104 © SEMI 1982, 2004 15
Name Format Description Values Where Used
CPNAME 20, 3(),
5()
Command Parameter Name
S2F41, F42,
F49, F50;
S4F21, F29;
S16F5, F27
CPVAL 10, 11,
20, 21,
3(), 5()
Command Parameter Value
S2F41, F49;
S4F21, F29;
S16F5, F27;
S18F13
CSAACK 10 Equipment
Acknowledgement code, 1
byte
0 = Everything correct
1 = Busy
2 = Invalid SPID
3 = Invalid data
>3 = Equipment-specific error
4-63 Reserved
S2F8
CTLJOBCMD 51 Control Job command codes
are assigned as follows:
1 = CJStart
2 = CJPause
3 = CJResume
4 = CJCancel
5 = CJDeselect
6 = CJStop
7 = CJAbort
8 = CJHOQ
S16F27
CTLJOBID 20 Identifier for Control Job.
Conforms to OBJID.
S16F27
DATA 20 A vector or string of
unformatted data
S3F29, F31;
S18F6, F7
DATAACK 10 Acknowledge code for data
0 = Acknowledge
1 = Unknown DATAID
2 = At least parameter is
invalid
3–63 Reserved
S14F22
DATAID 20, 3(),
5()
Data ID
S2F33, F35,
F39, F45, F49;
S3F15, F17;
S4F19, F25;
S6F3, F5, F7,
F8, F9, F11,
F13, F16, F18,
F27;
S13F11, F13,
F15;
S14F19, F21,
F23;
S15F27, F29,
F33, F35, F37,
F39, F41, F43,
F45, F47, F49;
S16F1, F3, F5,
F11, F13;
S17F1, F5, F9
DATALENGTH 3(), 5() Total bytes to be sent
S2F39;
S3F15, F29,
F31;
S4F25;
S6F5;
S13F11;
S14F23;
S16F1, F11;
S18F5, F7
SEMI E5-1104 © SEMI 1982, 2004 16
Name Format Description Values Where Used
DATASEG 20 Used to identify the data
requested
S3F29, F31;
S18F5, F7
DATASRC 20 Object type for Data Source
Objects
S14F1, F3, F6,
F7, F8;
S17F1
DATLC 51 Data location
Location of invalid data,
represented in bytes, measured
from the start of the message in
question, excluding all header
bytes.
S12F19
DRACK 10 Define Report Acknowledge
Code, 1 byte
0 = Accept
1 = Denied. Insufficient space
2 = Denied. Invalid format
3 = Denied. At least one RPTID
already defined
4 = Denied. At least VID does
not exist
>4 = Other errors
5-63 Reserved
S2F34
DSID 20, 3(),
5()
Data set ID
S6F3, F8, F9
DSNAME 20 The name of the Data Set
The minimum length is zero. The
maximum is 200 characters.
S13F1, F2, F3,
F4,
S7F37, F39,
F41, F43;
S15F49, F51
DSPER 20 Data sample period. DSPER
has two allowable formats:
Format 1: hhmmss, 6 bytes
Format 2: hhmmsscc, 8 bytes
Where “hh” is hours, “mm” is
minutes, “ss” is seconds’ and
“cc” is centiseconds.
Equipment shall either (1)
support only Format 1, or (2)
support both Format 1 and Format
2. Equipment shall document
which formats it accepts.
Equipment which supports Format
2 need not necessarily support a
minimum DSPER of 1 centisecond,
nor a trace resolution of 1
centisecond, but equipment
suppliers shall document its
trace performance limits.
S2F23
DUTMS 20 Die Units of Measure
Use units description per SEMI
E5 Section 12.
S12F1, F4
DVNAME 3(), 20,
5()
Data value name
S6F3, F8
DVVAL 0, 10,
11, 20,
21, 3(),
4(), 5()
Data value
S6F3, F8, F9
SEMI E5-1104 © SEMI 1982, 2004 17
Name Format Description Values Where Used
EAC 10 Equipment acknowledge
code, 1 byte
0 = Acknowledge
1 = Denied. At least one
constant does not exist
2 = Denied. Busy
3 = Denied. At least one
constant out of range
>3 = Other equipment-specific
error
4-63 Reserved
S2F16
ECDEF 10, 11,
20, 21,
3(), 4(),
5()
Equipment constant default
value
S2F30
ECID 3(), 20,
5()
Equipment Constant ID
S2F13, F15,
F29, F30
ECMAX 10, 11,
20, 21,
3(), 4(),
5()
Equipment constant
maximum value
S2F30
ECMIN 10, 11,
20, 21,
3(), 4(),
5()
Equipment constant
minimum value
S2F30
ECNAME 20 Equipment constant name
S2F30
ECV 10, 11,
20, 21,
3(), 4(),
5()
Equipment Constant Value
S2F14, F15
EDID 10, 20,
3(), 5()
Expected data Identification
Three possible responses.
MEXP EDID EDID
S02F03, <SPID> A[6]
S03Fl3, <PTN> B[1]
S07F03, <PPID> A[80],
B[80]
S9F13
EMID 10, 20 Equivalent material ID (16
bytes maximum)
S3F9
EPD 10 Executive program data
S8F4
EQNAME 20 A unique ASCII equipment
identifier assigned by the
factory to the equipment.
Limited to a maximum of 80
characters.
S4F29
ERACK 10 Enable/Disable Event Report
Acknowledge Code, 1 byte
0 = Accepted
1 = Denied. At least one CEID
does not exist
>1 = Other Errors
2-63 Reserved
S2F38
ERRCODE 5() Code identifying an error
0 = No error
1 = Unknown object in Object
Specifier
2 = Unknown target object type
3 = Unknown object instance
4 = Unknown attribute name
5 = Read-only attribute -
access denied
6 = Unknown object type
7 = Invalid attribute value
8 = Syntax error
S1F20;
S3F16, F30,
F32;
S4F20, F22,
F23, F33, F35;
S5F14, F15,
F18;
S13F14, F16;
S14F2, F4, F6,
F8, F10, F12,
F14, F16, F18,